Diffusion Morning Report 08/07/07

Ted Berg tberg at stanford.edu
Tue Aug 7 06:34:00 PDT 2007

Good Morning All,
    Looking Ok this morning. LTO is back up after pull and clean. TEOS2, 
BBr3, POCL3 under observation. Tylan 2 has boat scraping issues. Tylan 
poly has intermittant  high N2 purge flow when it should not be 
on-looking into it. No other major issues at this time.

  	Date: 	8/7/07 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	Comments 	  	  	 
Tylan 1 	up 	  	  	  	 
Tylan 2 	up 	  	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	up 	  	  	  	 
Tylan 5-BBr3 	yellow 	observation 	  	  	 
Tylan 6-POCl3 	down 	tube clean 	  	  	 
Tylan 7-TEOS2 	yellow 	observation 	9.99/30 	  	 
Tylan 8-SiGe 	up 	  	19.63/30 	  	 
Tylan 9-Poly 	down 	N2 purge issue 	17.2/30 	  	 
Tylan 10-Nitride 	up 	  	24.93/30 	  	 
Tylan 11-BPSG-LTO 	up 	  	.41/30 	  	 
Tylan 12-FGA 	up 	  	  	  	 
Thermco 1 	up 	  	  	  	 
Thermco 2 	up 	  	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	up 	  	  	  	 
Thermco Poly2 	future 	  	
Thermco Nitride1 	up 	  	  	  	 
Thermco Nitride2 	future 	
Burn Box 	Up 	  	   	  	 
Ebeam 	up 	  	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	up 	  	  	  	 
SiH4 for furnaces 	up 	A on line 600 psi 	 changeover working well  	  	 

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