From tberg at stanford.edu Wed Jan 3 07:29:43 2007 From: tberg at stanford.edu (Ted Berg) Date: Wed, 03 Jan 2007 07:29:43 -0800 Subject: Diffusion Morning Report 01/03/07 Message-ID: <459BCBE7.600@stanford.edu> Good Morning All and welcome back, Looking OK this morning. Poly and Nitride are back up Thanks, Linda. LTO needs a test . Epi leak rate greatly improved 90mt/ min. All oxides had TLC clean yesterday. Thermcos down for burn box issues should be back up today. Most of gas panel testing is completed. We will address any other issues as they /if they arise. Diffusion Date: 1/3/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 11.40/30 Tylan 8-SiGe Up 11.25/30 Tylan 9-Poly Up 24.66/30 Tylan 10-Nitride Up 0/30 Tylan 11-BPSG-LTO yellow questionable film 7.15/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride Up Epi down leak testing Burn Box up ZYGO Up up GAAS 22 GAAS 23 UP SiH4 for furnaces up A on line 540 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Jan 4 06:41:10 2007 From: tberg at stanford.edu (Ted Berg) Date: Thu, 04 Jan 2007 06:41:10 -0800 Subject: Diffusion Morning Report 01/04/07 Message-ID: <459D1206.6030200@stanford.edu> Good morning All, Looking good this morning. Thermco Nitride and Poly still down for burn box drain. Still looking into Epi issues. AMAT epi qual creeping along. TEL-excess finger wall stuff removed. Quote for H2 sensor coming. Ebeam has too much beam current. No other issues at this time. Diffusion Date: 1/4/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 yellow display issue Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 11.42/30 Tylan 8-SiGe Up 11.25/30 Tylan 9-Poly Up 24.99/30 Tylan 10-Nitride Up 0/30 Tylan 11-BPSG-LTO yellow questionable film 7.15/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly down burn box issues Thermco Nitride down burn box issues Epi down leak testing Burn Box up ZYGO Up up GAAS 22 GAAS 23 UP SiH4 for furnaces up A on line 540 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Jan 5 06:49:06 2007 From: tberg at stanford.edu (Ted Berg) Date: Fri, 05 Jan 2007 06:49:06 -0800 Subject: Diffusion Morning Report 01/05/07 Message-ID: <459E6562.5000001@stanford.edu> Good Morning All, Looking good this morning. Tylan 1 has lo O2 alarm intermittanly with no flow, Tylan2 has a readout of 400 onsource end. Still beating on Epi. AMAT has wafers for evaluation of GEH4. TEL waiting for H2 sensor quote. Ebeam changing tip this morning. No other issues at this time. Diffusion Date: 1/5/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 11.42/30 Tylan 8-SiGe Up 11.25/30 Tylan 9-Poly Up 24.99/30 Tylan 10-Nitride Up 1.0/30 Tylan 11-BPSG-LTO up 7.75/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly down burn box issues Thermco Nitride down burn box issues Epi down leak testing Burn Box up ZYGO Up up GAAS 22 GAAS 23 UP SiH4 for furnaces up A on line 540 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Jan 8 07:06:56 2007 From: tberg at stanford.edu (Ted Berg) Date: Mon, 08 Jan 2007 07:06:56 -0800 Subject: Diffusion Morning report 01/08/07 Message-ID: <45A25E10.9070405@stanford.edu> Good Morning All, Looking OK this morning. Ebeam had tip changed and baked over the weekend. Still beating on Epi. AMAT Epi is testing. Tel Waiting for Quotes. Tylan 1 has Lo O2 alarms. No ther issues at this time. Diffusion Date: 1/7/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 yellow lo O2 leak Tylan 2 Up Tylan 3 Up Tylan 4 up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 11.42/30 Tylan 8-SiGe Up 11.25/30 Tylan 9-Poly Up 25.15/30 Tylan 10-Nitride Up 1.82/30 Tylan 11-BPSG-LTO up 7.75/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride up Epi down leak testing Burn Box up ZYGO Up up GAAS 22 GAAS 23 UP SiH4 for furnaces up A on line 540 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Jan 9 06:54:56 2007 From: tberg at stanford.edu (Ted Berg) Date: Tue, 09 Jan 2007 06:54:56 -0800 Subject: Diffusion Morning Report 01/09/07 Message-ID: <45A3ACC0.7040308@stanford.edu> Good Morning All, Looking good this morning. Zeroed Lo O2 mfc on Tylan 1 observing. Still working on Epi leaks. Evaluating Wafers on AMAT Epi. Waiting for quotes onTEL. No other problems at this time. PO for Ebeam PM written. Diffusion Date: 1/9/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 yellow lo O2 leak Tylan 2 Up Tylan 3 Up Tylan 4 up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 11.42/30 Tylan 8-SiGe Up 11.25/30 Tylan 9-Poly Up 25.15/30 Tylan 10-Nitride Up 1.82/30 Tylan 11-BPSG-LTO up 7.75/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride up Epi down leak testing Burn Box up ZYGO Up up GAAS 22 GAAS 23 UP SiH4 for furnaces up A on line 540 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Jan 10 06:50:51 2007 From: tberg at stanford.edu (Ted Berg) Date: Wed, 10 Jan 2007 06:50:51 -0800 Subject: Diffusion Morning Report 01/10/07 Message-ID: <45A4FD4B.5050404@stanford.edu> Good morning All, Looking good this morning . ASM to be in today to look at Epi with us. Ebeam Ion gauge flickering. AMAT Epi moving ahead with quals. No other problems at this time. Diffusion Date: 1/10/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 11.42/30 Tylan 8-SiGe Up 11.25/30 Tylan 9-Poly Up 25.31/30 Tylan 10-Nitride Up 1.82/30 Tylan 11-BPSG-LTO up 7.77/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride up Epi down leak testing Burn Box up ZYGO Up up GAAS 22 GAAS 23 UP SiH4 for furnaces up A on line 540 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From cleantech at nsti.org Wed Jan 10 09:38:38 2007 From: cleantech at nsti.org (Cleantech 2007) Date: Wed, 10 Jan 2007 09:38:38 -0800 Subject: Call for Participation - Cleantech - Santa Clara - May 2007 Message-ID: Cleantech 2007 May 23-24 2007, Santa Clara, California Santa Clara Convention Center http://www.Cleantech2007.com Cleantech 2007 is the world?s largest multi-disciplinary and multi-sector conference on global sustainability addressing advancements in traditional technologies, emerging technologies and clean business practices. Cleantech 2007 is co-located with the 10th annual Nanotech 2007, TechConnect 2007 and associated Trade Show and Venture Programs. --- You are currently subscribed to nanotech as: diffusion at snf.stanford.edu To unsubscribe send a blank email to leave-nanotech-6754768W at spirit.sparklist.com -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Jan 11 07:09:41 2007 From: tberg at stanford.edu (Ted Berg) Date: Thu, 11 Jan 2007 07:09:41 -0800 Subject: Diffusion Morning Report 01/11/07 Message-ID: <45A65335.9080904@stanford.edu> Good Morning All, Looking good this morning. Epi's leak rate looks good Quals in progress. Ebeam ion gauge replaced waiting for good vacuum. AMAT quals in progress. TEL holding, training in Feb. No other issues at this time. Diffusion Date: 1/11/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 11.42/30 Tylan 8-SiGe Up 11.25/30 Tylan 9-Poly Up 26.75/30 Tylan 10-Nitride Up 2.44/30 Tylan 11-BPSG-LTO up 11.42/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride up Epi down process qual Burn Box up ZYGO Up up GAAS 22 GAAS 23 UP SiH4 for furnaces up A on line 540 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Jan 12 06:32:17 2007 From: tberg at stanford.edu (Ted Berg) Date: Fri, 12 Jan 2007 06:32:17 -0800 Subject: Diffusion Morning report 01/12/07 Message-ID: <45A79BF1.6000109@stanford.edu> Good Morning All, Looking good this morning. ASM Epi in qual. Ebeam in high vac in -9 scale. Tylan burn box cleaned this morning. AMAT epi running qual runs. TEL holding. No other problems at this time. Diffusion Date: 1/12/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 11.42/30 Tylan 8-SiGe Up 11.25/30 Tylan 9-Poly Up 26.75/30 Tylan 10-Nitride Up 2.44/30 Tylan 11-BPSG-LTO up 8.37/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride up Epi down process qual Burn Box up ZYGO Up up GAAS 22 GAAS 23 UP SiH4 for furnaces up A on line 540 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Jan 16 07:18:17 2007 From: tberg at stanford.edu (Ted Berg) Date: Tue, 16 Jan 2007 07:18:17 -0800 Subject: Diffusion Morning Report 01/16/07 Message-ID: <45ACECB9.3040403@stanford.edu> Good Morning All, Looking terrible this morning. All Tylans down because TYCOM is down. Both Epis have problems ASM has fair leak rate about 40mT/ min but is still hazey. AMAT has pumping issues. Still trying to bring ebeam back up. Thermcos up. Diffusion Date: 1/16/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 down Tycom Down Tylan 2 down Tycom Down Tylan 3 down Tycom Down Tylan 4 down Tycom Down Tylan 5-BBr3 down Tycom Down Tylan 6-POCl3 down Tycom Down Tylan 7-TEOS2 down Tycom Down 11.82/30 Tylan 8-SiGe down Tycom Down 11.25/30 Tylan 9-Poly down Tycom Down 26.76/30 Tylan 10-Nitride down Tycom Down 6.24/30 Tylan 11-BPSG-LTO down Tycom Down 16.25/30 Tylan 12-FGA down Tycom Down Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride up Epi down process qual AMAT Epi down Qual Burn Box up ZYGO Up up GAAS 22 GAAS 23 UP SiH4 for furnaces up A on line 540 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Jan 17 06:50:24 2007 From: tberg at stanford.edu (Ted Berg) Date: Wed, 17 Jan 2007 06:50:24 -0800 Subject: Diffusion Morning Report 01/17/07 Message-ID: <45AE37B0.2000400@stanford.edu> Good Morning All, Looking fair this morning. Both Epis still have issues-ASM has hazey film even though leak rates look fair still investigating. AMAT epi has intermittant pump issues-looking into it. Tylan 2 temp was low SCR fan running slow. Ebeam still trying to bring up the tip. No other issues at this time. TEL-POs wriiten for H2 sensor. Diffusion Date: 1/17/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 yellow temp readings Tylan 2 yellow Temp issues Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 11.82/30 Tylan 8-SiGe Up 11.25/30 Tylan 9-Poly Up 26.76/30 Tylan 10-Nitride Up 6.24/30 Tylan 11-BPSG-LTO yellow Weird readings 20.5/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride up Epi down process qual AMAT Epi down Qual Burn Box up ZYGO Up up GAAS 22 GAAS 23 UP SiH4 for furnaces up A on line 540 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Jan 18 06:47:02 2007 From: tberg at stanford.edu (Ted Berg) Date: Thu, 18 Jan 2007 06:47:02 -0800 Subject: Diffusion Morning Report 01/18/07 Message-ID: <45AF8866.3050007@stanford.edu> Good Morning All, Looking fair this morning. Both epis still down ASM -hazey, AMAT bad chamber pump. Tycom still has some weirdness-looking into it-try finding TYCOM on coral. Ebeam still no beam current. TEL- more POs placed. No other issues at this time. Diffusion Date: 1/18/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 Up Tylan 2 Up Tylan 3 Up Tylan 4 Up Tylan 5-BBr3 Up Tylan 6-POCl3 Up Tylan 7-TEOS2 Up 11.82/30 Tylan 8-SiGe Up 11.25/30 Tylan 9-Poly Up 27.44/30 Tylan 10-Nitride Up 6.24/30 Tylan 11-BPSG-LTO yellow Weird readings 22.6/30 Tylan 12-FGA Up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride up Epi down process qual AMAT Epi down pump out for repair Burn Box up ZYGO Up up GAAS 22 GAAS 23 UP SiH4 for furnaces up A on line 540 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Jan 19 07:28:53 2007 From: tberg at stanford.edu (Ted Berg) Date: Fri, 19 Jan 2007 07:28:53 -0800 Subject: Diffusion Morning Report 01/19/07 Message-ID: <45B0E3B5.6090905@stanford.edu> Good Morning All, Well there isa ray of light at the end of epi. Tests yesterday on ASM looked pretty good stay tuned. AMAT Epi pump is out for repair. Tycom is still dead but we should get boards for repair today. No other issues at this time. Diffusion Date: 1/18/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 down TYCOM Problems Tylan 2 down TYCOM Problems Tylan 3 down TYCOM Problems Tylan 4 down TYCOM Problems Tylan 5-BBr3 down TYCOM Problems Tylan 6-POCl3 down TYCOM Problems Tylan 7-TEOS2 down TYCOM Problems 11.82/30 Tylan 8-SiGe down TYCOM Problems 11.25/30 Tylan 9-Poly down TYCOM Problems 27.44/30 Tylan 10-Nitride down TYCOM Problems 6.24/30 Tylan 11-BPSG-LTO down TYCOM Problems 22.6/30 Tylan 12-FGA down TYCOM Problems Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride up Epi yellow process qual AMAT Epi down pump out for repair Burn Box up ZYGO Up up GAAS 22 GAAS 23 UP SiH4 for furnaces up A on line 540 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Jan 22 06:54:43 2007 From: tberg at stanford.edu (Ted Berg) Date: Mon, 22 Jan 2007 06:54:43 -0800 Subject: Diffusion Morninhg Report 01/22/07 Message-ID: <45B4D033.8070500@stanford.edu> Good Morning All, Looking OK this morning. ASM Epi Is running Qual stuff, AMAT Epi -pump is out for repair until Mid Week hopefully. LTO is down for pull and clean. Poly is getting very close to pull and clean. Thermco bank had H2 off because of fire alarm on Saturday-reset. Tylan 4 has TCU issues-looking into it. TEL waiting for contractor walkthrough. No beam yet on ebeam. No other issues at this time. Date: 1/22/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 yellow TCU issue Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 11.82/30 Tylan 8-SiGe up 11.25/30 Tylan 9-Poly up 28.31/30 Tylan 10-Nitride up 6.59/30 Tylan 11-BPSG-LTO down pull and clean 0/30 Tylan 12-FGA up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride up Epi yellow process qual AMAT Epi down pump out for repair Burn Box up ZYGO Up up GAAS 22 GAAS 23 UP SiH4 for furnaces up A on line 540 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Mon Jan 22 09:36:03 2007 From: nanotech at nsti.org (Cleantech 2007) Date: Mon, 22 Jan 2007 09:36:03 -0800 Subject: Invitation to Participate - Feb. 2 submission deadline approaching Message-ID: Cleantech 2007 May 23-24 2007 Santa Clara, California http://www.Cleantech2007.org/ Cleantech 2007 brings together global research and development scientists and engineers, investors, government officials and business leaders implementing clean technologies in their companies. The cleantech industry encompasses a wide range of products and services, from alternative energy generation to wastewater treatment to more resource-efficient industrial processes. Join your peers for this unique opportunity to learn the latest developments and trends. See how others are using new, innovative technology to create products and services that can compete on both price and performance while reducing humankind's impact on the environment. Submissions Due: February 2, 2007 - Submit Abstract - Submit Business & Policy Presentation - Submit Venture - Submit IP http://www.Cleantech2007.org/ --- You are currently subscribed to nanotech as: diffusion at snf.stanford.edu To unsubscribe send a blank email to leave-nanotech-6754768W at spirit.sparklist.com -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Jan 23 06:43:09 2007 From: tberg at stanford.edu (Ted Berg) Date: Tue, 23 Jan 2007 06:43:09 -0800 Subject: Diffusion Morning report 01/23/07 Message-ID: <45B61EFD.7050504@stanford.edu> Good Morning All, Looking OK this morning. People are running ASM Epi not sure how up it is. AMAT Epi pump should be back tomorrow, Dick has found the beam for ebeam. Tylan LTO had pull and clean-needs coat and test. Tylan Poly down for pull and clean. TEL holding. No other issues at this time. Date: 1/23/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 yellow TCU issue Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 11.82/30 Tylan 8-SiGe up 11.25/30 Tylan 9-Poly down pull and clean 0/30 Tylan 10-Nitride up 6.59/30 Tylan 11-BPSG-LTO down pull and clean 0/30 Tylan 12-FGA up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride up Epi yellow process qual AMAT Epi down pump out for repair Burn Box up ZYGO Up Ebeam down looking for beam GAAS 22 up GAAS 23 UP SiH4 for furnaces up A on line 460 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Jan 24 06:30:25 2007 From: tberg at stanford.edu (Ted Berg) Date: Wed, 24 Jan 2007 06:30:25 -0800 Subject: Diffusion Morning Report 01/24/07 Message-ID: <45B76D81.5090605@stanford.edu> Good Morning All, Looking good this morning. ASM is officially up. Changing HCL this morning. AMAT epi pump out for repair, hopefully back today or tomorrow. LTO is back up. Poly is coming back up after scheduled pull and clean. Beam is almost found for ebeam. TEL holding. No other issues at this time. Date: 1/24/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 11.82/30 Tylan 8-SiGe up 11.25/30 Tylan 9-Poly down pull and clean 0/30 Tylan 10-Nitride up 6.59/30 Tylan 11-BPSG-LTO up 3.2/30 Tylan 12-FGA up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride up Epi up AMAT Epi down pump out for repair Burn Box up ZYGO Up Ebeam down looking for beam GAAS 22 up GAAS 23 UP SiH4 for furnaces up A on line 440 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Jan 25 06:45:09 2007 From: tberg at stanford.edu (Ted Berg) Date: Thu, 25 Jan 2007 06:45:09 -0800 Subject: Diffusion Morning Report 01/25/07 Message-ID: <45B8C275.3010303@stanford.edu> Good Morning All, A few issues this morning. LTO failed leak check a couple of times-looking into it. AMAT epi pump is going to be out until Monday for repair. ASM Epi had no GeH4 flow -checking. Still no good beam on Ebeam. Hitachi sem has holder issues. I think thats all for now. Date: 1/25/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 11.82/30 Tylan 8-SiGe up 11.25/30 Tylan 9-Poly up pull and clean completed .25/30 Tylan 10-Nitride up 8.59/30 Tylan 11-BPSG-LTO yellow possible high leak rate 5.8/30 Tylan 12-FGA up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride up Epi yellow no geh4 flow AMAT Epi down pump out for repair Burn Box up ZYGO Up Ebeam down looking for beam GAAS 22 up GAAS 23 UP SiH4 for furnaces up A on line 440 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Fri Jan 26 07:25:42 2007 From: rseymour at stanford.edu (Ray Seymour) Date: Fri, 26 Jan 2007 07:25:42 -0800 Subject: Diffusion Morning report Message-ID: <45BA1D76.5050309@stanford.edu> Good Morning All, Ted is out today. ASM EPI has GEH4 and Dichlor problems. The Dichlor should be in today I will check againon when Praxair opens. All else is looking pretty good Date: 1/25/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up * * * * * * Tylan 7-TEOS2 up * * *11.82/30* * * Tylan 8-SiGe up * * *11.25/30* * * Tylan 9-Poly up *pull and clean completed* *.75/30* * * Tylan 10-Nitride up * * *8.59/30* * * Tylan 11-BPSG-LTO yellow *possible high leak rate* *5.95/30* * * Tylan 12-FGA up * * * * * * * * * * * * Thermco 1 Up * * * * * * Thermco 2 Up * * * * * * Thermco Poly Up * * * * * * Thermco Nitride up * * * * * * Epi yellow *no geh4 flow* * * * * AMAT Epi down *pump out for repair* * * * * Burn Box up *cleaned this morning * * * * * ZYGO Up * * * * * * Ebeam down *looking for beam* * * * * GAAS 22 up * * * * * * GAAS 23 UP * * * * * * SiH4 for furnaces up * * * * * * *A on line 430 psi* * changeover working well * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Mon Jan 29 06:30:42 2007 From: nanotech at nsti.org (Cleantech 2007) Date: Mon, 29 Jan 2007 06:30:42 -0800 Subject: Final Call for Participation - Cleantech 2007 Message-ID: Cleantech 2007 May 23-24 2007 Santa Clara, California Submissions Due: February 2, 2007 http://www.Cleantech2007.org/ Cleantech 2007 brings together global research and development scientists and engineers, investors, government officials and business leaders implementing clean technologies in their companies. The cleantech industry encompasses a wide range of products and services, from alternative energy generation to wastewater treatment to more resource-efficient industrial processes. Join your peers for this unique opportunity to learn the latest developments and trends. See how others are using new, innovative technology to create products and services that can compete on both price and performance while reducing humankind's impact on the environment. Submissions Due: February 2, 2007 - Submit Abstract - Submit Business & Policy Presentation - Submit Venture - Submit IP http://www.Cleantech2007.org/ --- You are currently subscribed to nanotech as: diffusion at snf.stanford.edu To unsubscribe send a blank email to leave-nanotech-6754768W at spirit.sparklist.com -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Mon Jan 29 07:32:50 2007 From: rseymour at stanford.edu (Ray Seymour) Date: Mon, 29 Jan 2007 07:32:50 -0800 Subject: Diffusion mMorning Report Message-ID: <45BE13A2.9070708@stanford.edu> Morning All, Ted is out today. Epi has Germane issues, but Dichlor is up. All else looking good this morning. Date: 1/29/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up * * * * * * Tylan 7-TEOS2 up * * *11.82/30* * * Tylan 8-SiGe up * * *11.59/30* * * Tylan 9-Poly up *pull and clean completed* *.92/30* * * Tylan 10-Nitride up * * *8.59/30* * * Tylan 11-BPSG-LTO yellow *possible high leak rate* *6.39/30* * * Tylan 12-FGA up * * * * * * * * * * * * Thermco 1 Up * * * * * * Thermco 2 Up * * * * * * Thermco Poly Up * * * * * * Thermco Nitride up * * * * * * Epi yellow *no geh4 flow* * * * * AMAT Epi down *pump out for repair* * * * * Burn Box up * * * * * * ZYGO Up * * * * * * Ebeam down *looking for beam* * * * * GAAS 22 up * * * * * * GAAS 23 UP * * * * * * SiH4 for furnaces up * * * * * * *A on line 410 psi* * changeover working well * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From taojiaqi Tue Jan 30 18:31:52 2007 From: taojiaqi (taojiaqi) Date: Tue, 30 Jan 07 18:31:52 中国标准时间 Subject: Indecent unshamed DuPont Refused Payment! Message-ID: Indecent unshamed DuPont Refused Payment! A Public Letter to All World Honorable Ladies and Gentlemen: After Du Pont Chemical Company of United States pessessed an effective and innoxious agricultural pesicide technology of Mr. Huang during 1995 and 1998, it constantly refused to pay Mr. Huang for patent fee and license fee (or total compensation fee) according to Du Pont's active committment in Article 5 of 1995 Protocol. This is called refusing to pay after getting goods, then whether they will not provide goods after receiving money? Or providing fake goods or defected goods? Who will be the next victim? And when? How much will the pillaged possessions be (surely it will not be a small figure)? Who can guarantee? Therefore, Mr. Huang appealed to honorable ladies, gentlemen, presidents, technical experts and all exalted gentlemen to raise your guard for Holliday and U.S. Du Pont from pillaging your gorgeous wealth. Although you are capable enough of crashing their conspiracy of refusing paying their bill, you don't have to waste your precious energy, time and money. Try your best to keep away from them and never or seldom conduct various transactions with them! Please tell your relatives, friends and colleagues to check whether they were trapped by Du Pont and Holliday. If so, please ask them for compensation as soon as possible. Otherwise, if the time limit of law expires, it can be considered as automatic abstention. Best Wishes Universal Agent: SXF (If you consider it is a junk mail, please send inquiries to the Email address below. This is not a junk mail because Du Pont does not dare deny the facts I provided above. Du Pont China: info.china at chn.dupont.com, Du Pont Headquarters: info at dupont.com) IMPUDENT, SCOUNDREL, DuPont of USA and Holliday! Who has humiliated he?she and it?IMPUDENT DuPont of USA and Holliday! ?????????????????????????! 1. Dare Du Pont and its CEO Holliday deny this publicly? They absolutely dared not, as what I said is all truth. 2. If everyone can tramp down on law and publicly provoke the civilization of the world, like Du Pon and its CEO Holliday have done, what the world will be? Logic here is simple, As Du Pont and its CEO Holliday can tramp down on the "Contract Law" and seize the patent of the others as its own before the eyes of the public of the world, why other people cannot kill and loot in defiance of the Criminal Law and be encouraged? 3. Due to the stipulations concerning secrecy in the "Biological Evaluation Agreement", please forgive us that I and Mr. Huang cannot make public our true names. But Du Pont and its CEO Holliday absolutely know our true names. IMPUDENT, SCOUNDREL, DuPont of the United States!??????????????! IMPUDENT, SCOUNDREL, CEO of DuPont Holliday ! DuPont Co. and its CEO Holliday are transnational scoundrel! Without open objection, DuPont is openly admitting itself to be a transnational scoundrel! We firmly believe that the United State is not a country that shields and connives at rascals and the American government is not a government that shields and connives at rascals! We request the American government actions to intensify the law enforcement strength to protect intellectual property rights,force transnational scoundrel DuPont to carry out it's voluntarily promised obligations in the agreement. ************************************************************************************************* Hello, my respectable President Mr. Bush: The fact that DuPont declined to fulfill the agreement has been presented to you for several times via president at whitehouse.gov; As a result, president at whitehouse.gov sent back three letters containing the following same contents on the behalf of Mr. President in Sep 2004:"Thank you for e-mailing President Bush. Your ideas and comments are very important to him." My "ideas and comments" are as follows: it is verified by Mr. Huang with adequate facts and irrefutable legal evidences that DuPont must disburse Mr. Huang patent fee, license fee or equivalent "Utter Compensation" fee and DuPont's persistent refusal to disburse these fees infringes upon the intellectual property rights of Mr. Huang. president at whitehouse.gov mentioned "are very important to him." I don't dare to unduly surmise the meaning of "very important" to Mr. President; However, according to my humble opinions, there exits the following "important": on the one hand, respectable Mr. President, the American Government led by Mr. President as well as the great American people bitterly hate the predation of the intellectual property rights of others through brazen means such as stealing, shameless acts; in contrast, DuPont is committing such brazen and shameless deals; on the other hand, the number of your country's intellectual property rights in a variety of fields is far in excess of that of any nations in the world and suffers greatly from rights infringement. Therefore, your government always reserves no efforts in urging other nations to intensify the law enforcement strength to protect your country's intellectual property rights. However, while your government reserves no efforts in urging the Chinese government to intensify the law enforcement strength to protect your country's intellectual property rights and receives your "more encouraged" praise, DuPont is infringing the intellectual property rights of Mr. Huang through various extremely brazen and shameless means, which constitutes an extremely bad signal to the governments and public of other nations in the world, a extremely "good" model for current and potential thieves of intellectual property rights, an enormous damage to your government protection of your country's intellectual property rights, and a tremendous humiliation to your country's lofty status in the world. For the sake of the glory of the great American people and the reputation of a legion of American corporations, in order to safeguard your country's lofty status in the world and protect the intellectual property rights of your country and other nations in the world, we humbly request you and your government to prevent DuPont's such extremely brazen infringement and even seizure behaviors, and force DuPont to carry out it's voluntarily promised obligations in the agreement. We firmly believe that the United State is not a country that shields and connives at rascals and the American government is not a government that shields and connives at rascals; Under the instruction of our respectable Mr. President and the Americangovernment, the rascal of DuPont shall be aware of shame and be able to turn into a normal corporation by giving up shameless behaviors. Due to the adequate evidences, the clear-cut rights and obligations of both parties of DuPont and Mr. Huang, and simple legal relations, the infringement of the intellectual property rights of Mr. Huang by DuPont can be absolutely prevented and DuPont will surely disburse Mr. Huang patent fee, license fee or equivalent "Utter Compensation" fee as long as your government intensifies the law enforcement strength to protect intellectual property rights as well. With best regards! Annex: Heartfelt thanks for your reading my E-mail and your mail of attention to this matter. I would like to make some replenishment concerning the matter, for you to judge and decide. I Abstract 1. At the request of Du Pont, Mr. Huang has for 10 times submitted written technical materials to Du Pont from April 1993 to 1994, for expert group of Du Pont to conduct feasibility analysis. 2. On February 22, 1995, Dr Robert F Sklar, Technology Transfer Licensing Manager of DuPont arrived in Shanghai in China, to "sign many agreements" with Mr. Huang. Mr. Huang insisted DuPont examines samples first before signs any agreement. However, as samples were still in the process of purification at the time, no agreements were signed then. 3. On March 28, 1995, Mr. Huang sent the first batch of samples to Du Pont by post. 4. On September 7, 1995, Mr. Huang received "Biological Evaluation Agreement" (1995 Agreement) sent by Du Pont, requiring Mr. Huang to sign this agreement and again provide samples. Mr. Huang signed the agreement and sent second batch of samples as requested by DuPont. DuPont admit in Article 5 of the "1995 Agreement" that Mr. Huang will be entitled to claim patent and licensing fees. DuPont states in Article 8 of the "1995 Agreement" that Mr. Huang may not cooperate with any universities or enterprises in any form before and after signing of this agreement (for this reason, Mr. Huang has refused cooperation request of several companies). 5. On September 10, 1998, DuPont sent a letter to Mr. Huang, asking for third batch of samples. 6. In 1999, DuPont carried out a month-long insecticide screening on the third batch of samples (in fact, it has carried out weeds killing test and mould killing test in the meantime), and required to keep all these tests a secret. 7. On June 8, 2000, DuPont sent a letter saying it was not interested in samples provided by Mr. Huang, and refused to pay Mr. Huang patent and licensing fees. 8.The mail signed by DuPont on June 2th, 2005, threaten Mr.Huang ,and prevent Mr.Huang send the E-mail. Seek response from E-mail: info at dupont.com http://www1.dupont.com/NASApp/dupontglobal/corp/contactEmail.jsp info.china at chn.dupont.com ????,????! ????,????!?????????!!! ????,?????????!?????????????! ???????????? ????????????????? ??????????????! ?????????1995??1998?????**????????????????????????????????????????1995?????5???????????**??????????"????"??? ???????????????????????????????????????????????? ??????????????????????????**???????????????????? ?????????????????????????????????????Holliday???????????????????????????????????????????????????????????????????????????????!????????????????????????????? ?????????Holliday???????????????????????????????????"??"??????????? ??????! ??????SXF (??E-mail?????????????????????Email?????????????????????????????????? ???? info.china at chn.dupont.com , ????Contact Us:info at dupont.com http://www1.dupont.com/NASApp/dupontglobal/corp/contactEmail.jsp) ?? ??????! 2007.01.12. ????????????????? ??????????????!! ?????????????????????????! ??????????! ???????????????! ?????????????????????! ??????????,???????????????????????! 1 ????????Holliday?????????????????????????? 2 ??????????????Holliday????????????????????????????????????????? ?????????????????Holliday??????????????????????????????????????????????????????????????????????????????? 3 ???"1995???"?????????????????????????????????????Holliday????????????????? SXF 2006.07.01. ????????????????????????????????????????? ???????????????????????????????????????? ************************************************************************************************* ????????????? ?????????????????president at whitehouse.gov?????president at whitehouse.gov?? 2004?9?????????????????????"Thank you for e-mailing President Bush. Your ideas and comments are very important to him."??"ideas and comments"???????????????????????????????????????????????"????"??????????????????????????president at whitehouse.gov?"are very important to him." "very important"????????????????????????????"important" ? 1.????????????????????????????????????????????????????????????????????????? 2.????????????????????????????????????????????????????????????????????????????????????????????????????????????????"????"????????????????????????? ????????????????????????????????????????????????"?"????????????????????????????????????????????????? ???????????????????????????????????????????????? ???????????????????????????????????????????????? ????????? ???????????????????????????????????????????????? ????????????????????????????????????????????? ???????????????????????????????????????????????? ??????????????????????????????????????????????????????????"????"??? ?? ??????? ?????? SXF 2005.09.17.23?59 ?? 1. ?1993?4???1994??????????????????10???????????????? ?????? 2. 1995?2?22?????????????Sklar?? ?E.I.DU PONT DE NEMOURS AND COMPANY Robert F. Sklar Ph. D. Manager,Technology Transfer Licensing)???????????"??????"???????????????????????????????????????? 3 1995?3?28???????????????? 4. 1995?9?7????????????BIOLOGICAL EVALUATION AGREEMENT?1995???)?????????????????????????????????????????????????1995?????5??????????????????????????????????1995?????8?????????????????????????????????????????? ???? 5. 1998?9?10?????????????????? 6 1999????????????????Insecticide Screening??????????????????????????????????????? 7. 2000?6?8?????????????????,????????????????? 8.2005.06.02. ???????????????-??????????E-mail? 9.???2005?10?????????????????????????????????????????????????????????????E-mail???????????????"?????????????"??????????????? -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Jan 30 06:43:06 2007 From: tberg at stanford.edu (Ted Berg) Date: Tue, 30 Jan 2007 06:43:06 -0800 Subject: Diffusion Morning Report 01/30/07 Message-ID: <45BF597A.7060306@stanford.edu> Good Morning All, Looking Good this morning. AMAT epis pump is back will install this morning. MFC for ASM epi is ordered. Paul J is still working on the ebeam scenario. No other issues at this time. Date: 1/30/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 11.82/30 Tylan 8-SiGe up 11.54/30 Tylan 9-Poly up 1.22/30 Tylan 10-Nitride up 8.59/30 Tylan 11-BPSG-LTO up 9.42/30 Tylan 12-FGA up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride up Epi yellow no geh4 flow AMAT Epi down pump is back will install Burn Box up ZYGO Up Ebeam down looking for beam GAAS 22 up GAAS 23 UP SiH4 for furnaces up A on line 440 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Jan 31 06:31:36 2007 From: tberg at stanford.edu (Ted Berg) Date: Wed, 31 Jan 2007 06:31:36 -0800 Subject: Diffusion Morning Report 01/31/07 Message-ID: <45C0A848.7050309@stanford.edu> Good Morning All, Looking good this morning. ASM epi is up, AMAT pump is reinstalled-still a small issue with N2 fault-checking. Ebeam is very close. No other issues at this time. Date: 1/31/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 11.82/30 Tylan 8-SiGe up 11.54/30 Tylan 9-Poly up 1.22/30 Tylan 10-Nitride up 8.59/30 Tylan 11-BPSG-LTO up 9.52/30 Tylan 12-FGA up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride up Epi up AMAT Epi yel N2 Alarm Burn Box up ZYGO Up Ebeam down looking for beam GAAS 22 up GAAS 23 UP SiH4 for furnaces up A on line 440 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Wed Jan 31 10:05:59 2007 From: nanotech at nsti.org (Nano World News) Date: Wed, 31 Jan 2007 10:05:59 -0800 Subject: Nano World News January 2007 Message-ID: ******************************************************* *Note: If you are having trouble viewing this message,* *copy and paste the link below into your browser * *address field and hit the Enter button on your * *keyboard. * http://www.nsti.org/news/ *If you would like to unsubscribe, copy the URL below:* http://www.nsti.org/outreach/unsubscribe.html ******************************************************* --- You are currently subscribed to nanotech as: diffusion at snf.stanford.edu To unsubscribe send a blank email to leave-nanotech-6754768W at spirit.sparklist.com -------------- next part -------------- An HTML attachment was scrubbed... URL: