Diffusion Morning Report

Raymond Seymour seymour at snf.stanford.edu
Thu May 11 08:04:56 PDT 2006


Good Morning Diffusion folks. Mr. Ted is at a seminar today. The TEOS2 pump
is due back today. BPSG uniformity is an issue that needs addressing. The
GeH4 for EPI is at the change point and will be changed shortly. And the
check passed before the weekend. All else looking good.


 

Date:

1/20/2006

THICKNESS-Change at


Tube Name/Number

Status

Comments

 


Tylan 1

Up

 

 


Tylan 2

Up

 

 


Tylan 3

Up

 

 


Tylan 4

Up

 

 


Tylan 5-BBr3

Down

 

 


Tylan 6-POCl3

Up

 

 


Tylan 7-TEOS2

Down

 Pump out for repair                      

20.43/30


Tylan 8-SiGe

Up

 

29.51/30


Tylan 9-Poly

Up

 

4.27/30


Tylan 10-Nitride

Up

 

26.98/30


Tylan 11-BPSG-LTO

Yellow

 

6.65/30


Tylan 12-FGA

Up

 

 


 

 

 

 


Thermco 1

Up

 

 


Thermco 2

Up

 

 


Thermco Poly

Up

 

 


Thermco Nitride

Down

Testing

 


 EPI

Yellow

 Leak rate concerns

 


Burn Box

Up

 

 


ZYGO

up

 

  


 

 

 

 

 


GAAS 22

UP

 

 


GAAS 23

UP

 

 


 

 

 

 


SiH4 for furnaces

 

A on line 560

 changeover working well 

 

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/diffusion/attachments/20060511/205b8b97/attachment.html>


More information about the diffusion mailing list