From tberg at stanford.edu  Mon Dec  1 06:37:23 2008
From: tberg at stanford.edu (Ted Berg)
Date: Mon, 01 Dec 2008 06:37:23 -0800
Subject: Diffusion Morning Report 12/1/08
Message-ID: <4933F6A3.20600@stanford.edu>

Good Morning All,
    Looking OK this morning. LTO is down for pull and clean. Ebeam is 
down for fluctuating beam current.  Tylan 1 and Thermco Poly2 have 
possible poor uniformity. TEOS2 did not vent. No other issues at this time.

  	  	  	  	  	 
  	Date: 	12/1/08 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	yellow 	poor uniformity ? 	  	  	 
Tylan 2 	up 	  	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	up 	  	  	  	 
Tylan 5-BBr3 	up 	  	  	  	 
Tylan 6-POCl3 	up 	  	  	  	 
Tylan 7-TEOS2 	yellow 	didn't vent  	18.16/30 	  	 
Tylan 8-SiGe 	yellow 	Running 	0/30 	  	 
Tylan 9-Poly 	up 	  	15.13/30 	  	 
Tylan 10-Nitride 	up 	  	16/30 	  	 
Tylan 11-LTO 	down 	pull and clean 	0/30 	  	 
Tylan 12-FGA 	up 	  	  	  	 
Thermco 1 	up 	  	  	  	 
Thermco 2 	up 	  	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	up 	  	  	  	 
Thermco Poly2 	yellow 	poor uniformity 	  	  	 
Thermco Nitride1 	up 	  	  	  	 
Thermco Nitride2 	future 	  	  	  	 
TEL Spa 	up 	  	  	  	 
Burn Box 	up 	  	   	  	 
Ebeam 	down 	beam current fluctuations 	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	up 	  	  	  	 
SiH4 for furnaces 	  	B on line 310 psi 	 changeover working well  	  	 

	
	
	
	
	


   
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From tberg at stanford.edu  Tue Dec  2 06:08:02 2008
From: tberg at stanford.edu (Ted Berg)
Date: Tue, 02 Dec 2008 06:08:02 -0800
Subject: Diffusion Morning Report 12/02/08
Message-ID: <49354142.2080707@stanford.edu>

Good Morning All,
    Looking good this morning. LTO pull and clean almost complete.Tylan 
1 and Thermco Poly2 possible uniformity issues. Ebeam Beam current 
fluctuations.  No other issues at this time.




From tberg at stanford.edu  Tue Dec  2 06:11:34 2008
From: tberg at stanford.edu (Ted Berg)
Date: Tue, 02 Dec 2008 06:11:34 -0800
Subject: [Fwd: Diffusion Morning Report 12/02/08]
Message-ID: <49354216.3010005@stanford.edu>



-------- Original Message --------
Subject: 	Diffusion Morning Report 12/02/08
Date: 	Tue, 02 Dec 2008 06:08:02 -0800
From: 	Ted Berg <tberg at stanford.edu>
To: 	Ray Seymour <seymour at snf.stanford.edu>, diffusion 
<diffusion at snf.stanford.edu>, Ed Myers <edmyers at stanford.edu>, tberg 
<tberg at snf.stanford.edu>, Mary Tang <mtang at snf.stanford.edu>, 
"maurice at snf.stanford.edu" <maurice at snf.stanford.edu>, 
"mdickey at snf.stanford.edu" <mdickey at snf.stanford.edu>, Nancy Latta 
<latta at snf.stanford.edu>, Paul Rissman <rissman at stanford.edu>, John 
Shott <shott at snf.stanford.edu>



Good Morning All,
   Looking good this morning. LTO pull and clean almost complete.Tylan 
1 and Thermco Poly2 possible uniformity issues. Ebeam Beam current 
fluctuations.  No other issues at this time.


 

  	  	  	  	  	 
  	Date: 	12/2/08 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	yellow 	poor uniformity ? 	  	  	 
Tylan 2 	up 	  	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	up 	  	  	  	 
Tylan 5-BBr3 	up 	  	  	  	 
Tylan 6-POCl3 	up 	  	  	  	 
Tylan 7-TEOS2 	up 	  	18.16/30 	  	 
Tylan 8-SiGe 	yellow 	Running 	0/30 	  	 
Tylan 9-Poly 	up 	  	15.67/30 	  	 
Tylan 10-Nitride 	up 	  	24.0/30 	  	 
Tylan 11-LTO 	down 	pull and clean completed needs coat 	0/30 	  	 
Tylan 12-FGA 	up 	  	  	  	 
Thermco 1 	up 	  	  	  	 
Thermco 2 	up 	  	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	up 	  	  	  	 
Thermco Poly2 	yellow 	poor uniformity ? 	  	  	 
Thermco Nitride1 	up 	  	  	  	 
Thermco Nitride2 	future 	  	  	  	 
TEL Spa 	up 	  	  	  	 
Burn Box 	up 	  	   	  	 
Ebeam 	down 	beam current fluctuations 	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	up 	  	  	  	 
SiH4 for furnaces 	  	B on line 310 psi 	 changeover working well  	  	 



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From tberg at stanford.edu  Wed Dec  3 06:17:14 2008
From: tberg at stanford.edu (Ted Berg)
Date: Wed, 03 Dec 2008 06:17:14 -0800
Subject: Diffusion Morning Report 12/03/08
Message-ID: <493694EA.7090405@stanford.edu>

Good Morning all,
    Looking good this morning . LTO is back up after pull and 
clean.Tylan 1 and Thermco POly 2 have possible uniformity issues.Ebaem 
has fluctuating beam issues. Thermco nitride has DCS flow issues. No 
other problems at this time.

  	  	  	  	  	 
  	Date: 	12/3/08 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	yellow 	poor uniformity ? 	  	  	 
Tylan 2 	up 	  	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	up 	  	  	  	 
Tylan 5-BBr3 	up 	  	  	  	 
Tylan 6-POCl3 	up 	  	  	  	 
Tylan 7-TEOS2 	up 	  	18.16/30 	  	 
Tylan 8-SiGe 	yellow 	Running 	0/30 	  	 
Tylan 9-Poly 	up 	  	15.67/30 	  	 
Tylan 10-Nitride 	up 	  	25.11/30 	  	 
Tylan 11-LTO 	up 	  	.3/30 	  	 
Tylan 12-FGA 	up 	  	  	  	 
Thermco 1 	up 	  	  	  	 
Thermco 2 	up 	  	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	up 	  	  	  	 
Thermco Poly2 	yellow 	poor uniformity ? 	  	  	 
Thermco Nitride1 	yellow 	low DCS flow 	  	  	 
Thermco Nitride2 	future 	  	  	  	 
TEL Spa 	up 	  	  	  	 
Burn Box 	up 	  	   	  	 
Ebeam 	down 	beam current fluctuations 	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	up 	  	  	  	 
SiH4 for furnaces 	  	B on line 300 psi 	 changeover working well  	  	 


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Date: Thu, 4 Dec 2008 17:24:25 -0500 (EST)
Subject: TechConnect-Call for Submissions
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From tberg at stanford.edu  Fri Dec  5 06:11:54 2008
From: tberg at stanford.edu (Ted Berg)
Date: Fri, 05 Dec 2008 06:11:54 -0800
Subject: Diffusion Morning Report 12/05/08
Message-ID: <493936AA.9060405@stanford.edu>

Good morning All,
    Looking good this morning.  Burn box cleaned this morning. Replaced 
MFC in Thermco nitride-didn't work. another is on its way. Thermco Poly2 
and Tylan 1 have possible uniformity issues. Ebeam still down. no other 
issues at this time.

  	  	  	  	  	 
  	Date: 	12/5/08 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	yellow 	poor uniformity ? 	  	  	 
Tylan 2 	up 	  	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	up 	  	  	  	 
Tylan 5-BBr3 	up 	  	  	  	 
Tylan 6-POCl3 	up 	  	  	  	 
Tylan 7-TEOS2 	up 	  	18.16/30 	  	 
Tylan 8-SiGe 	yellow 	Running 	0/30 	  	 
Tylan 9-Poly 	up 	  	15.83/30 	  	 
Tylan 10-Nitride 	up 	  	25.11/30 	  	 
Tylan 11-LTO 	up 	  	1.64/30 	  	 
Tylan 12-FGA 	up 	  	  	  	 
Thermco 1 	up 	  	  	  	 
Thermco 2 	up 	  	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	up 	  	  	  	 
Thermco Poly2 	yellow 	poor uniformity ? 	  	  	 
Thermco Nitride1 	down 	replacing  DCS flowcontroller 	  	  	 
Thermco Nitride2 	future 	  	  	  	 
TEL Spa 	up 	  	  	  	 
Burn Box 	up 	  	   	  	 
Ebeam 	down 	beam current fluctuations 	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	up 	  	  	  	 
SiH4 for furnaces 	  	B on line 300 psi 	 changeover working well  	  	 


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From tberg at stanford.edu  Mon Dec  8 06:36:40 2008
From: tberg at stanford.edu (Ted Berg)
Date: Mon, 08 Dec 2008 06:36:40 -0800
Subject: Diffusion Morning Report 12/08/08
Message-ID: <493D30F8.5020408@stanford.edu>

Good Morning All,
    Looking good this morning, Ebeam still down. Tylan 1 and Thermco 
Poly2 possible uniformity issues.Thermco Nitride replacing DCS Mfc. No 
other issues at this time..


  	  	  	  	  	 
  	Date: 	12/8/08 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	yellow 	poor uniformity ? 	  	  	 
Tylan 2 	up 	  	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	up 	  	  	  	 
Tylan 5-BBr3 	up 	  	  	  	 
Tylan 6-POCl3 	up 	  	  	  	 
Tylan 7-TEOS2 	up 	  	18.16/30 	  	 
Tylan 8-SiGe 	yellow 	Running 	0/30 	  	 
Tylan 9-Poly 	up 	  	15.83/30 	  	 
Tylan 10-Nitride 	up 	  	25.11/30 	  	 
Tylan 11-LTO 	up 	  	3.92/30 	  	 
Tylan 12-FGA 	up 	  	  	  	 
Thermco 1 	up 	  	  	  	 
Thermco 2 	up 	  	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	up 	  	  	  	 
Thermco Poly2 	yellow 	poor uniformity ? 	  	  	 
Thermco Nitride1 	down 	replacing  DCS flowcontroller 	  	  	 
Thermco Nitride2 	future 	  	  	  	 
TEL Spa 	up 	  	  	  	 
Burn Box 	up 	  	   	  	 
Ebeam 	down 	beam current fluctuations 	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	up 	  	  	  	 
SiH4 for furnaces 	  	B on line 300 psi 	 changeover working well  	  	 


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From tberg at stanford.edu  Tue Dec  9 06:08:56 2008
From: tberg at stanford.edu (Ted Berg)
Date: Tue, 09 Dec 2008 06:08:56 -0800
Subject: diffusion morning report 12/09/08
Message-ID: <493E7BF8.9090804@stanford.edu>

Good Morning All,
    Looking good this morning.Tylan 1 and Thermco Poly2 have possible 
uniformity issues.Thermco Nitride  DCS mfc replaced-observing. Ebeam 
still down for beam current issues. Checking into POCl3 issues. No other 
problems at this time.

  	  	  	  	  	 
  	Date: 	12/9/08 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	yellow 	poor uniformity ? 	  	  	 
Tylan 2 	up 	  	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	up 	  	  	  	 
Tylan 5-BBr3 	up 	  	  	  	 
Tylan 6-POCl3 	up 	  	  	  	 
Tylan 7-TEOS2 	up 	  	18.16/30 	  	 
Tylan 8-SiGe 	yellow 	Running 	0/30 	  	 
Tylan 9-Poly 	up 	  	15.83/30 	  	 
Tylan 10-Nitride 	up 	  	25.11/30 	  	 
Tylan 11-LTO 	up 	  	4.71/30 	  	 
Tylan 12-FGA 	up 	  	  	  	 
Thermco 1 	up 	  	  	  	 
Thermco 2 	up 	  	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	up 	  	  	  	 
Thermco Poly2 	yellow 	poor uniformity ? 	  	  	 
Thermco Nitride1 	yellow 	 DCS flowcontroller replaced 	  	  	 
Thermco Nitride2 	future 	  	  	  	 
TEL Spa 	up 	  	  	  	 
Burn Box 	up 	  	   	  	 
Ebeam 	down 	beam current fluctuations 	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	up 	  	  	  	 
SiH4 for furnaces 	  	B on line 300 psi 	 changeover working well  	  	 


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From tberg at stanford.edu  Wed Dec 10 07:08:12 2008
From: tberg at stanford.edu (Ted Berg)
Date: Wed, 10 Dec 2008 07:08:12 -0800
Subject: Diffusion Morning Report 12/10/08
Message-ID: <493FDB5C.6020900@stanford.edu>

Good Morning All,
    Looking good this morning. Thermco Poly 2 and Tylan 1 possible 
uniformity issues. Ebeam has beam current fluctuations.Hitachi SEM 
having Vacuum issues. No other problems at this time.

  	  	  	  	  	 
  	Date: 	12/10/08 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	yellow 	poor uniformity ? 	  	  	 
Tylan 2 	up 	  	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	up 	  	  	  	 
Tylan 5-BBr3 	up 	  	  	  	 
Tylan 6-POCl3 	up 	  	  	  	 
Tylan 7-TEOS2 	up 	  	18.16/30 	  	 
Tylan 8-SiGe 	yellow 	Running 	0/30 	  	 
Tylan 9-Poly 	up 	  	15.83/30 	  	 
Tylan 10-Nitride 	up 	  	25.11/30 	  	 
Tylan 11-LTO 	up 	  	4.75/30 	  	 
Tylan 12-FGA 	up 	  	  	  	 
Thermco 1 	up 	  	  	  	 
Thermco 2 	up 	  	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	up 	  	  	  	 
Thermco Poly2 	yellow 	poor uniformity ? 	  	  	 
Thermco Nitride1 	yellow 	 DCS flowcontroller replaced 	  	  	 
Thermco Nitride2 	future 	  	  	  	 
TEL Spa 	up 	  	  	  	 
Burn Box 	up 	  	   	  	 
Ebeam 	down 	beam current fluctuations 	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	up 	  	  	  	 
SiH4 for furnaces 	  	B on line 300 psi 	 changeover working well  	  	 


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From tberg at stanford.edu  Thu Dec 11 06:48:54 2008
From: tberg at stanford.edu (Ted Berg)
Date: Thu, 11 Dec 2008 06:48:54 -0800
Subject: Diffusion Morning Report 12/11/08
Message-ID: <49412856.9060800@stanford.edu>

Good Morning All,
    Looking good this morning. Tylan 1 and Thermco Poly2  possible 
uniformity issues. Thermco Nitride under observation after MFC change. 
Ebeam still has fluctuating beam current. No other issues at this time.

>   	  	  	  	  	 
>   	Date: 	12/11/08 	THICKNESS-Change at 	  	 
> Tube Name/Number 	Status 	  	  	  	 
> Tylan 1 	yellow 	poor uniformity ? 	  	  	 
> Tylan 2 	up 	  	  	  	 
> Tylan 3 	up 	  	  	  	 
> Tylan 4 	up 	  	  	  	 
> Tylan 5-BBr3 	up 	  	  	  	 
> Tylan 6-POCl3 	up 	  	  	  	 
> Tylan 7-TEOS2 	up 	  	18.16/30 	  	 
> Tylan 8-SiGe 	yellow 	Running 	0/30 	  	 
> Tylan 9-Poly 	up 	  	15.83/30 	  	 
> Tylan 10-Nitride 	up 	  	25.51/30 	  	 
> Tylan 11-LTO 	up 	  	4.78/30 	  	 
> Tylan 12-FGA 	up 	  	  	  	 
> Thermco 1 	up 	  	  	  	 
> Thermco 2 	up 	  	  	  	 
> Thermco 3 	future 	  	  	  	 
> Thermco4 	future 	  	  	  	 
> Thermco Poly1 	up 	  	  	  	 
> Thermco Poly2 	yellow 	poor uniformity ? 	  	  	 
> Thermco Nitride1 	yellow 	 DCS flowcontroller replaced 	  	  	 
> Thermco Nitride2 	future 	  	  	  	 
> TEL Spa 	up 	  	  	  	 
> Burn Box 	up 	  	   	  	 
> Ebeam 	down 	beam current fluctuations 	  	  	 
> ZYGO 	up 	  	  	  	 
> FGA2 	up 	  	  	  	 
> SiH4 for furnaces 	  	B on line 260 psi 	 changeover working well  	  	 
>

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From tberg at stanford.edu  Fri Dec 12 06:19:26 2008
From: tberg at stanford.edu (Ted Berg)
Date: Fri, 12 Dec 2008 06:19:26 -0800
Subject: Diffusion Morning Report 12/12/08
Message-ID: <494272EE.1080406@stanford.edu>

Good Morning All,
    Looking Good this morning. Thermco Poly2 and Tylan1 possible 
uniformity issues Thermco Nitride monitoring after DCS Mfc Change. 
Ebeam  current fluctuations. Burn box cleaned this morning. No other 
issues at this time.

  	  	  	  	  	 
  	Date: 	12/12/08 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	yellow 	poor uniformity ? 	  	  	 
Tylan 2 	up 	  	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	up 	  	  	  	 
Tylan 5-BBr3 	up 	  	  	  	 
Tylan 6-POCl3 	up 	  	  	  	 
Tylan 7-TEOS2 	up 	  	18.16/30 	  	 
Tylan 8-SiGe 	yellow 	Running 	0/30 	  	 
Tylan 9-Poly 	up 	  	15.83/30 	  	 
Tylan 10-Nitride 	up 	  	25.51/30 	  	 
Tylan 11-LTO 	up 	  	4.78/30 	  	 
Tylan 12-FGA 	up 	  	  	  	 
Thermco 1 	up 	  	  	  	 
Thermco 2 	up 	  	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	up 	  	  	  	 
Thermco Poly2 	yellow 	poor uniformity ? 	  	  	 
Thermco Nitride1 	yellow 	 DCS flowcontroller replaced 	  	  	 
Thermco Nitride2 	future 	  	  	  	 
TEL Spa 	up 	  	  	  	 
Burn Box 	up 	  	   	  	 
Ebeam 	down 	beam current fluctuations 	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	up 	  	  	  	 
SiH4 for furnaces 	  	B on line 260 psi 	 changeover working well  	  	 


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From tberg at stanford.edu  Mon Dec 15 06:30:04 2008
From: tberg at stanford.edu (Ted Berg)
Date: Mon, 15 Dec 2008 06:30:04 -0800
Subject: diffusion morning report 12/15/08
Message-ID: <494669EC.1040407@stanford.edu>

Good Morning All,
    Looking good this morning.Tylan 2 has uniformity issues. Tylan 4v 
has TC issues. Thermco Poly 2 has possible uniformity issues. Ebeam has 
fluctuating beam current. No other issues at this time.

  	  	  	  	  	 
  	Date: 	12/15/08 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	up 	  	  	  	 
Tylan 2 	yellow 	uniformity issues 	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	yellow 	tc issues 	  	  	 
Tylan 5-BBr3 	up 	  	  	  	 
Tylan 6-POCl3 	up 	  	  	  	 
Tylan 7-TEOS2 	up 	  	18.16/30 	  	 
Tylan 8-SiGe 	yellow 	Running 	0/30 	  	 
Tylan 9-Poly 	up 	  	20.97/30 	  	 
Tylan 10-Nitride 	up 	  	25.51/30 	  	 
Tylan 11-LTO 	up 	  	6.05/30 	  	 
Tylan 12-FGA 	up 	  	  	  	 
Thermco 1 	up 	  	  	  	 
Thermco 2 	up 	  	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	up 	  	  	  	 
Thermco Poly2 	yellow 	poor uniformity ? 	  	  	 
Thermco Nitride1 	up 	  	  	  	 
Thermco Nitride2 	future 	  	  	  	 
TEL Spa 	up 	  	  	  	 
Burn Box 	up 	  	   	  	 
Ebeam 	down 	beam current fluctuations 	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	up 	  	  	  	 
SiH4 for furnaces 	  	B on line 260 psi 	 changeover working well  	  	 


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From tberg at stanford.edu  Tue Dec 16 06:09:38 2008
From: tberg at stanford.edu (Ted Berg)
Date: Tue, 16 Dec 2008 06:09:38 -0800
Subject: Diffusion Morning Report 12/16/08
Message-ID: <4947B6A2.5040207@stanford.edu>

Good Morning All
    Looking good this morning. Tylan 2 has possible uniformity issues as 
does THermco Poly2. Ebeam still has fluctuating beam current. No other 
issues at this time.

  	  	  	  	  	 
  	Date: 	12/16/08 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	up 	  	  	  	 
Tylan 2 	yellow 	uniformity issues 	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	up 	  	  	  	 
Tylan 5-BBr3 	up 	  	  	  	 
Tylan 6-POCl3 	up 	  	  	  	 
Tylan 7-TEOS2 	up 	  	18.16/30 	  	 
Tylan 8-SiGe 	yellow 	Running 	0/30 	  	 
Tylan 9-Poly 	up 	  	20.97/30 	  	 
Tylan 10-Nitride 	up 	  	25.51/30 	  	 
Tylan 11-LTO 	up 	  	6.91/30 	  	 
Tylan 12-FGA 	up 	  	  	  	 
Thermco 1 	up 	  	  	  	 
Thermco 2 	up 	  	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	up 	  	  	  	 
Thermco Poly2 	yellow 	poor uniformity ? 	  	  	 
Thermco Nitride1 	up 	  	  	  	 
Thermco Nitride2 	future 	  	  	  	 
TEL Spa 	up 	  	  	  	 
Burn Box 	up 	  	   	  	 
Ebeam 	down 	beam current fluctuations 	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	up 	  	  	  	 
SiH4 for furnaces 	  	B on line 240 psi 	 changeover working well  	  	 





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From tberg at stanford.edu  Wed Dec 17 06:19:21 2008
From: tberg at stanford.edu (Ted Berg)
Date: Wed, 17 Dec 2008 06:19:21 -0800
Subject: Diffusion Morning Report 12/17/08
Message-ID: <49490A69.3040502@stanford.edu>

Good Morning All,
    Looking good for shutdown. Tylan 2 needs test after door work. 
Thermco Poly 2 possible poor uniformity. Ebeam is down for beam current 
fluctuations. Everything is going down this morning for shutdown. No 
other issues at this time.

  	  	  	  	  	 
  	Date: 	12/17/08 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	up 	  	  	  	 
Tylan 2 	yellow 	?uniformity issues 	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	up 	  	  	  	 
Tylan 5-BBr3 	up 	  	  	  	 
Tylan 6-POCl3 	up 	  	  	  	 
Tylan 7-TEOS2 	up 	  	18.16/30 	  	 
Tylan 8-SiGe 	yellow 	Running 	0/30 	  	 
Tylan 9-Poly 	up 	  	20.97/30 	  	 
Tylan 10-Nitride 	up 	  	25.51/30 	  	 
Tylan 11-LTO 	up 	  	10.83/30 	  	 
Tylan 12-FGA 	up 	  	  	  	 
Thermco 1 	up 	  	  	  	 
Thermco 2 	up 	  	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	up 	  	  	  	 
Thermco Poly2 	yellow 	poor uniformity ? 	  	  	 
Thermco Nitride1 	up 	  	  	  	 
Thermco Nitride2 	future 	  	  	  	 
TEL Spa 	up 	  	  	  	 
Burn Box 	up 	  	   	  	 
Ebeam 	down 	beam current fluctuations 	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	up 	  	  	  	 
SiH4 for furnaces 	  	B on line 240 psi 	 changeover working well  	  	 


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