Diffusion Morning Report 05/23/06

Ted Berg tberg at snf.stanford.edu
Tue May 23 06:33:55 PDT 2006


Good Morning All,
    Looking OK this morning. Nitride is going down for scheduled pull 
and clean. TEOS had some leak rate issues. LTO still has uniformity issues.
Everything else is OK for now.

Diffusion Mike,Ray, Ted 	  	  	  	  	 
  	Date: 	5/23/06 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	Comments 	  	  	 
Tylan 1 	Up 	  	  	  	 
Tylan 2 	Up 	  	  	  	 
Tylan 3 	Up 	  	  	  	 
Tylan 4 	Up 	  	  	  	 
Tylan 5-BBr3 	Up 	  	  	  	 
Tylan 6-POCl3 	Up 	  	  	  	 
Tylan 7-TEOS2 	yellow 	pump fails 	2.7/30 	  	 
Tylan 8-SiGe 	Up 	  	30.17/30 	  	 
Tylan 9-Poly 	Up 	  	5.72/30 	  	 
Tylan 10-Nitride 	Down 	pull and clean 	0/30 	  	 
Tylan 11-BPSG-LTO 	yellow 	poor uniformity 	5.05/30 	  	 
Tylan 12-FGA 	Up 	  	  	  	 
  	  	  	  	  	 
Thermco 1 	Up 	  	  	  	 
Thermco 2 	Up 	  	  	  	 
Thermco Poly 	Up 	  	  	  	 
Thermco Nitride 	Down 	Testing 	  	  	 
  	  	  	  	  	 
Epi 	yellow 	possible higher leak rate 	  	  	 
  	  	  	  	  	 
Burn Box 	Up 	  	  	  	 
ZYGO 	up 	  	   	  	 
  	  	  	  	  	 
GAAS 22 	UP 	  	  	  	 
GAAS 23 	up 	  	  	  	 
  	  	  	  	  	 
SiH4 for furnaces 	  	A on line 520 psi 	 changeover working well  	  	 


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