Diffusion Morning Report 09/26/07

Ted Berg tberg at stanford.edu
Wed Sep 26 06:44:40 PDT 2007


Good Morning All,
    Looking good this morning. TEOS is down for tube pull, Ebeam still 
looking for the beam. BBr3 still under observation. Thermco poly2 
testing for qual.

  	  	  	  	  	 
  	Date: 	9/26/07 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	up 	  	  	  	 
Tylan 2 	up 	  	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	u p 	  	  	  	 
Tylan 5-BBr3 	yellow 	observation 	  	  	 
Tylan 6-POCl3 	up 	  	  	  	 
Tylan 7-TEOS2 	down  	cleaning neck of tube/leak 	0/30 	  	 
Tylan 8-SiGe 	up 	  	22.6/30 	  	 
Tylan 9-Poly 	up 	  	28.72/30 	  	 
Tylan 10-Nitride 	up 	  	.82/30 	  	 
Tylan 11-BPSG-LTO 	up 	  	13.47/30 	  	 
Tylan 12-FGA 	up 	  	  	  	 
  	  	  	  	  	 
Thermco 1 	up 	  	  	  	 
Thermco 2 	up 	  	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	up 	  	  	  	 
Thermco Poly2 	future 	testing for qual 	
	
	
Thermco Nitride1 	up 	  	  	  	 
Thermco Nitride2 	future 	
	  	  	 
Burn Box 	Up 	  	   	  	 
Ebeam 	down  	good vacuum,looking for beam 	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	up 	  	  	  	 
SiH4 for furnaces 	up 	A on line 400 psi 	 changeover working well  	  	 


-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/diffusion/attachments/20070926/b8591b71/attachment.html>


More information about the diffusion mailing list