Diffusion Morning report

Raymond Seymour seymour at snf.stanford.edu
Fri May 26 07:30:09 PDT 2006


Good Morning All,

Ted is out today. Nitride has a DCS flow problem and Mike is cleaning out
the pump exhaust line. All else looking pretty good.

Have a great holiday weekend.


 

Date:

5/26/2006

THICKNESS-Change at


Tube Name/Number

Status

Comments

 


Tylan 1

Up

 

 


Tylan 2

Up

 

 


Tylan 3

Up

 

 


Tylan 4

Up

 

 


Tylan 5-BBr3

Up

 

 


Tylan 6-POCl3

Up

 

 


Tylan 7-TEOS2

Up

                       

2.7/30


Tylan 8-SiGe

Up

 

30.17/30


Tylan 9-Poly

Up

 

7.65/30


Tylan 10-Nitride

Down

DCS flow concern

0/30


Tylan 11-BPSG-LTO

Yellow

Uniformity 

5.31/30


Tylan 12-FGA

Up

 

 


 

 

 

 


Thermco 1

Up

 

 


Thermco 2

Up

 

 


Thermco Poly

Up

 

 


Thermco Nitride

Down

Testing

 


 EPI

Yellow

 Leak rate concerns

 


Burn Box

Up

 

 


ZYGO

up

 

  


 

 

 

 

 


GAAS 22

UP

 

 


GAAS 23

UP

 

 


 

 

 

 


SiH4 for furnaces

 

A on line 520

 changeover working well 

 

 

 

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