From tberg at stanford.edu Thu Mar 1 06:44:22 2007 From: tberg at stanford.edu (Ted Berg) Date: Thu, 01 Mar 2007 06:44:22 -0800 Subject: Diffusion Morning Report 03/01/07 Message-ID: <45E6E6C6.4000409@stanford.edu> Good morning All, Looking good this morning. Tylans2 and 3 down for temp control issues-looking into it. Ebeam PM begins this afternoon and continues for 2 weeks. Waiting for quotes on mechanicals for TEL. No other issues at this time. Diffusion Date: 3/1/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 up Tylan 2 down temp issues Tylan 3 down temp issues Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 15.36/30 Tylan 8-SiGe up 12.23/30 Tylan 9-Poly up 6.39/30 Tylan 10-Nitride up 15.51/30 Tylan 11-BPSG-LTO up 1.63/30 Tylan 12-FGA up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride up Epi up AMAT Epi up Burn Box up ZYGO Up Ebeam up GAAS 22 up GAAS 23 UP SiH4 for furnaces up A on line 240 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Mar 2 06:45:04 2007 From: tberg at stanford.edu (Ted Berg) Date: Fri, 02 Mar 2007 06:45:04 -0800 Subject: dIFFUSION mORNING rEPORT 03/02/07 Message-ID: <45E83870.40701@stanford.edu> Good Morning All, Looking good this morning. Tylan2 tube change checking temp, Tylan 3 temp looks OK needs test. ASM epi has possible H2 flow issues. TEOS2 had flow issues. Ebeam is down for PM. No other issues at this time. Diffusion Date: 3/2/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 up Tylan 2 down temp issues Tylan 3 down temp issues Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 down Flow issues 15.36/30 Tylan 8-SiGe up 12.23/30 Tylan 9-Poly up 6.51/30 Tylan 10-Nitride up 15.51/30 Tylan 11-BPSG-LTO up 4.31/30 Tylan 12-FGA up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride up Epi up AMAT Epi up Burn Box up cleaning this morning ZYGO Up Ebeam down PM GAAS 22 up GAAS 23 UP SiH4 for furnaces up A on line 230 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Mar 5 07:32:39 2007 From: tberg at stanford.edu (Ted Berg) Date: Mon, 05 Mar 2007 07:32:39 -0800 Subject: Diffusion Morning Report 03/05/07 Message-ID: <45EC3817.5030409@stanford.edu> Good morning All, Looking Fair this morning. Tylan2 and 3 still down for temp issues. ASM Epi is down for blower not sensed-checking. LTO has a broken Cantilever sheath. Ebeam PM underway. Hitachi sem has HV issues. No other issues at this time. Diffusion Date: 3/5/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 up Tylan 2 down temp issues Tylan 3 down temp issues Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow Flow issues 15.36/30 Tylan 8-SiGe up 12.23/30 Tylan 9-Poly up 6.65/30 Tylan 10-Nitride up 16.89/30 Tylan 11-BPSG-LTO down Broken Cantilever sheath 9.8/30 Tylan 12-FGA up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride up Epi down Blower not sensed AMAT Epi up Burn Box up ZYGO Up Ebeam down PM GAAS 22 up GAAS 23 UP SiH4 for furnaces up A on line 230 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From bd at grady.uga.edu Mon Mar 5 13:08:20 2007 From: bd at grady.uga.edu (Strait L. Scholarships) Date: Mon, 05 Mar 2007 21:08:20 +0000 Subject: Message-ID: <8718915987.20070305210820@grady.uga.edu> -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Lipton.gif Type: image/gif Size: 3260 bytes Desc: not available URL: From tberg at stanford.edu Tue Mar 6 08:05:00 2007 From: tberg at stanford.edu (Ted Berg) Date: Tue, 06 Mar 2007 08:05:00 -0800 Subject: Diffusion Morning REport 03/06/07 Message-ID: <45ED912C.5010007@stanford.edu> Good Morning All, Looking good this morning. Switched HCL to other cylinder-pump down OK. SEM hitachi worked fine for me. Tylans 2 and 3 still down for temp issues Ebeam PM moving along. No other issues at this time. Diffusion Date: 3/6/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 up Tylan 2 down temp issues Tylan 3 down temp issues Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 16.26/30 Tylan 8-SiGe up 12.23/30 Tylan 9-Poly up 6.65/30 Tylan 10-Nitride up 17.9/30 Tylan 11-BPSG-LTO up 11.31/30 Tylan 12-FGA up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride up Epi up AMAT Epi up Burn Box up ZYGO Up Ebeam down PM GAAS 22 up GAAS 23 UP SiH4 for furnaces up A on line 200 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Tue Mar 6 08:14:14 2007 From: nanotech at nsti.org (Nanotech 2007) Date: Tue, 6 Mar 2007 08:14:14 -0800 Subject: Premiere Venture & Partnering Forum: Submission deadline approaching Message-ID: 2007 NSTI Nanotech Ventures May 22-23, 2007 Santa Clara Convention Center Silicon Valley, California, U.S.A. Run jointly with the 10th Nanotech Conference and Trade Show http://www.nsti.org/NanotechVentures2007 Connecting the World?s Top Nanotech Ventures with the World?s Investment and Industry Leaders Venture Company Executives - Are You: ? Looking for Investment Funding? ? Looking for Corporate Partners? ? Looking for Corporate Licensing? ? NSTI Nanotech Ventures - Matching technology solutions with industry needs Submit your Venture Company today for presentation review by the NSTI Nanotech Review Committee: http://www.nsti.org/NanotechVentures2007 Submissions due: March 10, 2007 --- You are currently subscribed to nanotech as: diffusion at snf.stanford.edu To unsubscribe send a blank email to leave-nanotech-6754768W at spirit.sparklist.com -------------- next part -------------- An HTML attachment was scrubbed... URL: From infos at gohardrock.us Tue Mar 6 21:56:13 2007 From: infos at gohardrock.us (Uplifts Q. Godunov) Date: Wed, 07 Mar 2007 05:56:13 +0000 Subject: Message-ID: <9223929343.20070307055613@gohardrock.us> -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: conspiracies.gif Type: image/gif Size: 3260 bytes Desc: not available URL: From tberg at stanford.edu Wed Mar 7 07:21:08 2007 From: tberg at stanford.edu (Ted Berg) Date: Wed, 07 Mar 2007 07:21:08 -0800 Subject: Diffusion Morning Report03/07/07 Message-ID: <45EED864.20205@stanford.edu> Good Morning All, Looking good this morning. Tylans 2 and 3 still down temp issues Ebeam PM still ongoing. No other issues at this time. Diffusion Date: 3/7/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 up Tylan 2 down temp issues Tylan 3 down temp issues Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 16.26/30 Tylan 8-SiGe up 12.23/30 Tylan 9-Poly up 6.75/30 Tylan 10-Nitride up 17.9/30 Tylan 11-BPSG-LTO up 11.36/30 Tylan 12-FGA up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride up Epi up AMAT Epi up Burn Box up ZYGO Up Ebeam down PM GAAS 22 up GAAS 23 UP SiH4 for furnaces up A on line 200 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From dnoelu at goldstarfinancial.com Wed Mar 7 13:13:04 2007 From: dnoelu at goldstarfinancial.com (Leftie T. Authenticates) Date: Wed, 07 Mar 2007 21:13:04 +0000 Subject: Message-ID: <3356868358.20070307211304@goldstarfinancial.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: pianissimi.gif Type: image/gif Size: 3260 bytes Desc: not available URL: From tberg at stanford.edu Thu Mar 8 07:21:30 2007 From: tberg at stanford.edu (Ted Berg) Date: Thu, 08 Mar 2007 07:21:30 -0800 Subject: Diffusion Morning Report 03/08/07 Message-ID: <45F029FA.9090000@stanford.edu> Good Morning All, Looking good this morning. Temp cal completed on Tylan2 running test cycle wet1000 will need test, Tylan3 low dep rate.. Both Epis up. Ebeam PM in Progress. No other issues at this time. Diffusion Date: 3/8/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 up Tylan 2 down testing Tylan 3 down temp issues Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 16.26/30 Tylan 8-SiGe up 12.23/30 Tylan 9-Poly up 6.75/30 Tylan 10-Nitride up 17.9/30 Tylan 11-BPSG-LTO up 11.36/30 Tylan 12-FGA up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride up Epi up AMAT Epi up Burn Box up ZYGO Up Ebeam down PM GAAS 22 up GAAS 23 UP SiH4 for furnaces up A on line 180 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Mar 9 06:35:21 2007 From: tberg at stanford.edu (Ted Berg) Date: Fri, 09 Mar 2007 06:35:21 -0800 Subject: Diffusion Morning Report 03/09/07 Message-ID: <45F170A9.9080400@stanford.edu> Good Morning All, Looking OK this morning. Making some progress on temp issues on Tylans.AMAT epi has mapping issues. Ebeam pm in progress. POLY and LTO took a long time to vent. No other issues at this time. Diffusion Date: 3/9/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 yellow gas flow issue Tylan 2 up Tylan 3 down temp issues Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 16.96/30 Tylan 8-SiGe up 13.21/30 Tylan 9-Poly yellow long vent 7.85/30 Tylan 10-Nitride up 18.37/30 Tylan 11-BPSG-LTO yellow long vent 11.79/30 Tylan 12-FGA up Thermco 1 Up Thermco 2 Up Thermco Poly Up Thermco Nitride up Epi up AMAT Epi down wafer mapping Burn Box up ZYGO Up Ebeam down PM GAAS 22 up GAAS 23 UP SiH4 for furnaces up A on line 180 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Fri Mar 9 06:06:56 2007 From: nanotech at nsti.org (Nanotech 2007) Date: Fri, 9 Mar 2007 06:06:56 -0800 Subject: Final Call for Ventures & Corporate Partnering Message-ID: 2007 NSTI Nanotech Ventures May 22-23, 2007 Santa Clara Convention Center Silicon Valley, California, U.S.A. Run jointly with the 10th Nanotech Conference and Trade Show http://www.nsti.org/NanotechVentures2007 Submissions due: March 10, 2007 Connecting the World?s Top Nanotech Ventures with the World?s Investment and Industry Leaders Venture Company Executives - Are You: ? Looking for Investment Funding? ? Looking for Corporate Partners? ? Looking for Corporate Licensing? ? NSTI Nanotech Ventures - Matching technology solutions with industry needs Submit your Venture Company today for presentation review by the NSTI Nanotech Review Committee: http://www.nsti.org/NanotechVentures2007 Submissions due: March 10, 2007 --- You are currently subscribed to nanotech as: diffusion at snf.stanford.edu To unsubscribe send a blank email to leave-nanotech-6754768W at spirit.sparklist.com -------------- next part -------------- An HTML attachment was scrubbed... URL: From extremecom at gp-g84029.nhs.uk Fri Mar 9 08:30:10 2007 From: extremecom at gp-g84029.nhs.uk (Coast T. Thriving) Date: Fri, 09 Mar 2007 16:30:10 +0000 Subject: Message-ID: <8598794538.20070309163010@gp-g84029.nhs.uk> -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: guava.gif Type: image/gif Size: 3260 bytes Desc: not available URL: From sanjay at gotenzing.com Sun Mar 11 11:27:33 2007 From: sanjay at gotenzing.com (Festival H. Brine) Date: Sun, 11 Mar 2007 18:27:33 +0000 Subject: Message-ID: <9998641895.20070311182733@gotenzing.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: headline.gif Type: image/gif Size: 3260 bytes Desc: not available URL: From ron.goldfeder at greenwood-intl.com Mon Mar 12 02:55:35 2007 From: ron.goldfeder at greenwood-intl.com (Clapboard I. Bilbo) Date: Mon, 12 Mar 2007 09:55:35 +0000 Subject: Message-ID: <9991947980.20070312095535@greenwood-intl.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: rapture.gif Type: image/gif Size: 3260 bytes Desc: not available URL: From tberg at stanford.edu Mon Mar 12 06:40:05 2007 From: tberg at stanford.edu (Ted Berg) Date: Mon, 12 Mar 2007 06:40:05 -0700 Subject: Diffusion morning report 03/12/07 Message-ID: <45F55835.4090705@stanford.edu> Good morning All, Looking OK this morning. Both Epis are down, ASM bad lamps and AMAT broken blade and lift pins. Tylan 1 is down for gas flow issues and Tylan3 has a thickness gradient. Ebeam is down for PM. Thermco 2 had an alarm during process. No other issues at this time. Diffusion Date: 3/12/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 yellow gas flow issue Tylan 2 up Tylan 3 down temp issues Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 16.96/30 Tylan 8-SiGe up 13.21/30 Tylan 9-Poly up 7.85/30 Tylan 10-Nitride up 18.37/30 Tylan 11-BPSG-LTO up 13.74/30 Tylan 12-FGA up Thermco 1 Up Thermco 2 yellow error during recipe Thermco Poly Up Thermco Nitride up Epi down bad lamps AMAT Epi down broken blade and lift pins Burn Box up ZYGO Up Ebeam down PM GAAS 22 up GAAS 23 UP SiH4 for furnaces up A on line 180 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From bgeelfceoiooigmhlhopaeepcaaa.cadams at glorry.com Mon Mar 12 15:20:25 2007 From: bgeelfceoiooigmhlhopaeepcaaa.cadams at glorry.com (Fretted K. Whopping) Date: Mon, 12 Mar 2007 22:20:25 +0000 Subject: Message-ID: <0166240231.20070312222025@glorry.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: pothooks.gif Type: image/gif Size: 3260 bytes Desc: not available URL: From tberg at stanford.edu Tue Mar 13 06:44:36 2007 From: tberg at stanford.edu (Ted Berg) Date: Tue, 13 Mar 2007 06:44:36 -0700 Subject: Diffusion Morning Report 03/13/07 Message-ID: <45F6AAC4.5040002@stanford.edu> Good Morning All, Looking OK this morning. AMAT epi-blades on order. Tylans 1 and 3 Need tests after repairs.TEOS caused high burn box pressure-checking it out. Looking into Thermco 2 recipe issue. Ebeam PM is winding down-stiching looks very good. No other issues at this time. Diffusion Date: 3/13/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 down needs test after repair Tylan 2 up Tylan 3 down temp issues Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 17.71/30 Tylan 8-SiGe up 13.21/30 Tylan 9-Poly up 7.85/30 Tylan 10-Nitride up 19.15/30 Tylan 11-BPSG-LTO up 16.54/30 Tylan 12-FGA up Thermco 1 Up Thermco 2 yellow error during recipe Thermco Poly Up Thermco Nitride up Epi up AMAT Epi down blade on order Burn Box up ZYGO Up Ebeam down PM GAAS 22 up GAAS 23 UP SiH4 for furnaces up A on line 150 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Mar 14 06:40:07 2007 From: tberg at stanford.edu (Ted Berg) Date: Wed, 14 Mar 2007 06:40:07 -0700 Subject: Diffusion Morning Report 03/14/07 Message-ID: <45F7FB37.6070506@stanford.edu> Good morning All, Looking OK this morning. Ebeam PM is almost completed-results discussion today. Tylan1 has gas flow issues, Tylan3 in temp cal. Blade for AMAT epi on order. Image capture for 4160 to be installed soon. Writing PO for TEL mechanical today. No other issues at this time. Diffusion Date: 3/14/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 down gas flow issues Tylan 2 up Tylan 3 down Temp cal Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 17.71/30 Tylan 8-SiGe up 13.21/30 Tylan 9-Poly up 7.87/30 Tylan 10-Nitride up 21.15/30 Tylan 11-BPSG-LTO up 16.54/30 Tylan 12-FGA up Thermco 1 Up Thermco 2 up Thermco Poly Up Thermco Nitride up Epi up AMAT Epi down blade on order Burn Box up ZYGO Up Ebeam yellow PM almost completed GAAS 22 up GAAS 23 UP SiH4 for furnaces up A on line 140 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Wed Mar 14 06:16:40 2007 From: nanotech at nsti.org (Nano World News) Date: Wed, 14 Mar 2007 06:16:40 -0700 Subject: Nano World News March 2007 Message-ID: ******************************************************* *Note: If you are having trouble viewing this message, *copy and paste the link below into your browser http://www.nsti.org/news/ ******************************************************* --- You are currently subscribed to nanotech as: diffusion at snf.stanford.edu To unsubscribe send a blank email to leave-nanotech-6754768W at spirit.sparklist.com -------------- next part -------------- An HTML attachment was scrubbed... URL: From myfernado at giftprogram.com Wed Mar 14 20:13:36 2007 From: myfernado at giftprogram.com (Niggard Q. Squired) Date: Thu, 15 Mar 2007 03:13:36 +0000 Subject: Message-ID: <4243391197.20070315031336@giftprogram.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Jasmine.gif Type: image/gif Size: 3260 bytes Desc: not available URL: From tberg at stanford.edu Thu Mar 15 06:30:26 2007 From: tberg at stanford.edu (Ted Berg) Date: Thu, 15 Mar 2007 06:30:26 -0700 Subject: Diffusion Morning Report 03/15/07 Message-ID: <45F94A72.7010802@stanford.edu> Good morning All, Looking good this morning. Ebeam PM is completed. Tylans 1 and 3 ready for tests. Still waiting for update on blade for AMAT Epi. No other issues at this time. Diffusion Date: 3/15/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 down gas flow issues Tylan 2 up Tylan 3 down Temp cal Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 17.71/30 Tylan 8-SiGe up 13.21/30 Tylan 9-Poly up 7.87/30 Tylan 10-Nitride up 21.25/30 Tylan 11-BPSG-LTO up 17.71/30 Tylan 12-FGA up Thermco 1 Up Thermco 2 up Thermco Poly Up Thermco Nitride up Epi up AMAT Epi down blade on order Burn Box up ZYGO Up Ebeam up PM completed GAAS 22 up GAAS 23 UP SiH4 for furnaces up A on line 140 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From la_aa at gourmetgranola.com Thu Mar 15 23:54:00 2007 From: la_aa at gourmetgranola.com (Isomorphic P. Pickier) Date: Fri, 16 Mar 2007 06:54:00 +0000 Subject: Message-ID: <8597265948.20070316065400@gourmetgranola.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: voluptuary.gif Type: image/gif Size: 3260 bytes Desc: not available URL: From tberg at stanford.edu Fri Mar 16 06:43:55 2007 From: tberg at stanford.edu (Ted Berg) Date: Fri, 16 Mar 2007 06:43:55 -0700 Subject: Diffusion Morning Report 03/16/07 Message-ID: <45FA9F1B.50108@stanford.edu> Good Morning All, Looking OK this morning. Still waiting for Epi Blade. Tylans 2 and 3 down for testing. Contract for TEL mechanical issued. PCI upgrade for 4160 should be here next week. Some parts ordered for vax upgrade to ebeam.. No other issues at this time. Diffusion Date: 3/16/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 up Tylan 2 down Waiting test Tylan 3 down thin dep Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 17.71/30 Tylan 8-SiGe up 13.21/30 Tylan 9-Poly up 11.87/30 Tylan 10-Nitride up 21.25/30 Tylan 11-BPSG-LTO up 17.71/30 Tylan 12-FGA up Thermco 1 Up Thermco 2 up Thermco Poly Up Thermco Nitride up Epi up AMAT Epi down blade on order Burn Box up ZYGO Up Ebeam up GAAS 22 up GAAS 23 UP SiH4 for furnaces up A on line 100 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Fri Mar 16 10:50:23 2007 From: nanotech at nsti.org (Nanotech 2007) Date: Fri, 16 Mar 2007 10:50:23 -0700 Subject: Vinod Khosla, Leading VC and Founding CEO of Sum Microsystems to keynote Message-ID: An HTML attachment was scrubbed... URL: From annie at gibnet.net Fri Mar 16 14:34:28 2007 From: annie at gibnet.net (Underachiever H. Transgress) Date: Fri, 16 Mar 2007 21:34:28 +0000 Subject: Message-ID: <8571006365.20070316213428@gibnet.net> -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: ditching.gif Type: image/gif Size: 3260 bytes Desc: not available URL: From istopherosullivan at greenstreet.us Sat Mar 17 06:29:26 2007 From: istopherosullivan at greenstreet.us (Jewelled H. Transposition) Date: Sat, 17 Mar 2007 13:29:26 +0000 Subject: Message-ID: <7550471373.20070317132926@greenstreet.us> -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Christopher.gif Type: image/gif Size: 3260 bytes Desc: not available URL: From tberg at stanford.edu Mon Mar 19 07:33:43 2007 From: tberg at stanford.edu (Ted Berg) Date: Mon, 19 Mar 2007 07:33:43 -0700 Subject: Diffusion Morning Report 03/19/07 Message-ID: <45FE9F47.3030101@stanford.edu> Good Morning All, Looking OK this morning. Still a few issues with Tylans 2 and 3. AMAT Epi still waiting for a blade. Ebeam had a few problems over the weekend. Need to schedule Install of Image capture on 4160. Most TEL POs written. Thermco nitride had DCS flow issues-looking into it. Diffusion Date: 3/19/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 up Tylan 2 down Waiting test Tylan 3 down thin dep Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 17.71/30 Tylan 8-SiGe up 13.21/30 Tylan 9-Poly up 12.0/30 Tylan 10-Nitride up 21.25/30 Tylan 11-BPSG-LTO up 18.21/30 Tylan 12-FGA up Thermco 1 Up Thermco 2 up Thermco Poly Up Thermco Nitride yellow DCS flow issues Epi up AMAT Epi down blade on order Burn Box up ZYGO Up Ebeam up had stage error-reset GAAS 22 up GAAS 23 UP SiH4 for furnaces up A on line 100 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From oconnell at gi-group.com Mon Mar 19 09:09:00 2007 From: oconnell at gi-group.com (Agassiz L. Extruded) Date: Mon, 19 Mar 2007 16:09:00 +0000 Subject: Message-ID: <3955889920.20070319160900@gi-group.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: slumbered.gif Type: image/gif Size: 3260 bytes Desc: not available URL: From tberg at stanford.edu Tue Mar 20 07:11:30 2007 From: tberg at stanford.edu (Ted Berg) Date: Tue, 20 Mar 2007 07:11:30 -0700 Subject: Diffusion Morning Report 03/20/07 Message-ID: <45FFEB92.7070104@stanford.edu> Good Morning All, Looking good this morning. Tylans 2 and 3 still down. AMAT epi waiting for blade. 4160 Image capture will be installed tomorrow morning. No other issues at this time. Diffusion Date: 3/20/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 up Tylan 2 down Waiting test Tylan 3 down thin dep Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 17.71/30 Tylan 8-SiGe up 13.21/30 Tylan 9-Poly up 12.0/30 Tylan 10-Nitride up 21.25/30 Tylan 11-BPSG-LTO up 19.71/30 Tylan 12-FGA up Thermco 1 Up Thermco 2 up Thermco Poly Up Thermco Nitride up Epi up AMAT Epi down blade on order Burn Box up ZYGO Up Ebeam up GAAS 22 up GAAS 23 UP SiH4 for furnaces up A on line 60 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Mar 21 07:23:46 2007 From: tberg at stanford.edu (Ted Berg) Date: Wed, 21 Mar 2007 07:23:46 -0700 Subject: diffusion Morning Report 03/21/07 Message-ID: <46013FF2.5070909@stanford.edu> Good Morning All, Looking good this morning. AMAT epi blade is on order. Tylan2 need test Tylan 3 still investigating. Thermco poly boats being cleaned. Image capture for sem4160 will be installed today. Looking into Thermco nitride flow issues. No other problems at this time. Diffusion Date: 3/21/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 up Tylan 2 down Waiting test Tylan 3 down thin dep Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 17.71/30 Tylan 8-SiGe up 13.21/30 Tylan 9-Poly up 12.0/30 Tylan 10-Nitride up 21.25/30 Tylan 11-BPSG-LTO up 19.71/30 Tylan 12-FGA up Thermco 1 Up Thermco 2 up Thermco Poly Up need boat clean Thermco Nitride yellow flow issues Epi up AMAT Epi down blade on order Burn Box up ZYGO Up Ebeam up GAAS 22 up GAAS 23 UP SiH4 for furnaces up A on line 60 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From cs at grayplantations.com.au Wed Mar 21 17:10:11 2007 From: cs at grayplantations.com.au (Ash D. Sexist) Date: Thu, 22 Mar 2007 00:10:11 +0000 Subject: Message-ID: <9813716545.20070322001011@grayplantations.com.au> -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: cashier.gif Type: image/gif Size: 3260 bytes Desc: not available URL: From tberg at stanford.edu Thu Mar 22 06:40:15 2007 From: tberg at stanford.edu (Ted Berg) Date: Thu, 22 Mar 2007 06:40:15 -0700 Subject: Diffusion Morning Report 03/22/07 Message-ID: <4602873F.8030308@stanford.edu> Good Morning All, Looking good this morning. Waiting for AMAT FS to replaced blade and check out handling on epi2. Waiting test results on Tylan2 need dry test on Tylan3. Looking into Thermco Nitride issues. Image capture installed on 4160 still tweeking a bit. No other issues at this time. Diffusion Date: 3/21/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 up Tylan 2 down Waiting test results Tylan 3 down thin dep Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 17.71/30 Tylan 8-SiGe up 13.21/30 Tylan 9-Poly up 12.0/30 Tylan 10-Nitride up 21.25/30 Tylan 11-BPSG-LTO up 23.49/30 Tylan 12-FGA up Thermco 1 Up Thermco 2 up Thermco Poly Up Thermco Nitride down lost program Epi up AMAT Epi down blade needs to be installed-FS Burn Box up ZYGO Up Ebeam up GAAS 22 up GAAS 23 UP SiH4 for furnaces up B on line 620 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Thu Mar 22 12:17:25 2007 From: nanotech at nsti.org (Nanotech 2007) Date: Thu, 22 Mar 2007 12:17:25 -0700 Subject: Invitation to Participate in Complementary Showcase Exhibition of Nanotech Centers, Initiatives and Innovations Message-ID: The Global Showcase of Nanotech Centers Initiatives and Innovations is Celebrating 10 Years in Nanotechnology Innovation and Business - You are Invited to Exhibit (free) On Wednesday, May 23, NSTI will hold a gala reception and Showcase to celebrate 10 Years in Nanotechnology. This reception will be attended by all business and technology conference attendees, providing a unique 10-year benchmark of research, technology and commercialization of nanotechnology around the globe. Nanotech 2007 encourages companies, organization and research centers, regional nanotech or related economic initiatives, funders and technology licensing offices to participate. Selected organizations will be granted a tabletop and poster-stand at the Nanotech 2007 Networking Reception to showcase their organization project or products. Each participating organization must have at least one (1) registered conference attendee to attend their exhibit. Important Dates * Submission deadline: March 29th, 2007 * Notification date: March 30th, 2007 * On-site showcase: May 23rd, 2007 To submit: http://www.nsti.org/Nanotech2007/Development/showcase.html --- You are currently subscribed to nanotech as: diffusion at snf.stanford.edu To unsubscribe send a blank email to leave-nanotech-6754768W at spirit.sparklist.com -------------- next part -------------- An HTML attachment was scrubbed... URL: From letsplysum at goodshow.com Thu Mar 22 19:05:24 2007 From: letsplysum at goodshow.com (Ransomed F. Dictations) Date: Fri, 23 Mar 2007 02:05:24 +0000 Subject: Message-ID: <9194032239.20070323020524@goodshow.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: extinguish.gif Type: image/gif Size: 3260 bytes Desc: not available URL: From sharpe at globaltradingservices.com Fri Mar 23 08:17:28 2007 From: sharpe at globaltradingservices.com (Crosby H. Masquerade) Date: Fri, 23 Mar 2007 15:17:28 +0000 Subject: Message-ID: <9670728860.20070323151728@globaltradingservices.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: cuddling.gif Type: image/gif Size: 3260 bytes Desc: not available URL: From rseymour at stanford.edu Fri Mar 23 09:02:40 2007 From: rseymour at stanford.edu (Ray Seymour) Date: Fri, 23 Mar 2007 09:02:40 -0700 Subject: Diffusion Morning Report Message-ID: <4603FA20.50706@stanford.edu> Good Morning All, Well it is Friday. Ted is out today.Tylan 3 dry test was on target yesterday. I will look into Hydrogen and Oxygen through the MFS460.monoblock. No other issues that I am aware of at this time. Diffusion Date: 3/23/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 up * * * * * * Tylan 2 down *Waiting test results* * * * * Tylan 3 down *thin wet dep* * * * * Tylan 4 up * * * * * * Tylan 5-BBr3 up * * * * * * Tylan 6-POCl3 up * * * * * * Tylan 7-TEOS2 up * * *17.71/30* * * Tylan 8-SiGe up * * *13.75/30* * * Tylan 9-Poly up * * *12.0/30* * * Tylan 10-Nitride up * * *21.27/30* * * Tylan 11-BPSG-LTO up * * *2/30* * * Tylan 12-FGA up * * * * * * * * * * * * Thermco 1 Up * * * * * * Thermco 2 up * * * * * * Thermco Poly Up * * * * * * Thermco Nitride down *lost program* * * * * Epi up * * * * * * AMAT Epi down *blade needs to be installed-FS* * * * * Burn Box up * Cleaned this morning * * * * * ZYGO Up * * * * * * Ebeam up * * * * * * GAAS 22 up * * * * * * GAAS 23 UP * * * * * * SiH4 for furnaces up * * * * * * *B on line 620 psi* * changeover working well * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From bev at gjkzjejdp.dealofalifetime.net Sat Mar 24 11:56:50 2007 From: bev at gjkzjejdp.dealofalifetime.net (Lagrange C. Juicing) Date: Sat, 24 Mar 2007 18:56:50 +0000 Subject: Message-ID: <8842268963.20070324185650@gjkzjejdp.dealofalifetime.net> -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: stoke.gif Type: image/gif Size: 3260 bytes Desc: not available URL: From bnjo at gnholdings.com Sun Mar 25 13:53:22 2007 From: bnjo at gnholdings.com (Miscast Q. Ink) Date: Sun, 25 Mar 2007 20:53:22 +0000 Subject: Message-ID: <3169840653.20070325205322@gnholdings.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: squids.gif Type: image/gif Size: 3260 bytes Desc: not available URL: From stekoz at gileagles.com Mon Mar 26 02:49:33 2007 From: stekoz at gileagles.com (Grace R. Disgruntled) Date: Mon, 26 Mar 2007 09:49:33 +0000 Subject: Message-ID: <0375529745.20070326094933@gileagles.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: bitches.gif Type: image/gif Size: 3260 bytes Desc: not available URL: From rseymour at stanford.edu Mon Mar 26 07:40:55 2007 From: rseymour at stanford.edu (Ray Seymour) Date: Mon, 26 Mar 2007 07:40:55 -0700 Subject: Diffusion Morning Report Message-ID: <4607DB77.4050004@stanford.edu> Good Morning All, Tylan 3 continues having thin wet oxide. Tylan 2 had good test results Friday, but needed a door adjustment by Mike this morning. ASM epi pumps were off this morning. TylanPoly has pumping issues. All else is looking good. Diffusion Date: 3/26/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 up * * * * * * Tylan 2 up * * * * Tylan 3 down *thin wet dep* * * * * Tylan 4 up * * * * * * Tylan 5-BBr3 up * * * * * * Tylan 6-POCl3 up * * * * * * Tylan 7-TEOS2 up * * *17.71/30* * * Tylan 8-SiGe up * * *13.75/30* * * Tylan 9-Poly down *Tube not pumping down * *12.15/30* * * Tylan 10-Nitride up * * *21.69/30* * * Tylan 11-BPSG-LTO up * * *27.4/30* * * Tylan 12-FGA up * * * * * * * * * * * * Thermco 1 Up * * * * * * Thermco 2 up * * * * * * Thermco Poly Up * * * * * * Thermco Nitride down *lost program* * * * * Epi up * * * * * * AMAT Epi down *blade needs to be installed-FS* * * * * Burn Box up * * * * * * ZYGO Up * * * * * * Ebeam up * * * * * * GAAS 22 up * * * * * * GAAS 23 UP * * * * * * SiH4 for furnaces up * * * * * * *B on line 640 psi* * changeover working well * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From daley at gmfankhauser.com Mon Mar 26 14:32:20 2007 From: daley at gmfankhauser.com (Adjudicates L. Tamped) Date: Mon, 26 Mar 2007 21:32:20 +0000 Subject: Message-ID: <9937221829.20070326213220@gmfankhauser.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: roustabout.gif Type: image/gif Size: 3260 bytes Desc: not available URL: From extremepab at grafimax.ca Tue Mar 27 03:28:58 2007 From: extremepab at grafimax.ca (Aides B. Diderot) Date: Tue, 27 Mar 2007 10:28:58 +0000 Subject: Message-ID: <1420739841.20070327102858@grafimax.ca> -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: calendars.gif Type: image/gif Size: 3260 bytes Desc: not available URL: From rseymour at stanford.edu Tue Mar 27 08:48:51 2007 From: rseymour at stanford.edu (Ray Seymour) Date: Tue, 27 Mar 2007 08:48:51 -0700 Subject: Diffusion Morning report Message-ID: <46093CE3.9010703@stanford.edu> Morning All, Ted is out today. There are no new issues today. A test on Tylan3 will be started this morning to check growth on wet oxide. Diffusion Date: 3/26/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 up * * * * * * Tylan 2 up * * * * Tylan 3 down *thin wet dep* * * * * Tylan 4 up * * * * * * Tylan 5-BBr3 up * * * * * * Tylan 6-POCl3 up * * * * * * Tylan 7-TEOS2 up * * *19.11/30* * * Tylan 8-SiGe up * * *13.75/30* * * Tylan 9-Poly up * * *12.28/30* * * Tylan 10-Nitride up * * *21.69/30* * * Tylan 11-BPSG-LTO up * * *27.65/30* * * Tylan 12-FGA up * * * * * * * * * * * * Thermco 1 Up * * * * * * Thermco 2 up * * * * * * Thermco Poly Up * * * * * * Thermco Nitride down *lost program* * * * * Epi up * * * * * * AMAT Epi down *blade needs to be installed-FS* * * * * Burn Box up * * * * * * ZYGO Up * * * * * * Ebeam up * * * * * * GAAS 22 up * * * * * * GAAS 23 UP * * * * * * SiH4 for furnaces up * * * * * * *B on line 620 psi* * changeover working well * -------------- next part -------------- An HTML attachment was scrubbed... URL: From maurice at stanford.edu Tue Mar 27 09:56:42 2007 From: maurice at stanford.edu (maurice stevens) Date: Tue, 27 Mar 2007 09:56:42 -0700 Subject: AMAT will be in Today In-Reply-To: <46093CE3.9010703@stanford.edu> References: <46093CE3.9010703@stanford.edu> Message-ID: <46094CCA.3030409@stanford.edu> > Sean from AMAT called a few minutes ago to let us know he will be in this afternoon to work on the blade. He expects it will take a few days to figure out how the first blade broke. -m -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From tberg at stanford.edu Wed Mar 28 07:47:50 2007 From: tberg at stanford.edu (Ted Berg) Date: Wed, 28 Mar 2007 07:47:50 -0700 Subject: Diffusion Morning Report 03/28/07 Message-ID: <460A8016.3090804@stanford.edu> Good morning All, Looking good this morning. AMAT epi blade replacement in progress. LTO going down for pull and clean on Monday.Ebeam down laser issue. ASM epi has dopant flow issues. No other problems at this time. Diffusion Date: 3/28/07 THICKNESS-Change at Tube Name/Number Status Comments Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 19.0/30 Tylan 8-SiGe up 13.75/30 Tylan 9-Poly up 12.81/30 Tylan 10-Nitride up 21.69/30 Tylan 11-BPSG-LTO up 27.7/30 Tylan 12-FGA up Thermco 1 Up Thermco 2 up Thermco Poly Up Thermco Nitride up Epi up AMAT Epi down blade needs to be installed-FS Burn Box up ZYGO Up Ebeam down laser problem GAAS 22 up GAAS 23 UP SiH4 for furnaces up B on line 600 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Wed Mar 28 07:22:08 2007 From: nanotech at nsti.org (Nano World News) Date: Wed, 28 Mar 2007 07:22:08 -0700 Subject: Nano World News March 2007 Special Edition Message-ID: An HTML attachment was scrubbed... URL: From istannard at globalgsl.com Wed Mar 28 10:00:33 2007 From: istannard at globalgsl.com (Soyuz I. Constraint) Date: Wed, 28 Mar 2007 17:00:33 +0000 Subject: Message-ID: <8640539569.20070328170033@globalgsl.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Delawarean.gif Type: image/gif Size: 3260 bytes Desc: not available URL: From pagan at gospeldream.com Thu Mar 29 00:34:43 2007 From: pagan at gospeldream.com (Flooring T. Segre) Date: Thu, 29 Mar 2007 07:34:43 +0000 Subject: Message-ID: <9213089205.20070329073443@gospeldream.com> -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: nutmegs.gif Type: image/gif Size: 3260 bytes Desc: not available URL: From rseymour at stanford.edu Thu Mar 29 07:50:50 2007 From: rseymour at stanford.edu (Ray Seymour) Date: Thu, 29 Mar 2007 07:50:50 -0700 Subject: Diffusion Morning Report Message-ID: <460BD24A.2010509@stanford.edu> Morning All. Ted is out today. We are looking pretty good today.There are no furnace issues. LTO and Nitride are going down for a clean next week. Diffusion Date: 3/29/07 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 up * * * * * * Tylan 2 up * * * * Tylan 3 * * * * * * Tylan 4 up * * * * * * Tylan 5-BBr3 up * * * * * * Tylan 6-POCl3 up * * * * * * Tylan 7-TEOS2 up * * *20.04/30* * * Tylan 8-SiGe up * * *13.75/30* * * Tylan 9-Poly up * * *12.84/30* * * Tylan 10-Nitride up * * *21.77/30* * * Tylan 11-BPSG-LTO up * * *30.15/30* * * Tylan 12-FGA up * * * * * * * * * * * * Thermco 1 Up * * * * * * Thermco 2 up * * * * * * Thermco Poly Up * * * * * * Thermco Nitride down *lost program* * * * * Epi up * * * * * * AMAT Epi down *blade needs to be installed-FS* * * * * Burn Box up * * * * * * ZYGO Up * * * * * * Ebeam up * * * * * * GAAS 22 up * * * * * * GAAS 23 UP * * * * * * SiH4 for furnaces up * * * * * * *B on line 600 psi* * changeover working well * -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Thu Mar 29 07:33:08 2007 From: nanotech at nsti.org (Nanotech 2007) Date: Thu, 29 Mar 2007 07:33:08 -0700 Subject: Deadline is Today--to participate in complementary exhibit at the Nanotech Showcase, Nanotech 2007 Message-ID: The Global Showcase of Nanotech Centers Initiatives and Innovations is Celebrating 10 Years in Nanotechnology Innovation and Business?You are Invited to Exhibit (there is no cost) On Wednesday, May 23, NSTI will hold a gala reception and Showcase to celebrate 10 Years in Nanotechnology at the Nanotech 2007 conference in the Santa Clara Convention Center, California. This reception will be attended by all business and technology conference attendees, providing a unique 10 year benchmark of research, technology and commercialization of nanotechnology around the globe. Nanotech 2007 encourages companies, organization and research centers, regional nanotech or related economic initiatives, funders and technology licensing offices to participate. Selected organizations will be granted a tabletop and poster-stand at the Nanotech 2007 Networking Reception to showcase their organization project or products. Each participating organization must have at least one (1) registered conference attendee to attend their exhibit. Important Dates * Submission deadline: March 29th, 2007 * Notification date: March 30th, 2007 * On-site showcase: May 23rd To submit: http://www.nsti.org/Nanotech2007/Development/showcase.html --- You are currently subscribed to nanotech as: diffusion at snf.stanford.edu To unsubscribe send a blank email to leave-nanotech-6754768W at spirit.sparklist.com -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Fri Mar 30 08:00:35 2007 From: rseymour at stanford.edu (Ray Seymour) Date: Fri, 30 Mar 2007 08:00:35 -0700 Subject: Diffusion Mornng Report Message-ID: <460D2613.5030604@stanford.edu> Morning All, Ted is out today. Tylan 1 has a O2 leak alarm due to drift on the zero for the discrete MFC. I will address that this morning. EPI has haze on low temp deposition. All else looking good this morning. Diffusion Date: 3/30/07 Tube Name/Number Status Comments THICKNESS-Change at Tylan 1 yellow * * * O2LO zero * * * Tylan 2 up * * * * Tylan 3 * * * * * * Tylan 4 up * * * * * * Tylan 5-BBr3 up * * * * * * Tylan 6-POCl3 up * * * * * * Tylan 7-TEOS2 up * * *21.34/30* * * Tylan 8-SiGe up * * *13.75/30* * * Tylan 9-Poly up * * *12.84/30* * * Tylan 10-Nitride up * * *21.92/30* * * Tylan 11-BPSG-LTO up * * *30.25/30* * * Tylan 12-FGA up * * * * * * * * * * * * Thermco 1 Up * * * * * * Thermco 2 up * * * * * * Thermco Poly Up * * * * * * Thermco Nitride down *lost program* * * * * Epi up * * * * * * AMAT Epi down *blade installed being checked out by FS * * * * * Burn Box up *Cleaned this morning * * * * * ZYGO Up * * * * * * Ebeam up * * * * * * GAAS 22 up * * * * * * GAAS 23 UP * * * * * * SiH4 for furnaces up * * * * * * *B on line 600 psi* * changeover working well * -------------- next part -------------- An HTML attachment was scrubbed... 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