Diffusion Morning Report 10/25/06

Ted Berg tberg at stanford.edu
Wed Oct 25 08:29:11 PDT 2006


Good Morning All,
    Looking OK this morning. Removed wafer from suceptor on Epi. AMAT 
tier 1 is completed waiting for AMAT process eng.
No other issues at this time.

Diffusion Mike,Ray, Ted 	  	  	  	  	 
  	Date: 	10/25/06 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	Comments 	  	  	 
Tylan 1 	Up 	  	  	  	 
Tylan 2 	Up 	  	  	  	 
Tylan 3 	Up 	  	  	  	 
Tylan 4 	Up 	  	  	  	 
Tylan 5-BBr3 	Up 	  	  	  	 
Tylan 6-POCl3 	Up 	  	  	  	 
Tylan 7-TEOS2 	Up 	  	8.79/30 	  	 
Tylan 8-SiGe 	Up 	  	6.75/30 	  	 
Tylan 9-Poly 	Up 	  	11.93/30 	  	 
Tylan 10-Nitride 	Up 	  	13.05/30 	  	 
Tylan 11-BPSG-LTO 	up 	  	2.93/30 	  	 
Tylan 12-FGA 	Up 	  	  	  	 
  	  	  	  	  	 
Thermco 1 	Up 	  	  	  	 
Thermco 2 	Up 	  	  	  	 
Thermco Poly 	Up 	  	  	  	 
Thermco Nitride 	Up 	  	  	  	 
Epi 	yellow 	removed wafer from chamber 	  	  	 
  	
	
	
	
	
Burn Box 	up 	  	  	  	 
ZYGO 	Up 	  	  	  	 
  	up 	  	   	  	 
GAAS 22 	  	  	  	  	 
GAAS 23 	UP 	  	  	  	 
SiH4 for furnaces 	up 	  	  	  	 

	  	B on line 120 psi 	 changeover working well  	  	 


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