Epi :Zero'ed H2 detector #3

Maurice Stevens maurice at snf.stanford.edu
Fri May 26 12:03:57 PDT 2006


Zero'ed H2 detector #3... detector for wafer handling chamber
The detector showed "WARN" with no H2 present.
Message said "Contactor not Sensed"

This may have been the cause of our shutdowns.  Cross your fingers.

-m



Raymond Seymour wrote:

> Good Morning All,
>
> Ted is out today. Nitride has a DCS flow problem and Mike is cleaning 
> out the pump exhaust line. All else looking pretty good.
>
> Have a great holiday weekend.
>
>  
>
> 	
>
> Date:
>
> 	
>
> 5/26/2006
>
> 	
>
> THICKNESS-Change at
>
> Tube Name/Number
>
> 	
>
> Status
>
> 	
>
> Comments
>
> 	
>
>  
>
> Tylan 1
>
> 	
>
> Up
>
> 	
>
>  
>
> 	
>
>  
>
> Tylan 2
>
> 	
>
> Up
>
> 	
>
>  
>
> 	
>
>  
>
> Tylan 3
>
> 	
>
> Up
>
> 	
>
>  
>
> 	
>
>  
>
> Tylan 4
>
> 	
>
> Up
>
> 	
>
>  
>
> 	
>
>  
>
> Tylan 5-BBr3
>
> 	
>
> Up
>
> 	
>
>  
>
> 	
>
>  
>
> Tylan 6-POCl3
>
> 	
>
> Up
>
> 	
>
>  
>
> 	
>
>  
>
> Tylan 7-TEOS2
>
> 	
>
> Up
>
> 	
>
>                        
>
> 	
>
> 2.7/30
>
> Tylan 8-SiGe
>
> 	
>
> Up
>
> 	
>
>  
>
> 	
>
> 30.17/30
>
> Tylan 9-Poly
>
> 	
>
> Up
>
> 	
>
>  
>
> 	
>
> 7.65/30
>
> Tylan 10-Nitride
>
> 	
>
> Down
>
> 	
>
> DCS flow concern
>
> 	
>
> 0/30
>
> Tylan 11-BPSG-LTO
>
> 	
>
> Yellow
>
> 	
>
> Uniformity
>
> 	
>
> 5.31/30
>
> Tylan 12-FGA
>
> 	
>
> Up
>
> 	
>
>  
>
> 	
>
>  
>
>  
>
> 	
>
>  
>
> 	
>
>  
>
> 	
>
>  
>
> Thermco 1
>
> 	
>
> Up
>
> 	
>
>  
>
> 	
>
>  
>
> Thermco 2
>
> 	
>
> Up
>
> 	
>
>  
>
> 	
>
>  
>
> Thermco Poly
>
> 	
>
> Up
>
> 	
>
>  
>
> 	
>
>  
>
> Thermco Nitride
>
> 	
>
> Down
>
> 	
>
> Testing
>
> 	
>
>  
>
>  EPI
>
> 	
>
> Yellow
>
> 	
>
>  Leak rate concerns
>
> 	
>
>  
>
> Burn Box
>
> 	
>
> Up
>
> 	
>
>  
>
> 	
>
>  
>
> ZYGO
>
> 	
>
> up
>
> 	
>
>  
>
> 	
>
>   
>
>  
>
>  
>
> 	
>
>  
>
> 	
>
>  
>
> 	
>
>  
>
> GAAS 22
>
> 	
>
> UP
>
> 	
>
>  
>
> 	
>
>  
>
> GAAS 23
>
> 	
>
> UP
>
> 	
>
>  
>
> 	
>
>  
>
>  
>
> 	
>
>  
>
> 	
>
>  
>
> 	
>
>  
>
> SiH4 for furnaces
>
> 	
>
>  
>
> 	
>
> A on line 520
>
> 	
>
>  changeover working well 
>
>  
>
>  
>
>  
>

-- 
maurice at stanford.edu

Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA  94305
P. (650)725-3660
F. (650)725.6278

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