Diffusion Morning Report 10/19/06

Ted Berg tberg at stanford.edu
Thu Oct 19 07:18:55 PDT 2006


Good Morning All,
    Looking OK this morning.  Still addressing the Epi leak/base 
pressure issue.  No other major issues at this time. AMAT epi had a 
couple of small
snags yesterday Handling went OK until we lost air and that killed the 
machine. Working on pumping down gas lines.

Diffusion Mike,Ray, Ted 	  	  	  	  	 
  	Date: 	10/19/06 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	Comments 	  	  	 
Tylan 1 	Up 	  	  	  	 
Tylan 2 	Up 	  	  	  	 
Tylan 3 	Up 	  	  	  	 
Tylan 4 	Up 	  	  	  	 
Tylan 5-BBr3 	Up 	  	  	  	 
Tylan 6-POCl3 	Up 	  	  	  	 
Tylan 7-TEOS2 	Up 	  	8.41/30 	  	 
Tylan 8-SiGe 	Up 	  	6.72/30 	  	 
Tylan 9-Poly 	Up 	  	8.88/30 	  	 
Tylan 10-Nitride 	Up 	  	11.25/30 	  	 
Tylan 11-BPSG-LTO 	up 	  	1.18/30 	  	 
Tylan 12-FGA 	Up 	  	  	  	 
  	  	  	  	  	 
Thermco 1 	Up 	  	  	  	 
Thermco 2 	Up 	  	  	  	 
Thermco Poly 	Up 	  	  	  	 
Thermco Nitride 	Up 	  	  	  	 
Epi 	down 	leak bad base 	  	  	 
  	
	
	
	
	
Burn Box 	up 	  	  	  	 
ZYGO 	Up 	  	  	  	 
  	up 	  	   	  	 
GAAS 22 	  	  	  	  	 
GAAS 23 	UP 	  	  	  	 
SiH4 for furnaces 	up 	  	  	  	 

	  	 on line 180 psi 	 changeover working weBll  	  	 


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