Diffusion Morning Report 05/10/06
tberg at snf.stanford.edu
Wed May 10 06:30:44 PDT 2006
Good Morning All,
Looking good this morning. LTO has poor uniformity-investigating .
AMAT Epi install is moving ahead. TEOS pump should be back tomorrow.
Everything else looks OK for now.
Date: 5/10/06 THICKNESS-Change at
Tube Name/Number Status Comments
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-TEOS2 Down Pump out for repair 20.43/30
Tylan 8-SiGe Up 29.51/30
Tylan 9-Poly Up 4.27/30
Tylan 10-Nitride Up 26.98/30
Tylan 11-BPSG-LTO yellow bad uniformity 6.65/30
Tylan 12-FGA Up
Thermco 1 Up
Thermco 2 Up
Thermco Poly Up
Thermco Nitride Down Testing
Epi yellow possible higher leak rate
Burn Box Up
GAAS 22 UP
GAAS 23 up
SiH4 for furnaces A on line 560 psi changeover working well
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