Diffusion Morning Report 10/04/06

Ted Berg tberg at stanford.edu
Wed Oct 4 06:30:01 PDT 2006


Good Morning All,
    Looking OK this morning. Tylan 1 and 3 had poor uniformity on 
monthly quals-checking them out. Epi still has high base-continuing 
checkout.
Thermco Poly has puming issue. Everything else looks OK for now.

> Diffusion Mike,Ray, Ted 	  	  	  	  	 
>   	Date: 	10/4/06 	THICKNESS-Change at 	  	 
> Tube Name/Number 	Status 	Comments 	  	  	 
> Tylan 1 	Up 	  	  	  	 
> Tylan 2 	Up 	  	  	  	 
> Tylan 3 	Up 	  	  	  	 
> Tylan 4 	Up 	  	  	  	 
> Tylan 5-BBr3 	Up 	  	  	  	 
> Tylan 6-POCl3 	Up 	  	  	  	 
> Tylan 7-TEOS2 	Up 	  	8.41/30 	  	 
> Tylan 8-SiGe 	Up 	  	6.72/30 	  	 
> Tylan 9-Poly 	Up 	  	.1/30 	  	 
> Tylan 10-Nitride 	Up 	  	3.65/30 	  	 
> Tylan 11-BPSG-LTO 	Up 	  	25.92/30 	  	 
> Tylan 12-FGA 	Up 	  	  	  	 
>   	  	  	  	  	 
> Thermco 1 	Up 	  	  	  	 
> Thermco 2 	Up 	  	  	  	 
> Thermco Poly 	Up 	  	  	  	 
> Thermco Nitride 	Up 	  	  	  	 
> Epi 	Down 	high base pressure 	  	  	 
>   	
> 	
> 	
> 	
> 	
> Burn Box 	up 	  	  	  	 
> ZYGO 	Up 	  	  	  	 
>   	up 	  	   	  	 
> GAAS 22 	  	  	  	  	 
> GAAS 23 	UP 	  	  	  	 
> SiH4 for furnaces 	up 	  	  	  	 
>
> 	  	B on line 320 psi 	 changeover working well  	  	 
>

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