Diffusion Morning Report

Ray Seymour rseymour at stanford.edu
Fri Sep 14 07:56:53 PDT 2007


Good Morning All,
Tylan 1 has thickness issues. Pocl3 and BBr3 still under observation. 
Ebeam no beam current, this is from yesterday and I have no passdown to 
know if this is still down.

  	  	  	  	  	 
  	Date: 	9/14/07 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	* * 	* * 	* * 	 
Tylan 1 	down  	*Thickness issues
* 	* * 	* * 	 
Tylan 2 	up 	* * 	* * 	* * 	 
Tylan 3 	up 	* * 	* * 	* * 	 
Tylan 4 	up 	* * 	* * 	* * 	 
Tylan 5-BBr3 	yellow 	*observation* 	* * 	* * 	 
Tylan 6-POCl3 	yellow 	*smoking* 	* * 	* * 	 
Tylan 7-TEOS2 	yellow 	*needs testing* 	*2.86/30* 	* * 	 
Tylan 8-SiGe 	yellow 	*needs testing* 	*21.64/30* 	* * 	 
Tylan 9-Poly 	up 	* * 	*24.72/30* 	* * 	 
Tylan 10-Nitride 	up 	* * 	*.38/30* 	* * 	 
Tylan 11-BPSG-LTO 	up 	* * 	*8.36/30* 	* * 	 
Tylan 12-FGA 	up 	* * 	* * 	* * 	 
  	  	* * 	* * 	* * 	 
Thermco 1 	up 	* * 	* * 	* * 	 
Thermco 2 	up 	* * 	* * 	* * 	 
Thermco 3 	future 	* * 	* * 	* * 	 
Thermco4 	future 	* * 	* * 	* * 	 
Thermco Poly1 	yellow 	*testing* 	* * 	* * 	 
Thermco Poly2 	future 	*needs testing* 	*
* 	*
* 	
Thermco Nitride1 	up 	* * 	* * 	* * 	 
Thermco Nitride2 	future 	*
* 	* * 	* * 	 
Burn Box 	Up 	* Cleaned this morning
* 	*  * 	* * 	 
Ebeam 	down  	*no beam current* 	* * 	* * 	 
ZYGO 	up 	* * 	* * 	* * 	 
FGA2 	up 	* * 	* * 	* * 	 
SiH4 for furnaces 	up 	*A on line 510 psi* 	* changeover working 
well * 	* * 	 

 
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/diffusion/attachments/20070914/84430115/attachment.html>


More information about the diffusion mailing list