Diffusion Morning Report 08/13/07

Ted Berg tberg at stanford.edu
Mon Aug 13 07:05:15 PDT 2007


Good Morning All,
    Looking fair this morning, lots of stuff down or yellow. POCl3 and 
BBr3 under observation. TEOS2 has a tube leak. BPSG has door issues. 
Ebeam-cryo regen.
Tylan Poly has N2/backfill issues.  That should be enough for now.

>   	  	  	  	  	 
>   	Date: 	8/13/07 	THICKNESS-Change at 	  	 
> Tube Name/Number 	Status 	  	  	  	 
> Tylan 1 	up 	  	  	  	 
> Tylan 2 	up 	  	  	  	 
> Tylan 3 	up 	  	  	  	 
> Tylan 4 	up 	  	  	  	 
> Tylan 5-BBr3 	yellow 	observation 	  	  	 
> Tylan 6-POCl3 	yellow 	observation 	  	  	 
> Tylan 7-TEOS2 	down 	leaky tube 	9.99/30 	  	 
> Tylan 8-SiGe 	up 	  	19.63/30 	  	 
> Tylan 9-Poly 	down 	N2 purge issue 	17.2/30 	  	 
> Tylan 10-Nitride 	up 	  	26.64/30 	  	 
> Tylan 11-BPSG-LTO 	yellow 	Boat issues 	3.05/30 	  	 
> Tylan 12-FGA 	up 	  	  	  	 
>   	  	  	  	  	 
> Thermco 1 	up 	  	  	  	 
> Thermco 2 	up 	  	  	  	 
> Thermco 3 	future 	  	  	  	 
> Thermco4 	future 	  	  	  	 
> Thermco Poly1 	yellow 	pump issues 	  	  	 
> Thermco Poly2 	future 	  	
> 	
> 	
> Thermco Nitride1 	up 	  	  	  	 
> Thermco Nitride2 	future 	
> 	  	  	 
> Burn Box 	Up 	  	   	  	 
> Ebeam 	down 	cryo regen 	  	  	 
> ZYGO 	up 	  	  	  	 
> FGA2 	up 	  	  	  	 
> SiH4 for furnaces 	up 	A on line 580 psi 	 changeover working well  	  	 
>

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