From tberg at stanford.edu Mon Oct 2 06:57:14 2006 From: tberg at stanford.edu (Ted Berg) Date: Mon, 02 Oct 2006 06:57:14 -0700 Subject: Diffusion Morning Report 10/02/06 Message-ID: <45211ABA.1040004@stanford.edu> Good Morning All, Well I am back and trying to catch up. Not looking terrific this morning. Epi is down for high base pressure. Poly is down for pull and clean. Nitride has a broken drive cable. Otherwise things are OK. Diffusion Mike,Ray, Ted Date: 10/2/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 8.41/30 Tylan 8-SiGe Up 6.72/30 Tylan 9-Poly Down pull and clean 0/30 Tylan 10-Nitride Down broken drive cable 3.65/30 Tylan 11-BPSG-LTO Up 21.08/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Up Epi Down high base pressure Burn Box up ZYGO Up up GAAS 22 GAAS 23 UP SiH4 for furnaces up B on line 370 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Oct 3 06:46:49 2006 From: tberg at stanford.edu (Ted Berg) Date: Tue, 03 Oct 2006 06:46:49 -0700 Subject: Diffusion Morning Report 10/03/06 Message-ID: <452269C9.1060500@stanford.edu> Good Morning All, Looking fair this morning. Poly is back up after pull and clean. Nitride drive cable replaced. Epi still has high base pressure -checking it out. AMAT Epi waiting for lamp driver module. Everything else looks OK for now. Diffusion Mike,Ray, Ted Date: 10/3/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 8.41/30 Tylan 8-SiGe Up 6.72/30 Tylan 9-Poly Up pull and clean completed 0/30 Tylan 10-Nitride Up broken drive cable replaced 3.65/30 Tylan 11-BPSG-LTO Up 21.38/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Up Epi Down high base pressure Burn Box up ZYGO Up up GAAS 22 GAAS 23 UP SiH4 for furnaces up B on line 340 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Oct 4 06:30:01 2006 From: tberg at stanford.edu (Ted Berg) Date: Wed, 04 Oct 2006 06:30:01 -0700 Subject: Diffusion Morning Report 10/04/06 Message-ID: <4523B759.8040603@stanford.edu> Good Morning All, Looking OK this morning. Tylan 1 and 3 had poor uniformity on monthly quals-checking them out. Epi still has high base-continuing checkout. Thermco Poly has puming issue. Everything else looks OK for now. > Diffusion Mike,Ray, Ted > Date: 10/4/06 THICKNESS-Change at > Tube Name/Number Status Comments > Tylan 1 Up > Tylan 2 Up > Tylan 3 Up > Tylan 4 Up > Tylan 5-BBr3 Up > Tylan 6-POCl3 Up > Tylan 7-TEOS2 Up 8.41/30 > Tylan 8-SiGe Up 6.72/30 > Tylan 9-Poly Up .1/30 > Tylan 10-Nitride Up 3.65/30 > Tylan 11-BPSG-LTO Up 25.92/30 > Tylan 12-FGA Up > > Thermco 1 Up > Thermco 2 Up > Thermco Poly Up > Thermco Nitride Up > Epi Down high base pressure > > > > > > Burn Box up > ZYGO Up > up > GAAS 22 > GAAS 23 UP > SiH4 for furnaces up > > B on line 320 psi changeover working well > -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Oct 5 06:20:34 2006 From: tberg at stanford.edu (Ted Berg) Date: Thu, 05 Oct 2006 06:20:34 -0700 Subject: Diffusion Morning Report 10/05/06 Message-ID: <452506A2.30205@stanford.edu> Good Morning All, Looking OK this morning. We(Mike) are pulling the Epi chamber today after much testing to hopefully solve base pressure issue. Injectors were changed on furnaces tylan1 and 3 yesterday. TC sheath changed on Thermco poly yesterday. Everything else looks ok for now. no progress on AMAT Epi. > Diffusion Mike,Ray, Ted > Date: 10/5/06 THICKNESS-Change at > Tube Name/Number Status Comments > Tylan 1 Up > Tylan 2 Up > Tylan 3 Up > Tylan 4 Up > Tylan 5-BBr3 Up > Tylan 6-POCl3 Up > Tylan 7-TEOS2 Up 8.41/30 > Tylan 8-SiGe Up 6.72/30 > Tylan 9-Poly Up .35/30 > Tylan 10-Nitride Up 5.45/30 > Tylan 11-BPSG-LTO Up 25.92/30 > Tylan 12-FGA Up > > Thermco 1 Up > Thermco 2 Up > Thermco Poly Up > Thermco Nitride Up > Epi Down high base pressure > > > > > > Burn Box up > ZYGO Up > up > GAAS 22 > GAAS 23 UP > SiH4 for furnaces up > > B on line 320 psi changeover working well > -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Oct 6 06:29:37 2006 From: tberg at stanford.edu (Ted Berg) Date: Fri, 06 Oct 2006 06:29:37 -0700 Subject: Diffusion Morning Report 10/06/06 Message-ID: <45265A41.9060409@stanford.edu> Good Morning All, Looking OK this morning. Epi continues to be a problem, Chamber changedyesterday-still investigating. AMAT epi not moving. No other problems at this time. Diffusion Mike,Ray, Ted Date: 10/6/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 8.41/30 Tylan 8-SiGe Up 6.72/30 Tylan 9-Poly Up .61/30 Tylan 10-Nitride Up 6.72/30 Tylan 11-BPSG-LTO Up 26.22/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Up Epi Down high base pressure Burn Box up ZYGO Up up GAAS 22 GAAS 23 UP SiH4 for furnaces up B on line 300 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Oct 9 06:48:55 2006 From: tberg at stanford.edu (Ted Berg) Date: Mon, 09 Oct 2006 06:48:55 -0700 Subject: Diffusion Morning Report 10/09/06 Message-ID: <452A5347.2050605@stanford.edu> Good Morning All, Looking good this morning. All CVDs and Epi down for acid waste tank repair until tomorrow morning. we are taking advantage of this to do pull and clean on LTO since it is at 29+ microns. No Other problems at this time. Diffusion Mike,Ray, Ted Date: 10/9/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 8.41/30 Tylan 8-SiGe Up 6.72/30 Tylan 9-Poly Up .61/30 Tylan 10-Nitride Up 8.52/30 Tylan 11-BPSG-LTO Down pull and clean 0/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Up Epi Down high base pressure Burn Box up ZYGO Up up GAAS 22 GAAS 23 UP SiH4 for furnaces up B on line 260 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Oct 10 06:14:10 2006 From: tberg at stanford.edu (Ted Berg) Date: Tue, 10 Oct 2006 06:14:10 -0700 Subject: Diffusion Morning Report 10/10/06 Message-ID: <452B9CA2.7000400@stanford.edu> Good Morning All, Looking OK this morning. All LPs still down until tank fix is completed. LTO tube change in progress. Epi still has slightly high base- still looking into it. Burn box minora changed yesterday. No other problems at this time. Diffusion Mike,Ray, Ted Date: 10/10/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 8.41/30 Tylan 8-SiGe Up 6.72/30 Tylan 9-Poly Up .61/30 Tylan 10-Nitride Up 8.52/30 Tylan 11-BPSG-LTO Down pull and clean 0/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Up Epi Down high base pressure Burn Box up ZYGO Up up GAAS 22 GAAS 23 UP SiH4 for furnaces up B on line 260 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Tue Oct 10 15:49:56 2006 From: nanotech at nsti.org (Nanotech 2007) Date: Tue, 10 Oct 2006 15:49:56 -0700 Subject: Call for Papers - 10th Annual NSTI Nanotech Conference Message-ID: Dear Colleague, Please accept our invitation to submit a paper for the 10th annual NSTI Nanotech 2007 and BioNano 2007. These world premier nanotechnology conferences and trade show take place May 20-24, 2007 at the Santa Clara Convention Center, Santa Clara, California. ***Visit http://www.nsti.org/Nanotech2007 for submission details*** The largest and most comprehensive nanotechnology event in the world, Nanotech 2007 will host over 4,000 attendees, 400 exhibitors, 900 research & business presentations, and over 200 Nanotech Early Stage Venture presentations. This year?s program is scheduled with special industry focused symposia including: Health Care, Biotechnology, Materials, Surface Sciences, Transportation, Personal Care, Energy, Food, Environmental, Electronics, Telecommunications, Computational, Displays & Optics, Design & Modeling, Polymers, and Coatings sectors. With over 30 Conference and Symposia included in this years program, the NSTI Nanotech community encourages you to submit your abstract by November 17th, 2006. ------------------------------------------------------------------------ Conference groupings roughly include: - Nanoscale Electronics & Microsystems (MEMS) - Nanotech in Life Science & Medicine - Nanoscale Materials & Technologies - Business, Partnering, Policy For more information and information on participating and sponsoring organizations, please visit: http://www.nsti.org/Nanotech2007 or to view last year?s program visit: http://www.nsti.org/Nanotech2006 Regards, Nano Science and Technology Institute Cambridge Massachusetts http://www.nsti.org --- You are currently subscribed to nanotech as: diffusion at snf.stanford.edu To unsubscribe send a blank email to leave-nanotech-6754768W at spirit.sparklist.com From tberg at stanford.edu Wed Oct 11 06:38:02 2006 From: tberg at stanford.edu (Ted Berg) Date: Wed, 11 Oct 2006 06:38:02 -0700 Subject: Diffusion Morning Report 10/11/06 Message-ID: <452CF3BA.4000702@stanford.edu> Good Morning All, Looking good this morning. LTO is back up after pull and clean Epis leak has been addressed but burn box did not come up after water work- investigating. Ebeam screws manufactured and replaced. Tylan 3 is back up after injector change. No other problems at this time, Diffusion Mike,Ray, Ted Date: 10/11/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 8.41/30 Tylan 8-SiGe Up 6.72/30 Tylan 9-Poly Up 3.23/30 Tylan 10-Nitride Up 8.62/30 Tylan 11-BPSG-LTO up pull and clean completed .2/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Up Epi Down burn box Burn Box up ZYGO Up up GAAS 22 GAAS 23 UP SiH4 for furnaces up B on line 260 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Oct 12 06:32:00 2006 From: tberg at stanford.edu (Ted Berg) Date: Thu, 12 Oct 2006 06:32:00 -0700 Subject: Diffusion Morning Report 10/12/06 Message-ID: <452E43D0.5000203@stanford.edu> Good Morning all, Looking good this morning. Epi burnbox being rebuilt. AMAT epi waiting for lamp driver module-should be here Monday. No other problems at this time. Diffusion Mike,Ray, Ted Date: 10/112/2006 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 8.41/30 Tylan 8-SiGe Up 6.72/30 Tylan 9-Poly Up 3.23/30 Tylan 10-Nitride Up 8.71/30 Tylan 11-BPSG-LTO up 4.55/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Up Epi Down burn box issues Burn Box up ZYGO Up up GAAS 22 GAAS 23 UP SiH4 for furnaces up B on line 230 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Thu Oct 12 10:26:32 2006 From: nanotech at nsti.org (Nano World News) Date: Thu, 12 Oct 2006 10:26:32 -0700 Subject: Nano World News October 2006 Message-ID: ******************************************************* *Note: If you are having trouble viewing this message,* *copy and paste the link below into your browser * *address field and hit the Enter button on your * *keyboard. * http://www.nsti.org/news/ *If you would like to unsubscribe, copy the URL below:* http://www.nsti.org/outreach/unsubscribe.html ******************************************************* --- You are currently subscribed to nanotech as: diffusion at snf.stanford.edu To unsubscribe send a blank email to leave-nanotech-6754768W at spirit.sparklist.com -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Oct 16 08:27:17 2006 From: tberg at stanford.edu (Ted Berg) Date: Mon, 16 Oct 2006 08:27:17 -0700 Subject: Diffusion Morning Report 10/16/06 Message-ID: <4533A4D5.70305@stanford.edu> Good Morning All, Looking good this morning. Epi is in yellow and running. LTO had broken injectors and sheath-replaced and heating up. No other problems at this time. Amat epi is moving ahead again. Diffusion Mike,Ray, Ted Date: 10/16/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 8.41/30 Tylan 8-SiGe Up 6.72/30 Tylan 9-Poly Up 3.23/30 Tylan 10-Nitride Up 9.77/30 Tylan 11-BPSG-LTO down Broken injectors and sheath 1.8/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Up Epi yellow observing/using Burn Box up ZYGO Up up GAAS 22 GAAS 23 UP SiH4 for furnaces up B on line 200 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Oct 17 08:13:10 2006 From: tberg at stanford.edu (Ted Berg) Date: Tue, 17 Oct 2006 08:13:10 -0700 Subject: Morning Report 10/17/06 Message-ID: <4534F306.8060508@stanford.edu> Good Morning All, Looking good this morning. LTO is pumping down after broken quartz change. Epi HCl changed . AMAT epi temp cal completed working on wafer transfer. No other problems at this time. Diffusion Mike,Ray, Ted Date: 10/17/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 8.41/30 Tylan 8-SiGe Up 6.72/30 Tylan 9-Poly Up 6.88/30 Tylan 10-Nitride Up 9.77/30 Tylan 11-BPSG-LTO down Broken injectors and sheath 1.8/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Up Epi Up changed HCl Burn Box up ZYGO Up up GAAS 22 GAAS 23 UP SiH4 for furnaces up B on line 200 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Tue Oct 17 16:08:30 2006 From: nanotech at nsti.org (SEMI) Date: Tue, 17 Oct 2006 16:08:30 -0700 Subject: SEMI NanoForum 2006 Message-ID: An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Oct 18 06:30:37 2006 From: tberg at stanford.edu (Ted Berg) Date: Wed, 18 Oct 2006 06:30:37 -0700 Subject: Diffusion Morning report 10/18/06 Message-ID: <45362C7D.2010802@stanford.edu> Good Morning All, Looking OK this morning. Epi is still being a pain-we are looking into it. LTO is back up after quartz replacement. Low O2 MFC was changed on tube2 AMAT Epi is cycling wafers. We may turn gases on today. No other issues at this time. Diffusion Mike,Ray, Ted Date: 10/18/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 8.41/30 Tylan 8-SiGe Up 6.72/30 Tylan 9-Poly Up 8.88/30 Tylan 10-Nitride Up 10.1/30 Tylan 11-BPSG-LTO up .22/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Up Epi down leak bad base Burn Box up ZYGO Up up GAAS 22 GAAS 23 UP SiH4 for furnaces up B on line 200 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Oct 19 07:18:55 2006 From: tberg at stanford.edu (Ted Berg) Date: Thu, 19 Oct 2006 07:18:55 -0700 Subject: Diffusion Morning Report 10/19/06 Message-ID: <4537894F.8020601@stanford.edu> Good Morning All, Looking OK this morning. Still addressing the Epi leak/base pressure issue. No other major issues at this time. AMAT epi had a couple of small snags yesterday Handling went OK until we lost air and that killed the machine. Working on pumping down gas lines. Diffusion Mike,Ray, Ted Date: 10/19/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 8.41/30 Tylan 8-SiGe Up 6.72/30 Tylan 9-Poly Up 8.88/30 Tylan 10-Nitride Up 11.25/30 Tylan 11-BPSG-LTO up 1.18/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Up Epi down leak bad base Burn Box up ZYGO Up up GAAS 22 GAAS 23 UP SiH4 for furnaces up on line 180 psi changeover working weBll -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Oct 20 07:45:42 2006 From: tberg at stanford.edu (Ted Berg) Date: Fri, 20 Oct 2006 07:45:42 -0700 Subject: Diffusion Morning Report 10/@)/06 Message-ID: <4538E116.1050801@stanford.edu> Good Morning All, Looking Good this morning. Epi tube change yesterday. Waiting results. AMAT Epi some gases on Beginning BKM. Burn box cleaned this morning. No other issues now. Diffusion Mike,Ray, Ted Date: 10/20/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 8.79/30 Tylan 8-SiGe Up 6.75/30 Tylan 9-Poly Up 9.11/30 Tylan 10-Nitride Up 11.25/30 Tylan 11-BPSG-LTO up 3.7/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Up Epi down leak bad base Burn Box up Cleaning this morning ZYGO Up up GAAS 22 GAAS 23 UP SiH4 for furnaces up B on line 180 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Oct 24 06:56:55 2006 From: tberg at stanford.edu (Ted Berg) Date: Tue, 24 Oct 2006 06:56:55 -0700 Subject: Diffusion Morning Report 10/24/06 Message-ID: <453E1BA7.9010509@stanford.edu> Good Morning All, Looking OK this morning. Epi is down for burn box issues-looking into it. AMAT Epi completed tier 1-waiting AMAT process help. No other isisues at this time. Diffusion Mike,Ray, Ted Date: 10/24/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 8.79/30 Tylan 8-SiGe Up 6.75/30 Tylan 9-Poly Up 11.85/30 Tylan 10-Nitride Up 13.05/30 Tylan 11-BPSG-LTO up 2.81/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Up Epi down burn box Burn Box up ZYGO Up up GAAS 22 GAAS 23 UP SiH4 for furnaces up B on line 180 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Oct 25 08:29:11 2006 From: tberg at stanford.edu (Ted Berg) Date: Wed, 25 Oct 2006 08:29:11 -0700 Subject: Diffusion Morning Report 10/25/06 Message-ID: <453F82C7.3030901@stanford.edu> Good Morning All, Looking OK this morning. Removed wafer from suceptor on Epi. AMAT tier 1 is completed waiting for AMAT process eng. No other issues at this time. Diffusion Mike,Ray, Ted Date: 10/25/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 8.79/30 Tylan 8-SiGe Up 6.75/30 Tylan 9-Poly Up 11.93/30 Tylan 10-Nitride Up 13.05/30 Tylan 11-BPSG-LTO up 2.93/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Up Epi yellow removed wafer from chamber Burn Box up ZYGO Up up GAAS 22 GAAS 23 UP SiH4 for furnaces up B on line 120 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Wed Oct 25 10:49:55 2006 From: nanotech at nsti.org (Nanotech 2007) Date: Wed, 25 Oct 2006 10:49:55 -0700 Subject: Call for Papers - 10th Annual NSTI Nanotech Conference Message-ID: Dear Colleague, Please accept our invitation to submit a paper for the 10th annual NSTI Nanotech 2007 and BioNano 2007. These world premier nanotechnology conferences and trade show take place May 20-24, 2007 at the Santa Clara Convention Center, Santa Clara, California. Visit http://www.nsti.org/Nanotech2007 for submission details The largest and most comprehensive nanotechnology event in the world, Nanotech 2007 will host over 4,000 attendees, 400 exhibitors, 900 research & business presentations, and over 200 Nanotech Early Stage Venture presentations. This year?s program is scheduled with special industry focused symposia including: Health Care, Biotechnology, Materials, Surface Sciences, Transportation, Personal Care, Energy, Food, Environmental, Electronics, Telecommunications, Computational, Displays & Optics, Design & Modeling, Polymers, and Coatings sectors. With over 30 Conference and Symposia included in this years program, the NSTI Nanotech community encourages you to submit your abstract by November 17th, 2006. ------------------------------------------------------------------------ Conference groupings roughly include: - Nanoscale Electronics & Microsystems (MEMS) - Nanotech in Life Science & Medicine - Nanoscale Materials & Technologies - Business, Partnering, Policy For more information and information on participating and sponsoring organizations, please visit: http://www.nsti.org/Nanotech2007 or to view last year?s program visit: http://www.nsti.org/Nanotech2006 Regards, Nano Science and Technology Institute Cambridge Massachusetts http://www.nsti.org --- You are currently subscribed to nanotech as: diffusion at snf.stanford.edu To unsubscribe send a blank email to leave-nanotech-6754768W at spirit.sparklist.com -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Oct 26 07:00:42 2006 From: tberg at stanford.edu (Ted Berg) Date: Thu, 26 Oct 2006 07:00:42 -0700 Subject: Diffusion Morning Report 10/26/06 Message-ID: <4540BF8A.4060001@stanford.edu> Good Morning All, Looking pretty good this morning. Epi had some loading issues-looking into it. Tylan 3 has Temperature issues. AMAT Epi waiting for process qual. No other issues at this time. Diffusion Mike,Ray, Ted Date: 10/26/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 down temp issues Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 8.79/30 Tylan 8-SiGe Up 6.75/30 Tylan 9-Poly Up 12.1/30 Tylan 10-Nitride Up 13.05/30 Tylan 11-BPSG-LTO up 2.93/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Up Epi yellow Burn Box up ZYGO Up up GAAS 22 GAAS 23 UP SiH4 for furnaces up B on line 90 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Oct 27 06:31:28 2006 From: tberg at stanford.edu (Ted Berg) Date: Fri, 27 Oct 2006 06:31:28 -0700 Subject: Diffusion Morning Report 10/27/06 Message-ID: <45420A30.9050404@stanford.edu> Good Morning All, Looking OK this morning. LTO is down for broken quartz. Tylan 3 has temp issues doing temp cals. Epi has posssible handling issues. Waiting for AMAT process for new epi. No other issues at this time. Diffusion Mike,Ray, Ted Date: 10/27/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 down temp issues Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 8.79/30 Tylan 8-SiGe Up 6.75/30 Tylan 9-Poly Up 12.51/30 Tylan 10-Nitride Up 13.33/30 Tylan 11-BPSG-LTO down broken sheath and injectors 2.93/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Up Epi yellow possible handling issues Burn Box up ZYGO Up up GAAS 22 GAAS 23 UP SiH4 for furnaces up B on line 60 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Oct 30 06:44:24 2006 From: tberg at stanford.edu (Ted Berg) Date: Mon, 30 Oct 2006 06:44:24 -0800 Subject: Diffusion Morning Report 10/30/06 Message-ID: <45460FC8.9010501@stanford.edu> Good Morning All, Looking Ok this morning. Epi has wafers inside-will remove. Tylan 2 had low dep-checking it out. Tylan 3 doing temp cal. Waiting for process on AMAT Epi. Ebeam pump is dead will replace today. No Other problems at this time. Diffusion Mike,Ray, Ted Date: 10/30/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 yellow Low dep Tylan 3 down temp issues Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 8.79/30 Tylan 8-SiGe Up 7.44/30 Tylan 9-Poly Up 12.81/30 Tylan 10-Nitride Up 13.33/30 Tylan 11-BPSG-LTO yellow testing after quartz change 2.93/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Up Epi yellow possible handling issues Burn Box up ZYGO Up up GAAS 22 GAAS 23 UP SiH4 for furnaces up A on line 675 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Oct 31 06:26:49 2006 From: tberg at stanford.edu (Ted Berg) Date: Tue, 31 Oct 2006 06:26:49 -0800 Subject: Diffusion Morning Report11/01/06 Message-ID: <45475D29.7070108@stanford.edu> Good Morning All, Looking OK this morning. Pump for Ebeam replaced yesterday. Epi has dep issuesTylan 3 still has temp control issues.Waiting for AMAT process for new tool. No other problems now. Diffusion Mike,Ray, Ted Date: 11/1/06 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 yellow Low dep Tylan 3 down temp issues Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 8.79/30 Tylan 8-SiGe Up 7.51/30 Tylan 9-Poly Up 13.021/30 Tylan 10-Nitride Up 13.38/30 Tylan 11-BPSG-LTO up 3.25/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Up Epi yellow possible handling issues Burn Box up ZYGO Up up GAAS 22 GAAS 23 UP SiH4 for furnaces up A on line 675 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: