Diffusion Morning Report

Raymond Seymour seymour at snf.stanford.edu
Fri May 19 08:18:33 PDT 2006


Good Morning All,

Ted is out today. Things looking very good today. I will check out the DCS
flow this morning to see if the MFC calibration is way off at the low end of
the flow.

All else looking good.


 

Date:

1/29/2006

THICKNESS-Change at


Tube Name/Number

Status

Comments

 


Tylan 1

Up

 

 


Tylan 2

Up

 

 


Tylan 3

Up

 

 


Tylan 4

Up

 

 


Tylan 5-BBr3

Up

 

 


Tylan 6-POCl3

Up

 

 


Tylan 7-TEOS2

Up

                       

.9/30


Tylan 8-SiGe

Up

 

30.17/30


Tylan 9-Poly

Up

 

5.72/30


Tylan 10-Nitride

Yellow

DCS flow concern

28.1/30


Tylan 11-BPSG-LTO

Yellow

Uniformity 

3.32/30


Tylan 12-FGA

Up

 

 


 

 

 

 


Thermco 1

Up

 

 


Thermco 2

Up

 

 


Thermco Poly

Up

 

 


Thermco Nitride

Down

Testing

 


 EPI

Yellow

 Leak rate concerns

 


Burn Box

Up

 

 


ZYGO

up

 

  


 

 

 

 

 


GAAS 22

UP

 

 


GAAS 23

UP

 

 


 

 

 

 


SiH4 for furnaces

 

A on line 540

 changeover working well 

 

 

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