Diffusion Morning Report

Ray Seymour rseymour at stanford.edu
Fri Aug 17 08:58:39 PDT 2007


Morning All,
Tylan Poly Lto and Teos are still down Mile and I have been multiplexing 
our efforts trying to get a handle on the problems. I will be in contact 
with Tystar as soon as I have a few minutes to discuss my results with 
the response so far with LTO temp cal. Poly is about half way to testing 
for pressure control and gas flow control. TEOS has a pumping issue.


	  	  	  	  	 
  	Date: 	8/16/07 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	up 	  	  	  	 
Tylan 2 	up 	  	  	  	 
Tylan 3 	up 	* * 	* * 	* * 	 
Tylan 4 	up 	* * 	* * 	* * 	 
Tylan 5-BBr3 	yellow 	*observation* 	* * 	* * 	 
Tylan 6-POCl3 	yellow 	*observation* 	* * 	* * 	 
Tylan 7-TEOS2 	down 	*leaky tube* 	*0/30* 	* * 	 
Tylan 8-SiGe 	up 	* * 	*19.63/30* 	* * 	 
Tylan 9-Poly 	down 	*N2 purge issue* 	*17.2/30* 	* * 	 
Tylan 10-Nitride 	up 	* * 	*27.88/30* 	* * 	 
Tylan 11-BPSG-LTO 	down 	*temp issues* 	*3.05/30* 	* * 	 
Tylan 12-FGA 	up 	* * 	* * 	* * 	 
  	  	* * 	* * 	* * 	 
Thermco 1 	up 	* * 	* * 	* * 	 
Thermco 2 	up 	* * 	* * 	* * 	 
Thermco 3 	future 	* * 	* * 	* * 	 
Thermco4 	future 	* * 	* * 	* * 	 
Thermco Poly1 	up 	* * 	* * 	* * 	 
Thermco Poly2 	future 	* * 	*
* 	*
* 	
Thermco Nitride1 	up 	* * 	* * 	* * 	 
Thermco Nitride2 	future 	*
* 	* * 	* * 	 
Burn Box 	Up 	* Cleaned this morning
* 	*  * 	* * 	 
Ebeam 	up 	* * 	* * 	* * 	 
ZYGO 	up 	* * 	* * 	* * 	 
FGA2 	up 	* * 	* * 	* * 	 
SiH4 for furnaces 	up 	*A on line 240 psi* 	* changeover working 
well * 	* * 	 


-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/diffusion/attachments/20070817/d72c4e7b/attachment.html>


More information about the diffusion mailing list