From tberg at stanford.edu Thu Feb 1 06:28:18 2007 From: tberg at stanford.edu (Ted Berg) Date: Thu, 01 Feb 2007 06:28:18 -0800 Subject: Diffusion Morning Report 02/01/07 Message-ID: <45C1F902.10003@stanford.edu> Good Morning All, Looking good this morning.. Ebeam had a vacuum glitch but its back in High Vac now. AMAT epi has a dopant flow issue-looking into it.. No other issues at this time. Date: 2/1/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 11.82/30 Tylan 8-SiGe up 11.59/30 Tylan 9-Poly up 1.27/30 Tylan 10-Nitride up 8.59/30 Tylan 11-BPSG-LTO up 9.62/30 Tylan 12-FGA up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride up Epi up AMAT Epi yel Dopant flow issue Burn Box up ZYGO Up Ebeam up GAAS 22 up GAAS 23 UP SiH4 for furnaces up A on line 400 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Fri Feb 2 05:11:09 2007 From: nanotech at nsti.org (Cleantech 2007) Date: Fri, 2 Feb 2007 05:11:09 -0800 Subject: Submissions Due Today Message-ID: Cleantech 2007 May 23-24 2007 Santa Clara, California Submissions Due: February 2, 2007 http://www.Cleantech2007.org/ Cleantech 2007 brings together global research and development scientists and engineers, investors, government officials and business leaders implementing clean technologies in their companies. The cleantech industry encompasses a wide range of products and services, from alternative energy generation to wastewater treatment to more resource-efficient industrial processes. Join your peers for this unique opportunity to learn the latest developments and trends. See how others are using new, innovative technology to create products and services that can compete on both price and performance while reducing humankind's impact on the environment. Submissions Due: February 2, 2007 - Submit Abstract - Submit Business & Policy Presentation - Submit Venture - Submit IP http://www.Cleantech2007.org/ --- You are currently subscribed to nanotech as: diffusion at snf.stanford.edu To unsubscribe send a blank email to leave-nanotech-6754768W at spirit.sparklist.com -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Feb 2 07:49:34 2007 From: tberg at stanford.edu (Ted Berg) Date: Fri, 02 Feb 2007 07:49:34 -0800 Subject: Diffusion Morning Report 02/02/07 Message-ID: <45C35D8E.3040202@stanford.edu> Good Morning All, Looking good this morning. Routine Tylan burnbox clean. ASM arm issue resolved . AMAT FS to be here today to check out flow issues. No other issues at this time. Date: 2/2/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 11.82/30 Tylan 8-SiGe up 11.59/30 Tylan 9-Poly up 1.43/30 Tylan 10-Nitride up 9.38/30 Tylan 11-BPSG-LTO up 9.79/30 Tylan 12-FGA up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride up Epi up AMAT Epi yel Dopant flow issue Burn Box up ZYGO Up Ebeam up GAAS 22 up GAAS 23 UP SiH4 for furnaces up A on line 400 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Feb 5 06:34:32 2007 From: tberg at stanford.edu (Ted Berg) Date: Mon, 05 Feb 2007 06:34:32 -0800 Subject: Diffusion Morning Report 02/05/07 Message-ID: <45C74078.7060200@stanford.edu> Good Morning All, Looking good this morning no major issues this morning. Both Epis behaving. Date: 2/5/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 11.82/30 Tylan 8-SiGe up 11.59/30 Tylan 9-Poly up 1.53/30 Tylan 10-Nitride up 9.38/30 Tylan 11-BPSG-LTO up 11.045/30 Tylan 12-FGA up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride up Epi up AMAT Epi up Burn Box up ZYGO Up Ebeam up GAAS 22 up GAAS 23 UP SiH4 for furnaces up A on line 400 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Feb 6 06:40:11 2007 From: tberg at stanford.edu (Ted Berg) Date: Tue, 06 Feb 2007 06:40:11 -0800 Subject: Diffusion Morning Report 02/06/07 Message-ID: <45C8934B.3070701@stanford.edu> Good Morning All, Looking good this morning. Ebeam had some procedural errors. Epis are fine. Hitachi portion of Vax upgrade ordered, PC from HP is ordered. No other problems at this time. Diffusion Date: 2/6/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 11.82/30 Tylan 8-SiGe up 11.93/30 Tylan 9-Poly up 1.93/30 Tylan 10-Nitride up 9.38/30 Tylan 11-BPSG-LTO up 13.34/30 Tylan 12-FGA up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride up Epi up AMAT Epi up Burn Box up ZYGO Up Ebeam yellow procedural errors GAAS 22 up GAAS 23 UP SiH4 for furnaces up A on line 380 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Feb 7 07:08:28 2007 From: tberg at stanford.edu (Ted Berg) Date: Wed, 07 Feb 2007 07:08:28 -0800 Subject: Diffusion Morning Report 02/07/07 Message-ID: <45C9EB6C.1010300@stanford.edu> Good Morning All, Looking OK with the exception of Epis-down HCL is empty-20 pound in 1 day plus a crossover problem. No other issues at this time. Diffusion Date: 2/7/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 11.82/30 Tylan 8-SiGe up 11.93/30 Tylan 9-Poly up 2.05/30 Tylan 10-Nitride up 11.43/30 Tylan 11-BPSG-LTO up 15.25/30 Tylan 12-FGA up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride up Epi down HCL empty AMAT Epi down HCL empty Burn Box up ZYGO Up Ebeam up GAAS 22 up GAAS 23 UP SiH4 for furnaces up A on line 380 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Feb 8 06:38:46 2007 From: tberg at stanford.edu (Ted Berg) Date: Thu, 08 Feb 2007 06:38:46 -0800 Subject: Diffusioin Morning Report 02/08/07 Message-ID: <45CB35F6.8060409@stanford.edu> Good Morning All, Looking good this morning. LTO has lots of flakes-Mike vacuuming. Epi is using a lot of HCL. No other major issues at this time. Diffusion Date: 2/8/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 13.16/30 Tylan 8-SiGe up 11.93/30 Tylan 9-Poly up 2.05/30 Tylan 10-Nitride up 12.8/30 Tylan 11-BPSG-LTO yellow Flakes 16.73/30 Tylan 12-FGA up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride up Epi up AMAT Epi up Burn Box up ZYGO Up Ebeam up GAAS 22 up GAAS 23 UP SiH4 for furnaces up A on line 380 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Feb 9 06:57:58 2007 From: tberg at stanford.edu (Ted Berg) Date: Fri, 09 Feb 2007 06:57:58 -0800 Subject: Diffusion Morning Report 02/09/07 Message-ID: <45CC8BF6.9040709@stanford.edu> Good Morning All, Looking good this morning. HCl cylinders showed up yesterday for Epi. Burn box cleaned this morning. TLC for Tylan 4 will be changed this morning. No other issues at this time. Diffusion Date: 2/9/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 yel TLC needs change Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 13.16/30 Tylan 8-SiGe up 11.93/30 Tylan 9-Poly up 2.05/30 Tylan 10-Nitride up 12.8/30 Tylan 11-BPSG-LTO up 16.86/30 Tylan 12-FGA up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride up Epi up AMAT Epi up Burn Box up Cleaned this morning ZYGO Up Ebeam up GAAS 22 up GAAS 23 UP SiH4 for furnaces up A on line 380 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Mon Feb 12 07:52:52 2007 From: rseymour at stanford.edu (Ray Seymour) Date: Mon, 12 Feb 2007 07:52:52 -0800 Subject: Diffusion Morning report Message-ID: <45D08D54.4000805@stanford.edu> Morning All, Mr Ted is out for a couple weeks. ASM EPI has a couple issues this morning, one with temp fault during chamber etch, and scrubber has low exhaust problem. Tylan1 had a Hydrogen flow issue which I will check out after posting this report. There are three runs on Tylannitride that are not documented and one each on Sige and BPSG. Diffusion Date: 2/1207 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Yellow Tylan 2 up Tylan 3 up * * * * * * * * Tylan 4 yel * * * * * * * * Tylan 5-BBr3 up * * * * * * * * Tylan 6-POCl3 up * * * * * * * * Tylan 7-TEOS2 up * * *13.96/30* * * * * Tylan 8-SiGe up * * *11.93/30* * * * * Tylan 9-Poly up * * *2.41/30* * * * * Tylan 10-Nitride up * * *12.8/30* * * * * Tylan 11-BPSG-LTO up * * *24.2/30* * * * * Tylan 12-FGA up * * * * * * * * * * * * * * * * Thermco 1 Up * * * * * * * * Thermco 2 Up * * * * * * * * Thermco Poly Up * * * * * * * * Thermco Nitride up * * * * * * * * Epi Down * * * * * * * * AMAT Epi up * * * * * * * * Burn Box up * * * * * * ZYGO Up * * * * * * * * Ebeam up * * * * * * * * GAAS 22 up * * * * * * * * GAAS 23 UP * * * * * * * * SiH4 for furnaces up * * * * * * * * *A on line 360 psi* * changeover working well * * * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Tue Feb 13 07:34:51 2007 From: rseymour at stanford.edu (Ray Seymour) Date: Tue, 13 Feb 2007 07:34:51 -0800 Subject: Diffusi0on Morning report Message-ID: <45D1DA9A.7010707@stanford.edu> Morning All, Tylan 2 has temp issues with load zone. EPI has high leak rate of 99 mT/min. All else looking good. Diffusion Date: 2/13/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 up Tylan 2 yellow Tylan 3 up * * * * * * * * Tylan 4 up * * * * * * * * Tylan 5-BBr3 up * * * * * * * * Tylan 6-POCl3 up * * * * * * * * Tylan 7-TEOS2 up * * *14.36/30* * * * * Tylan 8-SiGe up * * *12.18/30* * * * * Tylan 9-Poly up * * *2.41/30* * * * * Tylan 10-Nitride up * * *13.0/30* * * * * Tylan 11-BPSG-LTO up * * *24.26/30* * * * * Tylan 12-FGA up * * * * * * * * * * * * * * * * Thermco 1 Up * * * * * * * * Thermco 2 Up * * * * * * * * Thermco Poly Up * * * * * * * * Thermco Nitride up * * * * * * * * Epi yellow * * * * * * * * AMAT Epi up * * * * * * * * Burn Box up * * * * * * * * ZYGO Up * * * * * * * * Ebeam up * * * * * * * * GAAS 22 up * * * * * * * * GAAS 23 UP * * * * * * * * SiH4 for furnaces up * * * * * * * * *A on line 355 psi* * changeover working well * * * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Wed Feb 14 07:44:14 2007 From: rseymour at stanford.edu (Ray Seymour) Date: Wed, 14 Feb 2007 07:44:14 -0800 Subject: Diffusion Morning Report Message-ID: <45D32E4E.7060800@stanford.edu> Morning All, Tylan 2 temp have been stable. EPI had Dichlor issues yesterday, but delivery in 115X was at normal pressure. Later test flowed ok. HCL B side needs to be changed today. I will get with Maurice to schedule pumping out the line. All else looking good. Diffusion Date: 2/14/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 up Tylan 2 up Tylan 3 up * * * * * * * * Tylan 4 up * * * * * * * * Tylan 5-BBr3 up * * * * * * * * Tylan 6-POCl3 up * * * * * * * * Tylan 7-TEOS2 up * * *14.36/30* * * * * Tylan 8-SiGe up * * *12.18/30* * * * * Tylan 9-Poly up * * *2.41/30* * * * * Tylan 10-Nitride up * * *13.0/30* * * * * Tylan 11-BPSG-LTO up * * *24.32/30* * * * * Tylan 12-FGA up * * * * * * * * * * * * * * * * Thermco 1 Up * * * * * * * * Thermco 2 Up * * * * * * * * Thermco Poly Up * * * * * * * * Thermco Nitride up * * * * * * * * Epi yellow * * * * * * * * AMAT Epi up * * * * * * * * Burn Box up * * * * * * * * ZYGO Up * * * * * * * * Ebeam up * * * * * * * * GAAS 22 up * * * * * * * * GAAS 23 UP * * * * * * * * SiH4 for furnaces up * * * * * * * * *A on line 340 psi* * changeover working well * * * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Thu Feb 15 07:36:05 2007 From: rseymour at stanford.edu (Ray Seymour) Date: Thu, 15 Feb 2007 07:36:05 -0800 Subject: Diffusion Morning Report Message-ID: <45D47DE5.1030502@stanford.edu> Morning All. Things looking very good this morning. There are no new issues. Diffusion Date: 2/15/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 up Tylan 2 up Tylan 3 up * * * * * * * * Tylan 4 up * * * * * * * * Tylan 5-BBr3 up * * * * * * * * Tylan 6-POCl3 up * * * * * * * * Tylan 7-TEOS2 up * * *14.36/30* * * * * Tylan 8-SiGe up * * *12.18/30* * * * * Tylan 9-Poly up * * *2.41/30* * * * * Tylan 10-Nitride up * * *13.0/30* * * * * Tylan 11-BPSG-LTO up * * *24.52/30* * * * * Tylan 12-FGA up * * * * * * * * * * * * * * * * Thermco 1 Up * * * * * * * * Thermco 2 Up * * * * * * * * Thermco Poly Up * * * * * * * * Thermco Nitride up * * * * * * * * Epi up * * * * * * * * AMAT Epi up * * * * * * * * Burn Box up * * * * * * * * ZYGO Up * * * * * * * * Ebeam up * * * * * * * * GAAS 22 up * * * * * * * * GAAS 23 UP * * * * * * * * SiH4 for furnaces up * * * * * * * * *A on line 330 psi* * changeover working well * * * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Thu Feb 15 12:51:58 2007 From: nanotech at nsti.org (Nano World News) Date: Thu, 15 Feb 2007 12:51:58 -0800 Subject: Nano World News February 2007 Message-ID: ******************************************************* *Note: If you are having trouble viewing this message,* *copy and paste the link below into your browser * *address field and hit the Enter button on your * *keyboard. * http://www.nsti.org/news/ *If you would like to unsubscribe, copy the URL below:* http://www.nsti.org/outreach/unsubscribe.html ******************************************************* --- You are currently subscribed to nanotech as: diffusion at snf.stanford.edu To unsubscribe send a blank email to leave-nanotech-6754768W at spirit.sparklist.com -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Fri Feb 16 08:18:43 2007 From: rseymour at stanford.edu (Ray Seymour) Date: Fri, 16 Feb 2007 08:18:43 -0800 Subject: Diffusion Morning Report Message-ID: <45D5D963.7050504@stanford.edu> Morning All, The EPI has high base, leak rate write up. I will get with Maurice this morning on this. All else looking great. Have a safe happy Holiday. Diffusion Date: 2/16/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 up Tylan 2 up Tylan 3 up * * * * * * * * Tylan 4 up * * * * * * * * Tylan 5-BBr3 up * * * * * * * * Tylan 6-POCl3 up * * * * * * * * Tylan 7-TEOS2 up * * *14.36/30* * * * * Tylan 8-SiGe up * * *12.18/30* * * * * Tylan 9-Poly up * * *2.41/30* * * * * Tylan 10-Nitride up * * *13.0/30* * * * * Tylan 11-BPSG-LTO up * * *24.55/30* * * * * Tylan 12-FGA up * * * * * * * * * * * * * * * * Thermco 1 Up * * * * * * * * Thermco 2 Up * * * * * * * * Thermco Poly Up * * * * * * * * Thermco Nitride up * * * * * * * * Epi up * * * * * * * * AMAT Epi up * * * * * * * * Burn Box up *cleaned this morning * * * * * * * ZYGO Up * * * * * * * * Ebeam up * * * * * * * * GAAS 22 up * * * * * * * * GAAS 23 UP * * * * * * * * SiH4 for furnaces up * * * * * * * * *A on line 320 psi* * changeover working well * * * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Tue Feb 20 08:09:24 2007 From: nanotech at nsti.org (Nanotech 2007) Date: Tue, 20 Feb 2007 08:09:24 -0800 Subject: Premiere Venture & Partnering Forum: NSTI Nanotech Ventures 2007 Message-ID: 2007 NSTI Nanotech Ventures May 22-23, 2007 Santa Clara Convention Center Silicon Valley, California, U.S.A. Run jointly with the 10th Nanotech Conference and Trade Show http://www.nsti.org/NanotechVentures2007 Connecting the World?s Top Nanotech Ventures with the World?s Investment and Industry Leaders Venture Company Executives - Are You: ? Looking for Investment Funding? ? Looking for Corporate Partners? ? Looking for Corporate Licensing? ? NSTI Nanotech Ventures - Matching technology solutions with industry needs Submit your Venture Company today for presentation review by the NSTI Nanotech Review Committee: http://www.nsti.org/NanotechVentures2007 Submissions due: March 10, 2007 --- You are currently subscribed to nanotech as: diffusion at snf.stanford.edu To unsubscribe send a blank email to leave-nanotech-6754768W at spirit.sparklist.com -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Wed Feb 21 08:21:34 2007 From: rseymour at stanford.edu (Ray Seymour) Date: Wed, 21 Feb 2007 08:21:34 -0800 Subject: Diffusion Mirning Repoer Message-ID: <45DC718E.2030301@stanford.edu> Morning All, Tylan 2 is yellow for a MFS alarm, I will check the conditions this morning. TEOS also has a MFS alarm when TEOS turned on. EPI has a high rate of rise. Diffusion Date: 2/16/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 up Tylan 2 Yellow H2O2 alarm Tylan 3 up * * * * * * * * Tylan 4 up * * * * * * * * Tylan 5-BBr3 up * * * * * * * * Tylan 6-POCl3 up * * * * * * * * Tylan 7-TEOS2 Down * * *14.36/30* * * * * Tylan 8-SiGe up * * *12.23/30* * * * * Tylan 9-Poly up * * *2.41/30* * * * * Tylan 10-Nitride up * * *13.0/30* * * * * Tylan 11-BPSG-LTO up * * *28,3/30* * * * * Tylan 12-FGA up * * * * * * * * * * * * * * * * Thermco 1 Up * * * * * * * * Thermco 2 Up * * * * * * * * Thermco Poly Up * * * * * * * * Thermco Nitride up * * * * * * * * Epi Yellow * * * * * * * * AMAT Epi up * * * * * * * * Burn Box up * * * * * * * * ZYGO Up * * * * * * * * Ebeam up * * * * * * * * GAAS 22 up * * * * * * * * GAAS 23 UP * * * * * * * * SiH4 for furnaces up * * * * * * * * *A on line 290 psi* * changeover working well * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Thu Feb 22 07:47:23 2007 From: rseymour at stanford.edu (Ray Seymour) Date: Thu, 22 Feb 2007 07:47:23 -0800 Subject: Diffusion Morning Report Message-ID: <45DDBB0B.10406@stanford.edu> Good Morning All, EPI 1 is up after Mike replaced check valve. TEOS exhaust port cleaned by Mike, tube heating up now. Tylan 2 replaced TCU board and started backup T/C calibration. All else looking good this morning Diffusion Date: 2/22/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 up Tylan 2 Down TCU calibration in process Tylan 3 up * * * * * * * * Tylan 4 up * * * * * * * * Tylan 5-BBr3 up * * * * * * * * Tylan 6-POCl3 up * * * * * * * * Tylan 7-TEOS2 yellow * * *14.36/30* * * * * Tylan 8-SiGe up * * *12.23/30* * * * * Tylan 9-Poly up * * *3.86/30* * * * * Tylan 10-Nitride up * * *14.01/30* * * * * Tylan 11-BPSG-LTO up * * *29.033/30* * * * * Tylan 12-FGA up * * * * * * * * * * * * * * * * Thermco 1 Up * * * * * * * * Thermco 2 Up * * * * * * * * Thermco Poly Up * * * * * * * * Thermco Nitride up * * * * * * * * Epi UP * * * * * * * * AMAT Epi up * * * * * * * * Burn Box up * * * * * * * * ZYGO Up * * * * * * * * Ebeam up * * * * * * * * GAAS 22 up * * * * * * * * GAAS 23 UP * * * * * * * * SiH4 for furnaces up * * * * * * * * *A on line 280 psi* * changeover working well * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Thu Feb 22 15:23:10 2007 From: nanotech at nsti.org (Cleantech 2007) Date: Thu, 22 Feb 2007 15:23:10 -0800 Subject: Cleantech 2007 - Call for Ventures and Corporate Partnering Message-ID: An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Fri Feb 23 08:08:35 2007 From: rseymour at stanford.edu (Ray Seymour) Date: Fri, 23 Feb 2007 08:08:35 -0800 Subject: Diffusion Morning Report Message-ID: <45DF1183.3060502@stanford.edu> Morning All, Looking pretty good this morning.Tylan 2 is still chunching away on the backup T/C calibration. All else is good. Diffusion Date: 2/23/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 up Tylan 2 Down TCU calibration in process Tylan 3 up * * * * * * * * Tylan 4 up * * * * * * * * Tylan 5-BBr3 up * * * * * * * * Tylan 6-POCl3 up * * * * * * * * Tylan 7-TEOS2 up * * *14.36/30* * * * * Tylan 8-SiGe up * * *12.23/30* * * * * Tylan 9-Poly up * * *6.24/30* * * * * Tylan 10-Nitride up * * *14.01/30* * * * * Tylan 11-BPSG-LTO up * Pull and clean on Monday * *31.5/30* * * * * Tylan 12-FGA up * * * * * * * * * * * * * * * * Thermco 1 Up * * * * * * * * Thermco 2 Up * * * * * * * * Thermco Poly Up * * * * * * * * Thermco Nitride up * * * * * * * * Epi UP * * * * * * * * AMAT Epi up * * * * * * * * Burn Box up *Cleaned this morning * * * * * * * ZYGO Up * * * * * * * * Ebeam up * * * * * * * * GAAS 22 up * * * * * * * * GAAS 23 UP * * * * * * * * SiH4 for furnaces up * * * * * * * * *A on line 270 psi* * changeover working well * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From hathaway at getinsatoledo.e.telefonica.net Sat Feb 24 04:48:56 2007 From: hathaway at getinsatoledo.e.telefonica.net (Hacker L. Samarkand) Date: Sat, 24 Feb 2007 12:48:56 +0000 Subject: Message-ID: <9208318586.20070224124856@getinsatoledo.e.telefonica.net> -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: payday.gif Type: image/gif Size: 3260 bytes Desc: not available URL: From extrkr at globalscript.com Sun Feb 25 06:30:26 2007 From: extrkr at globalscript.com (Boost Q. Beginner) Date: Sun, 25 Feb 2007 14:30:26 +0000 Subject: Message-ID: <1307207678.20070225143026@globalscript.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: molecule.gif Type: image/gif Size: 3260 bytes Desc: not available URL: From tberg at stanford.edu Mon Feb 26 07:01:16 2007 From: tberg at stanford.edu (Ted Berg) Date: Mon, 26 Feb 2007 07:01:16 -0800 Subject: Diffusion Morning Report 02/26/07 Message-ID: <45E2F63C.6030702@stanford.edu> Good Morning All, Looking good this morning. ASM Epi has pumping issues-looking into it. Tylan 2 in TCU cal. Ebeam has trouble with def. LTO going down tomorrow for tube change. No other issues at this time. Diffusion Date: 2/26/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 up Tylan 2 down TCU cal Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 14.36/30 Tylan 8-SiGe up 12.23/30 Tylan 9-Poly up 6.24/30 Tylan 10-Nitride up 14.01/30 Tylan 11-BPSG-LTO up 32.53/30 Tylan 12-FGA up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride up Epi up AMAT Epi up Burn Box up ZYGO Up Ebeam up GAAS 22 up GAAS 23 UP SiH4 for furnaces up A on line 280 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From rcrane at stanford.edu Mon Feb 26 07:03:22 2007 From: rcrane at stanford.edu (Dick Crane) Date: Mon, 26 Feb 2007 07:03:22 -0800 Subject: Diffusion Morning Report 02/26/07 In-Reply-To: <45E2F63C.6030702@stanford.edu> References: <45E2F63C.6030702@stanford.edu> Message-ID: <45E2F6BA.4030505@stanford.edu> Welcome back Ted, Dick Ted Berg wrote: > Good Morning All, > Looking good this morning. ASM Epi has pumping issues-looking > into it. Tylan 2 in TCU cal. Ebeam has trouble with def. LTO going > down tomorrow for tube change. No other issues at this time. > > Diffusion > Date: 2/26/07 THICKNESS-Change at > Tube Name/Number Status Comments > Tylan 1 up > Tylan 2 down TCU cal > Tylan 3 up > Tylan 4 up > Tylan 5-BBr3 up > Tylan 6-POCl3 up > Tylan 7-TEOS2 up 14.36/30 > Tylan 8-SiGe up 12.23/30 > Tylan 9-Poly up 6.24/30 > Tylan 10-Nitride up 14.01/30 > Tylan 11-BPSG-LTO up 32.53/30 > Tylan 12-FGA up > > Thermco 1 Up > Thermco 2 Up > Thermco Poly Up > Thermco Nitride up > Epi up > AMAT Epi up > > > Burn Box up > ZYGO Up > Ebeam up > GAAS 22 up > GAAS 23 UP > SiH4 for furnaces up > > A on line 280 psi changeover working well > > -------------- next part -------------- An HTML attachment was scrubbed... URL: From gerald at gesaman.com Mon Feb 26 05:49:21 2007 From: gerald at gesaman.com (Predilections R. Rearward) Date: Mon, 26 Feb 2007 13:49:21 +0000 Subject: Message-ID: <9545694555.20070226134921@gesaman.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: agreeably.gif Type: image/gif Size: 3260 bytes Desc: not available URL: From istiarti at glenbarra.on.ca Tue Feb 27 04:53:29 2007 From: istiarti at glenbarra.on.ca (Culottes U. Hazarding) Date: Tue, 27 Feb 2007 12:53:29 +0000 Subject: Message-ID: <0566215537.20070227125329@glenbarra.on.ca> -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: additional.gif Type: image/gif Size: 3260 bytes Desc: not available URL: From tberg at stanford.edu Tue Feb 27 07:03:49 2007 From: tberg at stanford.edu (Ted Berg) Date: Tue, 27 Feb 2007 07:03:49 -0800 Subject: Diffusion Morning Report 02/27/07 Message-ID: <45E44855.8090900@stanford.edu> Good Morning All, Looking good this morning. Tylans 2 and 3 have temp problems- looking into it. Ebeam certain users having problems with def . Mechanical contractor walk through tomorrow for TEL. LTO down for scheduled pull and clean. Hitachi will be here on Thursday to begin PM and check out of ebeam system. No other problems at this time. Diffusion Date: 2/27/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 up Tylan 2 down temp issues Tylan 3 yellow temp issues Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 14.76/30 Tylan 8-SiGe up 12.23/30 Tylan 9-Poly up 6.24/30 Tylan 10-Nitride up 14.01/30 Tylan 11-BPSG-LTO down Pull and clean 0/30 Tylan 12-FGA up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride up Epi up AMAT Epi up Burn Box up ZYGO Up Ebeam up GAAS 22 up GAAS 23 UP SiH4 for furnaces up A on line 240 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Feb 28 06:54:54 2007 From: tberg at stanford.edu (Ted Berg) Date: Wed, 28 Feb 2007 06:54:54 -0800 Subject: Diffusion Morning Report 02/28/07 Message-ID: <45E597BE.6090701@stanford.edu> Good Morning All, Looking good this morning. LTO back up after pull and clean. Tylans 2 and 3 have temp issues-looking into them. Mechanical contractor walkthrough today for TEL. Ebeam PM scheduled to begin tomorrow afternoon. Please let Ted know if there are any specific issues you would like addressed. No other problems at this time. Diffusion Date: 2/28/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 up Tylan 2 down temp issues Tylan 3 yellow temp issues Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 14.76/30 Tylan 8-SiGe up 12.23/30 Tylan 9-Poly up 6.24/30 Tylan 10-Nitride up 15.51/30 Tylan 11-BPSG-LTO up After Pull and clean 0/30 Tylan 12-FGA up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride up Epi up AMAT Epi up Burn Box up ZYGO Up Ebeam up GAAS 22 up GAAS 23 UP SiH4 for furnaces up A on line 240 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Wed Feb 28 07:37:04 2007 From: nanotech at nsti.org (Nano World News) Date: Wed, 28 Feb 2007 07:37:04 -0800 Subject: Nano World News February 2007 Special Edition Message-ID: ******************************************************* *Note: If you are having trouble viewing this message,* *copy and paste the link below into your browser * *address field and hit the Enter button on your * *keyboard. * http://www.nsti.org/news/ *If you would like to unsubscribe, copy the URL below:* http://www.nsti.org/outreach/unsubscribe.html ******************************************************* --- You are currently subscribed to nanotech as: diffusion at snf.stanford.edu To unsubscribe send a blank email to leave-nanotech-6754768W at spirit.sparklist.com -------------- next part -------------- An HTML attachment was scrubbed... URL: