Diffusion Morning Report 05/31/06

Ted Berg tberg at snf.stanford.edu
Wed May 31 10:15:41 PDT 2006


Good Morning All,
    Looking better than yesterday. LTO, Poly, Tylan6, and possibly 
nitride are back up. TEOS has a leak still-looking into it.  Everything 
else looks OK for now.

Diffusion Mike,Ray, Ted 	  	  	  	  	 
  	Date: 	5/31/06 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	Comments 	  	  	 
Tylan 1 	Up 	  	  	  	 
Tylan 2 	Up 	  	  	  	 
Tylan 3 	Up 	  	  	  	 
Tylan 4 	Up 	  	  	  	 
Tylan 5-BBr3 	Up 	  	  	  	 
Tylan 6-POCl3 	Up 	  	  	  	 
Tylan 7-TEOS2 	down 	leak-pump off 	0/30 	  	 
Tylan 8-SiGe 	Up 	  	30.17/30 	  	 
Tylan 9-Poly 	Up 	  	9.17/30 	  	 
Tylan 10-Nitride 	Down 	DCS flow issues 	3.42/30 	  	 
Tylan 11-BPSG-LTO 	yellow 	poor uniformity 	8.06/30 	  	 
Tylan 12-FGA 	Up 	  	  	  	 
  	  	  	  	  	 
Thermco 1 	Up 	  	  	  	 
Thermco 2 	Up 	  	  	  	 
Thermco Poly 	Up 	  	  	  	 
Thermco Nitride 	Down 	Testing 	  	  	 
  	  	  	  	  	 
Epi 	yellow 	possible higher leak rate 	  	  	 
  	  	  	  	  	 
Burn Box 	Up 	  	  	  	 
ZYGO 	up 	  	   	  	 
  	  	  	  	  	 
GAAS 22 	UP 	  	  	  	 
GAAS 23 	up 	  	  	  	 
  	  	  	  	  	 
SiH4 for furnaces 	  	A on line 500 psi 	 changeover working well  	  	 


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