Diffusion Morning Report 05/22/06

Ted Berg tberg at snf.stanford.edu
Mon May 22 06:40:22 PDT 2006


Good Morning All,
    Looking OK this morning. LPs, Epi , and sts depShut down for 
industrial water and CDA tie ins for Epi. Looking into Nitride and TEOS 
issues.
Everything else looks OK for now.

Diffusion 	  	  	  	  	 
  	Date: 	5/22/06 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	Comments 	  	  	 
Tylan 1 	Up 	  	  	  	 
Tylan 2 	Up 	  	  	  	 
Tylan 3 	Up 	  	  	  	 
Tylan 4 	Up 	  	  	  	 
Tylan 5-BBr3 	Up 	  	  	  	 
Tylan 6-POCl3 	Up 	  	  	  	 
Tylan 7-TEOS2 	Down 	 leaks good looking at temp 	0/30 	  	 
Tylan 8-SiGe 	Up 	  	30.17/30 	  	 
Tylan 9-Poly 	Up 	  	5.72/30 	  	 
Tylan 10-Nitride 	yellow 	High Pressure and RI 	28.1/30 	  	 
Tylan 11-BPSG-LTO 	yellow 	poor uniformity 	3.94/30 	  	 
Tylan 12-FGA 	Up 	  	  	  	 
  	  	  	  	  	 
Thermco 1 	Up 	  	  	  	 
Thermco 2 	Up 	  	  	  	 
Thermco Poly 	Up 	  	  	  	 
Thermco Nitride 	Down 	Testing 	  	  	 
  	  	  	  	  	 
Epi 	yellow 	possible higher leak rate 	  	  	 
  	  	  	  	  	 
Burn Box 	Up 	  	  	  	 
ZYGO 	up 	  	   	  	 
  	  	  	  	  	 
GAAS 22 	UP 	  	  	  	 
GAAS 23 	up 	  	  	  	 
  	  	  	  	  	 
SiH4 for furnaces 	  	A on line 520 psi 	 changeover working well  	  	 


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