Diffusion Morning Report 05/15/06

Ted Berg tberg at snf.stanford.edu
Mon May 15 07:18:10 PDT 2006

Good Morning All,
    Well , I think we have almost caught up after the weekend gas 
scenario.  Epi had a burn box issue-resolved. Tylans 1 and 2 had MFS alarms.
Silane and all gases back on. Everything else is ok for now.

  	Date: 	5/15/06 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	Comments 	  	  	 
Tylan 1 	Up 	  	  	  	 
Tylan 2 	yellow 	mfs alarm 	  	  	 
Tylan 3 	Up 	  	  	  	 
Tylan 4 	Up 	  	  	  	 
Tylan 5-BBr3 	Up 	  	  	  	 
Tylan 6-POCl3 	Up 	  	  	  	 
Tylan 7-TEOS2 	Down 	leak failed 	20.43/30 	  	 
Tylan 8-SiGe 	Up 	  	30.12/30 	  	 
Tylan 9-Poly 	Up 	  	5.06/30 	  	 
Tylan 10-Nitride 	Up 	  	26.98/30 	  	 
Tylan 11-BPSG-LTO 	yellow 	bad uniformity 	6.65/30 	  	 
Tylan 12-FGA 	Up 	  	  	  	 
Thermco 1 	Up 	  	  	  	 
Thermco 2 	Up 	  	  	  	 
Thermco Poly 	Up 	  	  	  	 
Thermco Nitride 	Down 	Testing 	  	  	 
Epi 	yellow 	possible higher leak rate 	  	  	 
Burn Box 	Up 	  	  	  	 
ZYGO 	up 	  	   	  	 
GAAS 22 	UP 	  	  	  	 
GAAS 23 	up 	  	  	  	 
SiH4 for furnaces 	  	A on line 560 psi 	 changeover working well  	  	 

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