From tberg at stanford.edu Wed Nov 1 06:40:11 2006 From: tberg at stanford.edu (Ted Berg) Date: Wed, 01 Nov 2006 06:40:11 -0800 Subject: Diffusion Morning Report 11/01/06 Message-ID: <4548B1CB.8090700@stanford.edu> Good Morning All, Looking OK this morning. Epi is still down for big leak-new tube ordered. Tylan3 still down for temp issues. Tylan 2 need a test after H2 tc repair. Still waiting for AMAT process help. Date: 11/1/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 yellow Low dep Tylan 3 down temp issues Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 8.79/30 Tylan 8-SiGe Up 8.57/30 Tylan 9-Poly Up 13.021/30 Tylan 10-Nitride Up 13.38/30 Tylan 11-BPSG-LTO up 3.43/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Up Epi down leak Burn Box up ZYGO Up up GAAS 22 GAAS 23 UP SiH4 for furnaces up A on line 675 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Wed Nov 1 09:44:18 2006 From: nanotech at nsti.org (Nanotech 2007) Date: Wed, 1 Nov 2006 09:44:18 -0800 Subject: Call for Papers - 10th Annual NSTI Nanotech Conference Message-ID: Dear Colleague, Please accept our invitation to submit a paper for the 10th annual NSTI Nanotech 2007 and BioNano 2007. These world premier nanotechnology conferences and trade show take place May 20-24, 2007 at the Santa Clara Convention Center, Santa Clara, California. Visit http://www.nsti.org/Nanotech2007 for submission details The largest and most comprehensive nanotechnology event in the world, Nanotech 2007 will host over 4,000 attendees, 400 exhibitors, 900 research & business presentations, and over 200 Nanotech Early Stage Venture presentations. This year?s program is scheduled with special industry focused symposia including: Health Care, Biotechnology, Materials, Surface Sciences, Transportation, Personal Care, Energy, Food, Environmental, Electronics, Telecommunications, Computational, Displays & Optics, Design & Modeling, Polymers, and Coatings sectors. With over 30 Conference and Symposia included in this years program, the NSTI Nanotech community encourages you to submit your abstract by November 17th, 2006. ------------------------------------------------------------------------ Conference groupings roughly include: - Nanoscale Electronics & Microsystems (MEMS) - Nanotech in Life Science & Medicine - Nanoscale Materials & Technologies - Business, Partnering, Policy For more information and information on participating and sponsoring organizations, please visit: http://www.nsti.org/Nanotech2007 or to view last year?s program visit: http://www.nsti.org/Nanotech2006 Regards, Nano Science and Technology Institute Cambridge Massachusetts http://www.nsti.org --- You are currently subscribed to nanotech as: diffusion at snf.stanford.edu To unsubscribe send a blank email to leave-nanotech-6754768W at spirit.sparklist.com -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Nov 2 06:29:11 2006 From: tberg at stanford.edu (Ted Berg) Date: Thu, 02 Nov 2006 06:29:11 -0800 Subject: Diffusion Morning Report 11/02/06 Message-ID: <454A00B7.3030001@stanford.edu> Good Morning All, Looking OK this morning. Epi has a cracked tube and PR has been written, current tube is being cleaned and will be sent out for possible rerpair. Tylan 3 still has temp issues-looking into it. AMAT fs to be here this morning to cycle wafers. Looks like no process until at least next week.Prometrics to go out for repair this week. Diffusion Date: 11/2/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 down temp issues Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 8.79/30 Tylan 8-SiGe Up 8.61/30 Tylan 9-Poly Up 13.02/30 Tylan 10-Nitride Up 13.38/30 Tylan 11-BPSG-LTO up 3.47/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Up Epi down cracked tube Burn Box up ZYGO Up up GAAS 22 GAAS 23 UP SiH4 for furnaces up A on line 675 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Nov 3 06:32:57 2006 From: tberg at stanford.edu (Ted Berg) Date: Fri, 03 Nov 2006 06:32:57 -0800 Subject: Diffusion Morning Report 11/03/06 Message-ID: <454B5319.10800@stanford.edu> Good Morning All, Looking OK this morning. Tylan 3 still has temp problems- looking into it. Epi tube PR in purchasing. Old tube out for repair. Tube 4 Loader board replaced-observing. Amat Wafer transfer completed-good waiting for Our results and AMAT process eng. No other problems at this time. Diffusion Date: 11/3/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 down temp issues Tylan 4 yellow Watch door closure Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 8.79/30 Tylan 8-SiGe Up 8.67/30 Tylan 9-Poly Up 13.02/30 Tylan 10-Nitride Up 13.38/30 Tylan 11-BPSG-LTO up 4.11/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Up Epi down cracked tube Burn Box up ZYGO Up up GAAS 22 GAAS 23 UP SiH4 for furnaces up A on line 675 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Nov 6 07:13:11 2006 From: tberg at stanford.edu (Ted Berg) Date: Mon, 06 Nov 2006 07:13:11 -0800 Subject: Morning Report 11/06/06 Message-ID: <454F5107.8000804@stanford.edu> Good Morning All, Looking pretty good today. Epi tube still waiting. Tylan 3 and 4 look like they are resolved-observing. AMAT process hopefully here this week. Diffusion Date: 11/6/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up repacked tube-test good Tylan 4 yellow Watch door closure Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 8.79/30 Tylan 8-SiGe Up 8.67/30 Tylan 9-Poly Up 13.07/30 Tylan 10-Nitride Up 16.64/30 Tylan 11-BPSG-LTO yellow Intermittant alarm at end of cycle 6.47/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Up Epi down cracked tube Burn Box up ZYGO Up up GAAS 22 GAAS 23 UP SiH4 for furnaces up A on line 675 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Mon Nov 6 09:10:32 2006 From: nanotech at nsti.org (Nanotech 2007) Date: Mon, 6 Nov 2006 09:10:32 -0800 Subject: Call for Papers - 10th Annual NSTI Nanotech Conference Message-ID: Dear Colleague, Please accept our invitation to submit a paper for the 10th annual NSTI Nanotech 2007 and BioNano 2007. These world premier nanotechnology conferences and trade show take place May 20-24, 2007 at the Santa Clara Convention Center, Santa Clara, California. Visit http://www.nsti.org/Nanotech2007 for submission details The largest and most comprehensive nanotechnology event in the world, Nanotech 2007 will host over 4,000 attendees, 400 exhibitors, 900 research & business presentations, and over 200 Nanotech Early Stage Venture presentations. This year?s program is scheduled with special industry focused symposia including: Health Care, Biotechnology, Materials, Surface Sciences, Transportation, Personal Care, Energy, Food, Environmental, Electronics, Telecommunications, Computational, Displays & Optics, Design & Modeling, Polymers, and Coatings sectors. With over 30 Conference and Symposia included in this years program, the NSTI Nanotech community encourages you to submit your abstract by November 17th, 2006. ------------------------------------------------------------------------ Conference groupings roughly include: - Nanoscale Electronics & Microsystems (MEMS) - Nanotech in Life Science & Medicine - Nanoscale Materials & Technologies - Business, Partnering, Policy For more information and information on participating and sponsoring organizations, please visit: http://www.nsti.org/Nanotech2007 or to view last year?s program visit: http://www.nsti.org/Nanotech2006 Regards, Nano Science and Technology Institute Cambridge Massachusetts http://www.nsti.org --- You are currently subscribed to nanotech as: diffusion at snf.stanford.edu To unsubscribe send a blank email to leave-nanotech-6754768W at spirit.sparklist.com -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Nov 7 06:30:02 2006 From: tberg at stanford.edu (Ted Berg) Date: Tue, 07 Nov 2006 06:30:02 -0800 Subject: Diffusion Morning Report 11/07/06 Message-ID: <4550986A.1040007@stanford.edu> Good Morning All, Loooking OK this morning . Still waiting for Epi tube. Watching Tylan 4 door closure.. BPSG has intermittant PH3 mfs alarm at end of cycle. AMAT process is getting ready to run tier 2 quals. No other problems at this time. Diffusion Date: 11/7/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 yellow Watch door closure Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 9.25/30 Tylan 8-SiGe Up 9.3/30 Tylan 9-Poly Up 13.37/30 Tylan 10-Nitride Up 16.64/30 Tylan 11-BPSG-LTO yellow Intermittant alarm at end of cycle 8.82/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Up Epi down cracked tube Burn Box up ZYGO Up up GAAS 22 GAAS 23 UP SiH4 for furnaces up A on line 675 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Nov 8 06:38:26 2006 From: tberg at stanford.edu (Ted Berg) Date: Wed, 08 Nov 2006 06:38:26 -0800 Subject: Diffusion Morning Report 11/08/06 Message-ID: <4551EBE2.1080906@stanford.edu> Good morning All. Looking OK this morning. Waiting for Epi Tube. Observing Tylan 4 door issue. LTO has intermittant MFS alarms at end of cycle. AMAT process to be here today to discuss testing plan. Diffusion Date: 11/8/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 yellow Watch door closure Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 9.25/30 Tylan 8-SiGe Up 9.3/30 Tylan 9-Poly Up 13.37/30 Tylan 10-Nitride Up 16.64/30 Tylan 11-BPSG-LTO yellow Intermittant alarm at end of cycle 9.19/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Up Epi down cracked tube Burn Box up ZYGO Up up GAAS 22 GAAS 23 UP SiH4 for furnaces up A on line 675 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Wed Nov 8 13:02:49 2006 From: nanotech at nsti.org (Nano World News) Date: Wed, 8 Nov 2006 13:02:49 -0800 Subject: Nano World News November 2006 Message-ID: ******************************************************* *Note: If you are having trouble viewing this message,* *copy and paste the link below into your browser * *address field and hit the Enter button on your * *keyboard. * http://www.nsti.org/news/ *If you would like to unsubscribe, copy the URL below:* http://www.nsti.org/outreach/unsubscribe.html ******************************************************* --- You are currently subscribed to nanotech as: diffusion at snf.stanford.edu To unsubscribe send a blank email to leave-nanotech-6754768W at spirit.sparklist.com -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Nov 9 06:27:31 2006 From: tberg at stanford.edu (Ted Berg) Date: Thu, 09 Nov 2006 06:27:31 -0800 Subject: Diffusion Morning Report 11/09/06 Message-ID: <45533AD3.5060003@stanford.edu> Good Morning All, Looking OK this morning. We have a repaired epi tube and are continuing to check out the system. Tylan LTO continues to have MFS alarms at the end of the recipe-looking into it. Observing door close on Tylan 4 Met with AMAT on Epi quals. No other problems at this time. Diffusion Date: 11/9/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 yellow Watch door closure Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 9.25/30 Tylan 8-SiGe Up 9.3/30 Tylan 9-Poly Up 13.37/30 Tylan 10-Nitride Up 16.64/30 Tylan 11-BPSG-LTO yellow Intermittant alarm at end of cycle 10.83/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Up possible leak fail Epi down cracked tube Burn Box up ZYGO Up up GAAS 22 GAAS 23 UP SiH4 for furnaces up A on line 675 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Fri Nov 10 05:15:55 2006 From: nanotech at nsti.org (Nanotech 2007) Date: Fri, 10 Nov 2006 05:15:55 -0800 Subject: Abstracts Due: Friday November 17, 2006 Message-ID: Dear Colleague, Please accept our invitation to submit a paper for the 10th annual NSTI Nanotech 2007 and BioNano 2007. These world premier nanotechnology conferences and trade show take place May 20-24, 2007 at the Santa Clara Convention Center, Santa Clara, California. Visit http://www.nsti.org/Nanotech2007 for submission details The largest and most comprehensive nanotechnology event in the world, Nanotech 2007 will host over 4,000 attendees, 400 exhibitors, 900 research & business presentations, and over 200 Nanotech Early Stage Venture presentations. This year?s program is scheduled with special industry focused symposia including: Health Care, Biotechnology, Materials, Surface Sciences, Transportation, Personal Care, Energy, Food, Environmental, Electronics, Telecommunications, Computational, Displays & Optics, Design & Modeling, Polymers, and Coatings sectors. With over 30 Conference and Symposia included in this years program, the NSTI Nanotech community encourages you to submit your abstract by November 17th, 2006. ------------------------------------------------------------------------ Conference groupings roughly include: - Nanoscale Electronics & Microsystems (MEMS) - Nanotech in Life Science & Medicine - Nanoscale Materials & Technologies - Business, Partnering, Policy For more information and information on participating and sponsoring organizations, please visit: http://www.nsti.org/Nanotech2007 or to view last year?s program visit: http://www.nsti.org/Nanotech2006 Regards, Nano Science and Technology Institute Cambridge Massachusetts http://www.nsti.org --- You are currently subscribed to nanotech as: diffusion at snf.stanford.edu To unsubscribe send a blank email to leave-nanotech-6754768W at spirit.sparklist.com -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Nov 10 06:34:51 2006 From: tberg at stanford.edu (Ted Berg) Date: Fri, 10 Nov 2006 06:34:51 -0800 Subject: Diffusion Morning Report 11/10/06 Message-ID: <45548E0B.9080507@stanford.edu> Good Morning All, Looking Ok this morning. Working on ASM Epi. Burn box cleaned this morning. Ebeam cryo regen. Amat epi-GEH4 mfc out for range change. TEL-requested install manual and PTAs so we can move ahead. No other problems at this time. Diffusion Date: 11/10/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up door ok Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 9.25/30 Tylan 8-SiGe Up 9.3/30 Tylan 9-Poly Up 13.52/30 Tylan 10-Nitride Up 16.72/30 Tylan 11-BPSG-LTO yellow Changing PH3 MFC 12.18/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Up Epi down working on it Burn Box up Cleaned this morning ZYGO Up up GAAS 22 GAAS 23 UP SiH4 for furnaces up A on line 675 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Nov 13 07:10:56 2006 From: tberg at stanford.edu (Ted Berg) Date: Mon, 13 Nov 2006 07:10:56 -0800 Subject: Diffusion Morning Report 11/13/06 Message-ID: <45588B00.60306@stanford.edu> Good Morning All, Looking OK this morning. Working on Epi, Ebeam cryo 1 is at high temp-regening. Tylan BPSG Ph3 valve back on after MFC change. THermco Poly has possible Si H4 flow issues-Checking it out. AMAT epi process eng to be here later this week. No other issues at this time. Diffusion Date: 11/13/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 9.25/30 Tylan 8-SiGe Up 9.3/30 Tylan 9-Poly Up 13.52/30 Tylan 10-Nitride Up 16.72/30 Tylan 11-BPSG-LTO UP Intermittant PH3 leak messages 12.18/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly yellow Possible sih4 flow issues Thermco Nitride Up Epi down working on it Burn Box up ZYGO Up up GAAS 22 GAAS 23 UP SiH4 for furnaces up A on line 675 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Nov 14 06:31:03 2006 From: tberg at stanford.edu (Ted Berg) Date: Tue, 14 Nov 2006 06:31:03 -0800 Subject: Diffusion Morning Report 11/14/06 Message-ID: <4559D327.1070003@stanford.edu> Good Morning all, Looking OK this morning. ASM field service will be here today to help investigate problems. Thermco poly has sih4 flow issues- Checking it out. Waiting new eprom for Tylan LTO. Tylan 2 has possible thickness issues-investigating. AMAT epi process to be here on Thursday for quals. Waiting details for TEL install. No other problems at this time. Diffusion Date: 11/14/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 yellow Possible thickness issues Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 9.25/30 Tylan 8-SiGe Up 9.3/30 Tylan 9-Poly Up 13.67/30 Tylan 10-Nitride Up 17.54/30 Tylan 11-BPSG-LTO UP Intermittant PH3 leak messages 12.78/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly down Possible sih4 flow issues Thermco Nitride Up Epi down working on it Burn Box up ZYGO Up up GAAS 22 GAAS 23 UP SiH4 for furnaces up A on line 670 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Wed Nov 15 06:14:06 2006 From: nanotech at nsti.org (Nanotech 2007) Date: Wed, 15 Nov 2006 06:14:06 -0800 Subject: Final Call for Papers - Abstracts Due Friday Message-ID: Dear Colleague, Please accept our invitation to submit a paper for the 10th annual NSTI Nanotech 2007 and BioNano 2007. These world premier nanotechnology conferences and trade show take place May 20-24, 2007 at the Santa Clara Convention Center, Santa Clara, California. Abstracts Due: Friday November 17, 2006 Visit http://www.nsti.org/Nanotech2007 for submission details The largest and most comprehensive nanotechnology event in the world, Nanotech 2007 will host over 4,000 attendees, 400 exhibitors, 900 research & business presentations, and over 200 Nanotech Early Stage Venture presentations. This year?s program is scheduled with special industry focused symposia including: Health Care, Biotechnology, Materials, Surface Sciences, Transportation, Personal Care, Energy, Food, Environmental, Electronics, Telecommunications, Computational, Displays & Optics, Design & Modeling, Polymers, and Coatings sectors. With over 30 Conference and Symposia included in this years program, the NSTI Nanotech community encourages you to submit your abstract by November 17th, 2006. ------------------------------------------------------------------------ Conference groupings roughly include: - Nanoscale Electronics & Microsystems (MEMS) - Nanotech in Life Science & Medicine - Nanoscale Materials & Technologies - Business, Partnering, Policy For more information and information on participating and sponsoring organizations, please visit: http://www.nsti.org/Nanotech2007 or to view last year?s program visit: http://www.nsti.org/Nanotech2006 Regards, Nano Science and Technology Institute Cambridge Massachusetts http://www.nsti.org --- You are currently subscribed to nanotech as: diffusion at snf.stanford.edu To unsubscribe send a blank email to leave-nanotech-6754768W at spirit.sparklist.com -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Nov 15 07:14:17 2006 From: tberg at stanford.edu (Ted Berg) Date: Wed, 15 Nov 2006 07:14:17 -0800 Subject: diffusion morning report 11/15/06 Message-ID: <455B2EC9.9080907@stanford.edu> Good Morning All, Looking OK this morning . Still working on Epi- burn box issues and possible isolation valve issues. Thermco poly-looks like issues with satisfying interlocks not letting gases flow. Tylan 2 needs test afterUnder temp TC work. AMAT epi GeH4 mfc is changed to 40 sccm and reinstalled waiting for process tomorrow. Still sorting out TEL install.. WB diff had a leak last night. No other issues at this time. Diffusion Date: 11/15/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 yellow Possible thickness issues Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 9.25/30 Tylan 8-SiGe Up 9.3/30 Tylan 9-Poly Up 13.67/30 Tylan 10-Nitride Up 17.67/30 Tylan 11-BPSG-LTO UP Intermittant PH3 leak messages 13.1/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly down Possible sih4 flow issues Thermco Nitride Up Epi down working on it Burn Box up ZYGO Up up GAAS 22 GAAS 23 UP SiH4 for furnaces up A on line 640 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Nov 16 06:33:08 2006 From: tberg at stanford.edu (Ted Berg) Date: Thu, 16 Nov 2006 06:33:08 -0800 Subject: Diffusion Morning Report 11/16/06 Message-ID: <455C76A4.8020507@stanford.edu> Good Morning All, Looking OK this morning. Epi Burn box going back together, Gate valve assy should be here tomorrow. Installing New Eprom in LTO hopefully will get rid of nannoying alarms. Tylans 5 and 6 down to look at leak issues. Chipsordered for possible Thermco poly fix. AMAT process will be here this afternoon to continue quals. TEL still trying to decide where it will go. Tylan 2 has temp issues. Anything else messed up? Diffusion Date: 11/16/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 down temp issues Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 9.25/30 Tylan 8-SiGe Up 9.13/30 Tylan 9-Poly Up 13.67/30 Tylan 10-Nitride Up 17.67/30 Tylan 11-BPSG-LTO UP Changing Eprom 14.04/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly down Sih4 flow issues Thermco Nitride Up Epi down working on it Burn Box up ZYGO Up up GAAS 22 GAAS 23 UP SiH4 for furnaces up A on line 640 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Fri Nov 17 05:05:15 2006 From: nanotech at nsti.org (Nanotech 2007) Date: Fri, 17 Nov 2006 05:05:15 -0800 Subject: FINAL CALL - Submit Your Abstract Today Message-ID: Dear Colleague, Please accept our invitation to submit a paper for the 10th annual NSTI Nanotech 2007 and BioNano 2007. These world premier nanotechnology conferences and trade show take place May 20-24, 2007 at the Santa Clara Convention Center, Santa Clara, California. Abstracts Due: Friday November 17th, 2006 Visit http://www.nsti.org/Nanotech2007/authors/ for submission details The largest and most comprehensive nanotechnology event in the world, Nanotech 2007 will host over 4,000 attendees, 400 exhibitors, 900 research & business presentations, and over 200 Nanotech Early Stage Venture presentations. This year's program is scheduled with special industry focused symposia including: Health Care, Biotechnology, Materials, Surface Sciences, Transportation, Personal Care, Energy, Food, Environmental, Electronics, Telecommunications, Computational, Displays & Optics, Design & Modeling, Polymers, and Coatings sectors. With over 30 Conference and Symposia included in this years program, the NSTI Nanotech community encourages you to submit your abstract by November 17th, 2006. ------------------------------------------------------------------------ Conference groupings roughly include: - Nanoscale Electronics & Microsystems (MEMS) - Nanotech in Life Science & Medicine - Nanoscale Materials & Technologies - Business, Partnering, Policy For more information and information on participating and sponsoring organizations, please visit: http://www.nsti.org/Nanotech2007 or to view last year's program visit: http://www.nsti.org/Nanotech2006 Regards, Nano Science and Technology Institute Cambridge Massachusetts http://www.nsti.org --- You are currently subscribed to nanotech as: diffusion at snf.stanford.edu To unsubscribe send a blank email to leave-nanotech-6754768W at spirit.sparklist.com From tberg at stanford.edu Fri Nov 17 06:55:43 2006 From: tberg at stanford.edu (Ted Berg) Date: Fri, 17 Nov 2006 06:55:43 -0800 Subject: Diffusion Morning Report 11/17/06 Message-ID: <455DCD6F.3020908@stanford.edu> Good Morning all, Looking ok this morning,. Epi burn box is in pieces in the basement-we are working on it. Eprom was changed on LTO- hopefully that will resolve the mfs alarms. Tylan burnbox cleaned this morning. Chips ordered for Possible Thermco Poly fix. Tylan2 has temp problems. AMAT process here yesterday moving slowly. TEL looking for a home. No other issues now Diffusion Date: 11/17/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 down temp issues Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 down Tylan 6-POCl3 down Tylan 7-TEOS2 Up 9.25/30 Tylan 8-SiGe Up 9.13/30 Tylan 9-Poly Up 15.19/30 Tylan 10-Nitride Up 19.75/30 Tylan 11-BPSG-LTO UP Eprom replaced 14.04/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly down Sih4 flow issues Thermco Nitride Up Epi down working on it Burn Box up ZYGO Up up GAAS 22 GAAS 23 UP SiH4 for furnaces up A on line 640 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Nov 20 06:34:23 2006 From: tberg at stanford.edu (Ted Berg) Date: Mon, 20 Nov 2006 06:34:23 -0800 Subject: Diffusion Morning Report 11/20/06 Message-ID: <4561BCEF.7060203@stanford.edu> Good Morning All, Looking OK this morning. Replaced bellows in Epi gate valve, working on Epi Burn box. Tylan 2 still has temp issues. Replaced a chip in CVD interface board on Thermco poly-will see if that was the bad one. Diffusion Date: 11/20/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 down temp issues Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 down n2 flow alarms Tylan 6-POCl3 down Possible leak issue Tylan 7-TEOS2 Up 9.25/30 Tylan 8-SiGe Up 9.13/30 Tylan 9-Poly Up 15.61/30 Tylan 10-Nitride Up 19.75/30 Tylan 11-BPSG-LTO UP 15.76/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly down Sih4 flow issues Thermco Nitride Up Epi down working on it Burn Box up ZYGO Up up GAAS 22 GAAS 23 UP SiH4 for furnaces up A on line 640 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Nov 21 06:29:13 2006 From: tberg at stanford.edu (Ted Berg) Date: Tue, 21 Nov 2006 06:29:13 -0800 Subject: diffusion morning report 11/21/06 Message-ID: <45630D39.10903@stanford.edu> Good Morning All, Looking OK this morning. Epi burn box is back together-we are watching it. Checking out epi leak rate. Tylan 5 has bad uniformity, Tylan 6 has possible leak. Ebeam cryos warm again-looking into it. Tylan 2 has possible temp issues. AMAT process ran wafers last week waiting results. TEL-still waiting for a home. TEOS2 has low pressure. No other issues now. Diffusion Date: 11/21/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 down temp issues Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 down uniformity issues Tylan 6-POCl3 down possible leak Tylan 7-TEOS2 down low pressure 9.25/30 Tylan 8-SiGe Up 9.13/30 Tylan 9-Poly Up 16.83/30 Tylan 10-Nitride Up 19.86/30 Tylan 11-BPSG-LTO UP 17.00/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Sih4 flow issues-resolved Thermco Nitride Up Epi down working on it Burn Box up ZYGO Up up GAAS 22 GAAS 23 UP SiH4 for furnaces up A on line 640 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Wed Nov 22 08:13:46 2006 From: rseymour at stanford.edu (Ray Seymour) Date: Wed, 22 Nov 2006 08:13:46 -0800 Subject: Diffusion Morning Report Message-ID: <4564773A.4080903@stanford.edu> Good Morning all, Ted is out today. Tylan 5 front zone not reaching temp, and tylan 6 has alarm issues. Teos low pressure problem taken care of with throttle valve clean. Epi tube installed. All else looking pretty good. Have a safe and happy holiday. Diffusion Date: 11/22/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up * * * * * * Tylan 2 Up * * * * * * Tylan 3 Up * * * * * * Tylan 4 Up * * * * * * Tylan 5-BBr3 down * Temp and N2 Carrier issues * * * * * Tylan 6-POCl3 down * * * * * * Tylan 7-TEOS2 Up * * *9.25/30* * * Tylan 8-SiGe Up * * *9.13/30* * * Tylan 9-Poly Up * * *16.97/30* * * Tylan 10-Nitride Up * * *19.86/30* * * Tylan 11-BPSG-LTO UP *Eprom replaced* *17/30* * * Tylan 12-FGA Up * * * * * * * * * * * * Thermco 1 Up * * * * * * Thermco 2 Up * * * * * * Thermco Poly down *Sih4 flow issues* * * * * Thermco Nitride Up * * * * * * Epi down *working on it* * * * * * * * * * * Burn Box up * * * * * * ZYGO Up * * * * * * up * * * * * * GAAS 22 * * * * * * GAAS 23 UP * * * * * * SiH4 for furnaces up * * * * * * *A on line 625 psi* * changeover working well * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From wbhnsx at adsl-70-137-232-139.dsl.chcgil.sbcglobal.net Thu Nov 23 10:19:41 2006 From: wbhnsx at adsl-70-137-232-139.dsl.chcgil.sbcglobal.net (wbhnsx at adsl-70-137-232-139.dsl.chcgil.sbcglobal.net) Date: Fri, 24 Nov 2006 02:19:41 +0800 Subject: =?GB2312?B?0NDV/rmk1/fV39aw0rXCt76z?= Message-ID: 9???????????????????????????????????????????????????????????????????????????????? ?? ?? ?? ?? ?? ?? ?? ?? ?? ?? ?? ?? ?? ?? ????cguykgi at sohu.com ???????????????????????????????????????????????????????????????????????????????? ?? ?? ?? ?? ?? ?? ?? ?? ?? ?? ?? ?? ?? 2 0 0 6 ?? 12??9-10?? ?????????????? 2 0 0 7 ?? 1??20-21?? ???????????? 2 0 0 7 ?? 1??27-28?? ???????????????? ???????????????????????????????????????????????????????????????????????????????? ?? ???????? ???????????????????????????????????????????????????????????????????????????? ?????????????????????????????????????????? ?? ???????? ????????????????????????500?????????????????????????????????????????????????? ???????????????????????????????????????????????????????????????????????????????? ???? ???????????????????????????????????????????????????????????????????????????????? ?? ???????? ?????????????????????????? ?? ???????????????????? ?? ???????????????? ?? ???????????????????? ?????????????????????? ?? ???????????? ?? ???????????????????? ?? ?????????????????? ?? ?????????????????????? ?????????????????????? ?? ?????????????????????? ?? ?????????? ?? ???????????? ?? ???????????????????? ?? ???????????????????? ?????????????????? ?? ?????????????? ?? ???????????????? ?? ???????????? ?? ???????????????? ???????????????????????? ?? ???????????? ?? ???????????????? ?? ?????????????????????? ?? ?????????????????? ?? ???????????????? ?? ?????????????????? ?? ?????????????????? ?? ?????????????? ?? ?????????????? ?? ???????????????? ?? ?????????????????? ?? ???????????????????? ???????????????????? ?? ?????????????? ?? ?????????????????? ?? ?????????????? ?????????????????? ?? ?????????????????? ?? ?????????????????? ???????????????? ?? ?????????????????? ?? ???????????????????????????? ???????????????????????????????????????????????????????????????????????????????? ?? ???????? ?????? ??????????????????????????????????????????2004????????????????????20 03??????????????50???????????????????????????????????????? ????????????????????????????????????????????????????:????????,?????????????????? 500??????????????15??, ??????????????????????????????????????IT???????????????? ???????????????????????? ???????????????????????????????????????????????????????????????????????????? ?????????????????????????? ?? ???????? ???????????????????????????????????? ???????????????????????????????????????????????????????????????????????????????? ?? ?? ?? ?? ?? 1. ?? ?? ?? ???? ???????? 2. ?? ???? 2500??/?? ?????????????????????????????????????? 3. ?? ???? 0755-2 8 5 8 0 9 1 6 ?? ????0 7 5 5-2 8 5 8 1 1 2 9 4. ?? ?? ?? ??: ????????-->????????-->??????????????-->???????? ???????????????????????????????????????????????????????????????????????????????? ?????????????????????? ?????????????? ?????????????????????? ????????????????????????0 7 5 5--2 8 5 8 1 1 2 9 ??????????????______________________________________________________ ????????_____________ ??????______________ ??????___________________ ????????:__________?? ??????_____________?? ????????_____________ ??????______________ ??????___________________ ????????_____________ ??????______________ ??????___________________ ????????_____________ ??????______________ ??????___________________ ????????_____________ ??????______________ ??????___________________ ???????????? 1?????? ?? 2?????? ?? 3?????? ???????? ??1?????? ?? 2?????? From pwcj at 70.44.73.216.res-cmts.brd2.ptd.net Fri Nov 24 00:00:02 2006 From: pwcj at 70.44.73.216.res-cmts.brd2.ptd.net (pwcj at 70.44.73.216.res-cmts.brd2.ptd.net) Date: Fri, 24 Nov 2006 16:00:02 +0800 Subject: =?GB2312?B?tbWwuLncwO25pNf3tcTX3L3h?= Message-ID: <2K3SERVERrcR4ZDgC8100003bc9@2k3server.pjsemmer.com> ------------------------------------------------------------- ?? ?? ?? ?? ?? ?? ?? ?? ?? ?? ?? ?? ?? ?? ????37.253.106.120 ------------------------------------------------------------- ?? ?? ?? ?? ?? ?? ?? ?? ?? ?? ?? ?? ?? ?? 2006??12??01-02?? ?? ?? ?? ?? ?? ?? ?? ?? 2007?? 1??12-13?? ?? ?? ------------------------------------------------------------- ????????: ?????? ?????????????????????????????????????????????????? ???????????????????????????????????????????????????????????? ???????????????????????????????????????????????????????????? ????????????????????????????????1600???????????????????????? ???????????????????????????????????????????????????????????? ???????????????????????????????????????????????????????????? ???????????????????????????????????????????????????????????? ???????????????????????????????????????????????????????????? ?????????? ?????????????????? ?????????????????????????????????????????????????? ?????????????????????????????????????????????????????????? ???????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????? ???????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????? ?????????? ------------------------------------------------------------- ?????????????? ?????????????????????????????? 1??????????,???????????????????????????????????????????????? 2?????????????????????????????? 3???????????????????????????? 4???????????????????????????????????????? ?????????????????????? 1?????????????????????????? 2???????????????????????????????????? 3?????????????????????????????? ???????????? 4?????????????????????????? ???????????????????????? 1?????????????? 2???????????? 3???????????????????????? 4?????????????? ?????????????????????????? 1???????????????????????? 2???????????????????????? 3???????????????????????????????????? 4???????????????????? ?????????????????????????????? 1?????????????????????????????????? 2?????????????????? 3?????????????????????????????????? ?????????????????????? 1???????????????????????????????????? 2???????????????????????????????? 3???????????????????????? 4???????????? ???????????????????? 1?????????????????? 2???????????? 3?????????????????????????????????????????????????????????????????? 4?? ?????????????????????????? ?????????????????????????????? 1?? ???????????????????????? 2?? ?????????????????????? 3?? ?????????????????????????? ?????????????????? 1?????????????????????? 2???????????????????????? 3???????????????????????? ------------------------------------------------------------- ?? ?? ?? ?? 1. ?? ?? ?? ???? ?? ?? ?? ?? ?? ?? 2. ?? ???? 2800??/??(????????????????????????????????) 3. ?? ???? 0755-2 8 5 8 0 9 1 6 ?? ????0 7 5 5-2 8 5 8 1 1 2 9 4. ?? ?? ?? ??: ????????-->????????-->??????????????-->???????? 5. ???????????????????? ------------------------------------------------------------- ?????????????????????? ?????????????? ?????????????????????? ????????????????????????0 7 5 5--2 8 5 8 1 1 2 9 ??????????????______________________________________________________ ????????_____________ ??????______________ ??????___________________ ????????:__________?? ??????_____________?? ????????_____________ ??????______________ ??????___________________ ????????_____________ ??????______________ ??????___________________ ????????_____________ ??????______________ ??????___________________ ????????_____________ ??????______________ ??????___________________ ???????????? 1?????? ?? 2?????? ???????? ??1?????? ?? 2?????? From fjn at wcp.welchcapital.com Fri Nov 24 01:11:09 2006 From: fjn at wcp.welchcapital.com (fjn at wcp.welchcapital.com) Date: Fri, 24 Nov 2006 17:11:09 +0800 Subject: =?GB2312?B?xOq2yNC918q199X71f6y38novMY=?= Message-ID: dliufang845 at sohu.com ?? ?? ?? ?? ?? ?? ?? ?? ?? ?? ?? ?? ?? ?? ????bshfa23 at sohu.com ------------------------------------------------------------------------ ????????????????????????????????????????(??????????????????) ?????????????????????????????????????????? ------------------------------------------------------------------------ ??????????????????2006??12??9-10?????????????????????? ??????????????????2006??12??16-17???????????????????????????? ------------------------------------------------------------------------ ?? ?????? ?? ?? ?? ?? ?? ?? ????2000??/???????????????????????????????????????????????? ???????????????????????????????????????????????? ??????????????????????????????????????????????????????????????/???????? ???????????????????????????? ????????????:0755--28 5809 16 ??????????????0755--28 5811 29 ------------------------------------------------------------------------ ????????????====??====??====?? ?????????????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ???????????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????? ???????????????????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????????????? ???????????????????????????????????????????????????????????? ???????????????????????????????????????????????????????????????????????????? ???????????????????????????????????????????????????????????????????????????? ------------------------------------------------------------------------ ????????????====??====??====?? 1??????????????????????????????????????????????????????????KPI?? 2???????????????????????????????????????????????????????????????? 3???????????????????????????????????????????????????????????????????????????????? 5?????????????????????? 6?????????????????????????????????????? 7???????????????????????????????????????????????????????????????????????????????????????? 8???????????????????????????????????????????????? ------------------------------------------------------------------------ ????????????====??====??====?? ?????????? ???????????????????? ???????????????????????????? 1?????????????????????? 2?????????????????????????????? 3???????????????????????? 4?????????????????????????????? 5???????????????????????????? 6???????????????????????? 7?????????????????????? 8?????????????? 9?????????????????? 10?????????????????????????????? 11?????????????????????????????????????? 12???????????????????????????? 13???????????????????????????????????????? ?????????????????????? 1???????????????????? 2?????????????????????????? 3???????????????? 4?????????????F???????????? ?????????????????????????????????? 1?????????????????????? 2?????????????????????? 3???????????????????????? 4?????????????????????????????? 5?????????????????????? 5?????????????????????? ?????????? ?????????????????? ???????????????????????? 1?????????????????????????? 2???????????????????? 3???????????????????? ?????????????????????????? 1.???????????????????????????????? 2.?????????????????????????????????????????????? 3???????????????????????? 4?????????????????????????????????????????????????????? 5???????????????????????? 6???????????????????????????????? ?????????????????????????? 1.???????????????????????????????? 2.???????????????????????????????????????????????????????? 3.???????????????????????? 4?????????????????????????????? 5???????????????? 6???????????????????????????? ------------------------------------------------------------------------ ????????????====??====??====?? ???????? ?????????????????????????????????????????????????????????????? ??????????????????????????????????????????????????????????????8?????? ??????????????5???????????????????????????????????????????????????????? ???????????????????????????????????????????????????????????????????? ???????????????????????????????????????????????? ?????????????????????????????????????????????????????????????? ???????????????????????????????????????????????????????????????????? ???????????????????????????????????????????????????????????????????? ???????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????? ------------------------------------------------------------------------ ???????????????????????????????????????? ???????? Fax????0755??28581129 ????????????______________________________________________??????????____________?? ???? ?? ????_____________________ ??????????________________??????????_______________ ????????????_____________________ ??????????________________??????????_________________?? ??????????_________________________________________________ ???????????? ????????????????????1?????? ?? 2?????? ???????? 1?????? 2?????? From nsyd at air-japan.jp Sat Nov 25 04:10:31 2006 From: nsyd at air-japan.jp (nsyd@ns.air-japan.jp) Date: Sat, 25 Nov 2006 20:10:31 +0800 Subject: =?GB2312?B?xvPStdL9vfjIy7LFxNGjrMH016HIy7LFuPzE0aO/?= Message-ID: <200611250851.kAP8pqQ31980@ns.air-japan.jp> --------------------------------------------------------------- ?? ?? ?? ?? ?? ?? ?? ?? ?? ?? ?? ?? ?? ?? ????aliufang916 at sohu.com --------------------------------------------------------------- ?? ?? ?? ?????? ?? ?? ?? ?? ?? ?? ?? ?? 2 0 0 6??1 2??1-3?? ???????????????? 2 0 0 6??1 2??22-24?? ?????????????? --------------------------------------------------------------- ?? ???????? ???????????????????????????????????????????????????????????? ???????????????????????????????????????????????????????????????? ???????????????????????????????????????????????????????????????? ?????????????????????????????????????????????? --------------------------------------------------------------- ?? ???????? ?????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????? ?????????????????????? ?????? ???????????????????????????????????????? -------?????????????????? ?????? ???????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????????? ???????????????????????? ?????? --------------------------------------------------------------- ?? ???????? ????????Jim Wu????????????????????MBA???????????????????? ??????????????????????????????????????IT???????????? ???????????????????????????????????????????????????????????? ???????????????????????????????????????????????????????????????? ???????????????????????????????????????????????????? 1996??-2002???????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????? 2002??7??-?????????????????????????????????????????????? ?????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????? ??????????????????????????????IBM?????????????????????????? ?????????????????????????????????????????????????????????????? ?????????????????????????????????????????????????????????????????? ???????????????????????????????????????????????????????????????? ???????????????????????????????????????????????????????????????? --------------------------------------------------------------- ?? ???????? ?????????????????????????? ?????????????????????????? ?? ?????????????????????????????????? 1???????????????????????? ?? ?????????????????????????????????? 2?????????????????????????????? ?? ?????????????????????????????????????????? ???????????? 1???????????????????? ?? ?????????????????????????????????? 2???????????????????? ?? ???????????????????????????? ?? ?????????????????????????????????????????? 3???????????????????? ?? ?????????????????????????????????????? ???????????? 1?????????? ?? ?????????????????????? ?? ?????????????????? 2?????????????????????????????? ?? ?????????????????????????? ?? ?????????????????????????????????????? ?? ?????????????????????????????? ?? ???????????????????? 3?????????????????????????? ?? ?????????????????????????????????????? ?? ?????????????????????????????????? ?? ???????????????????????? ?????????????????????????? ?? ???????????????????????????????????????? ?? ??????Y???????????????????????????????????? ?? ?????????????????????????????????????????????? ???????????????????? 1?????????????????????? ?? ?????????????????????????????????? 2?????????????????????? 3???????????????????? ?? ??????????A?????????????????????????????????? ?????????????????????? 1?? ?????????????????? ?? ???????????????????????????????????????? 2???????????????????? ?? ?????????????????????????????????????? ?? ?????????????????? ?? ?????????????????????????????????????? ?? ?????????????????????? ?? ?????????????????????? 3?? ?????????????????????? ?? ???????????????????????????????????????? 4??????/?????????????????????? ?? ???????????????????????????????????? ?? ???????????????????????????????????????????????? ???????????? 1?????????????????????? 2???????????????????? 3???????????????????????????? ?? ??????????????????IT???????? ?????????????????????????? 1?????????????? 2?????????????????? ?? ???????????????????????????????????????????????? 3?????????????? 4???????????????????????????? ?????????????????????????? ???????????? 1???????????????????????????????????? ?? ?????????????????????????????? 2???????????????????????????????? ?? ???????????????????????????????????? 3???????????????????????????????? ????3P???????? 1???????????????????????????????????? ?? ???????????????????????????? 2???????????????????? ?? ?????????????????????????? ?????????????????????? 1???????????????????????????? ?? ???????????????????????????? 2???????????????????? ?? ???????????????????????????????????????????????????????? ?????????????????????? 1?????????????????????????? ?? ??????H?????????????????????? 2?????????????????????????? ?? ??????A???????????????????????????????? ???????????????????? 1???????????????????????????????? ?? ????????B???????????????????????????? 2???????????????????????? ?? ????????C?????????????????????????????? 3???????????????????? 4???????????????????? 5???????????????????? --------------------------------------------------------------- ?? ?? ?? ?? ?? 1. ?? ?? ?? ???? ???????? 2. ?? ???? 3800??/??(????????????????????????????????) 3. ?? ???? 0755-2 8 5 8 0 9 1 6 ?? ????0 7 5 5-2 8 5 8 1 1 2 9 4. ?? ?? ?? ??: ????????-->????????-->??????????????-->???????? --------------------------------------------------------------- ?????????????????????? ?????????????? ?????????????????????? ????????????????????????0 7 5 5--2 8 5 8 1 1 2 9 ??????????????______________________________________________________ ????????_____________ ??????______________ ??????___________________ ????????:__________?? ??????_____________?? ????????_____________ ??????______________ ??????___________________ ????????_____________ ??????______________ ??????___________________ ????????_____________ ??????______________ ??????___________________ ????????_____________ ??????______________ ??????___________________ ???????????? 1?????? ?? 2?????? ???????? ??1?????? ?? 2?????? From tberg at stanford.edu Mon Nov 27 06:44:20 2006 From: tberg at stanford.edu (Ted Berg) Date: Mon, 27 Nov 2006 06:44:20 -0800 Subject: Diffusion Morning report 11/27/06 Message-ID: <456AF9C4.1080808@stanford.edu> Good Morning All, Looking Ok this morning. Tylans 5 and 6 still down-looking into problems. Epi has a new chamber , waiting fial assembly and leak check. AMAT epi qual is moving ahead slowly looks like intrinsics are OK- moving on to doping. TEL location drawings are completed will send to Japanese for approval.. No other issues at this time. Diffusion Date: 11/27/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 down uniformity issues Tylan 6-POCl3 down possible leak Tylan 7-TEOS2 Up 9.25/30 Tylan 8-SiGe Up 9.13/30 Tylan 9-Poly Up 17.22/30 Tylan 10-Nitride Up 21.95/30 Tylan 11-BPSG-LTO UP 21.46/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Up Epi down working on it Burn Box up ZYGO Up up GAAS 22 GAAS 23 UP SiH4 for furnaces up A on line 600 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Nov 28 06:49:57 2006 From: tberg at stanford.edu (Ted Berg) Date: Tue, 28 Nov 2006 06:49:57 -0800 Subject: Diffusion Morning Report 11/28/06 Message-ID: <456C4C95.5020909@stanford.edu> Good Morning All, Looking OK this morning. Tylan5 replacing tube and injector. Tylan 6 looking into possible leak. Epi is reassembled still has a high base-checking it out. AMAT will be here today to continue process quals. TEL-drawings sent to Japanese. No other problems at this time. Diffusion Date: 11/28/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 down uniformity issues-pull and clean Tylan 6-POCl3 down possible leak Tylan 7-TEOS2 Up 9.25/30 Tylan 8-SiGe Up 9.13/30 Tylan 9-Poly Up 17.63/30 Tylan 10-Nitride Up 21.95/30 Tylan 11-BPSG-LTO UP 22.18/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Up Epi down working on it Burn Box up ZYGO Up up GAAS 22 GAAS 23 UP SiH4 for furnaces up A on line 600 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Nov 29 06:31:59 2006 From: tberg at stanford.edu (Ted Berg) Date: Wed, 29 Nov 2006 06:31:59 -0800 Subject: Diffusion Morning Report 11/29/06 Message-ID: <456D99DF.8070402@stanford.edu> Good Morning All, Looking ok this morning> Tylan 5 is back up after tube and injector change. Still looking for leak in Tylan 6. Bellows for Epi is on order- hopefully this will resolve leak issue. AMAT process was here yesterday and ran 1 set of doped runs-moving slowly. TEL drawings sent to Japan working on preliminary quotes. No other issues at this time. Diffusion Date: 11/29/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 down possible leak Tylan 7-TEOS2 Up 9.25/30 Tylan 8-SiGe Up 9.13/30 Tylan 9-Poly Up 17.63/30 Tylan 10-Nitride Up 22.75/30 Tylan 11-BPSG-LTO UP 22.47/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Up Epi down Waiting for bellows assy Burn Box up ZYGO Up up GAAS 22 GAAS 23 UP SiH4 for furnaces up A on line 570 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Nov 30 06:48:42 2006 From: tberg at stanford.edu (Ted Berg) Date: Thu, 30 Nov 2006 06:48:42 -0800 Subject: Diffusion Morning Report 11/30/06 Message-ID: <456EEF4A.5050109@stanford.edu> Good Morning All, Looking OK this morning. Tylan 6 Still looking into leak issue. Epi waiting bellows Assy. AMAT process qual in Progress. TEL waiting for initial quotes and Japan Approval. No other issues at this time. Diffusion Date: 11/30/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 down possible leak Tylan 7-TEOS2 Up 9.25/30 Tylan 8-SiGe Up 9.13/30 Tylan 9-Poly Up 17.73/30 Tylan 10-Nitride Up 23.76/30 Tylan 11-BPSG-LTO UP 22.62/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Up Epi down Waiting for bellows assy Burn Box up ZYGO Up up GAAS 22 GAAS 23 UP SiH4 for furnaces up A on line 560 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Thu Nov 30 15:59:55 2006 From: nanotech at nsti.org (Nano World News) Date: Thu, 30 Nov 2006 15:59:55 -0800 Subject: Nano World News November 2006 Special Edition Message-ID: ******************************************************* *Note: If you are having trouble viewing this message,* *copy and paste the link below into your browser * *address field and hit the Enter button on your * *keyboard. * http://www.nsti.org/news/ *If you would like to unsubscribe, copy the URL below:* http://www.nsti.org/outreach/unsubscribe.html ******************************************************* --- You are currently subscribed to nanotech as: diffusion at snf.stanford.edu To unsubscribe send a blank email to leave-nanotech-6754768W at spirit.sparklist.com -------------- next part -------------- An HTML attachment was scrubbed... URL: