From tberg at stanford.edu Fri Feb 1 06:25:30 2008 From: tberg at stanford.edu (Ted Berg) Date: Fri, 01 Feb 2008 06:25:30 -0800 Subject: Diffusion Morning Report 02/01/08 Message-ID: <47A32BDA.7040406@stanford.edu> Good Morning All, Looking good this morning. No issues at this time. Date: 2/1/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 5.91/30 Tylan 8-SiGe up 3.33/30 Tylan 9-Poly up 2.5/30 Tylan 10-Nitride up .89/30 Tylan 11-LTO up 6.09/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box Up cleaned this morning Ebeam up ZYGO up FGA2 up SiH4 for furnaces up B on line 530 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Feb 4 06:26:46 2008 From: tberg at stanford.edu (Ted Berg) Date: Mon, 04 Feb 2008 06:26:46 -0800 Subject: Diffusion Morning Report 02/04/08 Message-ID: <47A720A6.6070000@stanford.edu> Good Morning All, Looking good this morning. Tylan Nitride had mfs alarms at the end of the cycle. no other issues at this time. > > Date: 2/4/08 THICKNESS-Change at > Tube Name/Number Status > Tylan 1 up > Tylan 2 up > Tylan 3 up > Tylan 4 up > Tylan 5-BBr3 up > Tylan 6-POCl3 up > Tylan 7-TEOS2 up 5.91/30 unlogged runs > Tylan 8-SiGe up 3.77/30 > Tylan 9-Poly up 2.5/30 > Tylan 10-Nitride yellow mfs alarms at end of cycle 2.65/30 > Tylan 11-LTO up 6.62/30 > Tylan 12-FGA up > Thermco 1 up > Thermco 2 up > Thermco 3 future > Thermco4 future > Thermco Poly1 up > Thermco Poly2 up > Thermco Nitride1 up > Thermco Nitride2 future > TEL Spa up > Burn Box Up > Ebeam up > ZYGO up > FGA2 up > SiH4 for furnaces up B on line 530 psi changeover working well > -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Feb 5 06:37:36 2008 From: tberg at stanford.edu (Ted Berg) Date: Tue, 05 Feb 2008 06:37:36 -0800 Subject: Diffusion Morning Report 02/05/08 Message-ID: <47A874B0.2050201@stanford.edu> Good Morning All, Looking good this morning. No major problems this morning. Several TEOS runs not logged. Date: 2/5/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 up No recipe Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 5.91/30 unlogged runs Tylan 8-SiGe up 4.56/30 Tylan 9-Poly up 2.5/30 Tylan 10-Nitride yellow mfs alarms at end of cycle 3.62/30 Tylan 11-LTO up 6.63/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up testing Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box Up Ebeam up ZYGO up FGA2 up SiH4 for furnaces up B on line 530 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Feb 6 06:41:34 2008 From: tberg at stanford.edu (Ted Berg) Date: Wed, 06 Feb 2008 06:41:34 -0800 Subject: Diffusion Morning Report 02/06/08 Message-ID: <47A9C71E.2050200@stanford.edu> Good Morning All, Looking Good this morning TEOS2 is down for door seal issue. Outside expert to be in today at 10:00 to evaluated our SRDs. No other issues at this time. Date: 2/5/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 up No recipe Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 down door issue 6.01/30 Tylan 8-SiGe up 4.56/30 Tylan 9-Poly up 2.5/30 Tylan 10-Nitride up 3.67/30 Tylan 11-LTO up 7.73/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up testing Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box Up Ebeam up ZYGO up FGA2 up SiH4 for furnaces up B on line 530 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Feb 7 06:29:47 2008 From: tberg at stanford.edu (Ted Berg) Date: Thu, 07 Feb 2008 06:29:47 -0800 Subject: Diffusion Morning Report 02/07/08 Message-ID: <47AB15DB.7040706@stanford.edu> Good Morning All, Looking good this morning Tylan 1 had loader issues. No other problems at this time. Date: 2/7/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 yellow Boat issues Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 6.01/30 Tylan 8-SiGe up 4.78/30 Tylan 9-Poly up 2.5/30 Tylan 10-Nitride up 3.67/30 Tylan 11-LTO up 9.36/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up testing Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box Up Ebeam up ZYGO up FGA2 up SiH4 for furnaces up B on line 480 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Feb 8 07:15:23 2008 From: tberg at stanford.edu (Ted Berg) Date: Fri, 08 Feb 2008 07:15:23 -0800 Subject: Diffusion Moprning Report 02/08/08 Message-ID: <47AC720B.4090702@stanford.edu> Good Morning All, Looking good this morning. GeH4 is the issue dejour. Playing Musical cylinders for a while. Sige has pressure control issues No other issues in diffusion at this time. Date: 2/8/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 6.01/30 Tylan 8-SiGe Down no Geh4 pressure control 4.78/30 Tylan 9-Poly up 2.5/30 Tylan 10-Nitride up 3.67/30 Tylan 11-LTO up 9.66/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 yellow no Geh4 Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box Up Ebeam up ZYGO up FGA2 up SiH4 for furnaces up B on line 480 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Feb 11 06:37:24 2008 From: tberg at stanford.edu (Ted Berg) Date: Mon, 11 Feb 2008 06:37:24 -0800 Subject: Diffusion Morning Report 02/11/08 Message-ID: <47B05DA4.2060600@stanford.edu> Good Morning All, Looking good this morning. Good recovery after power glitch last Friday. TEOS2 is down for pumping issues. Still working on trying to get a germaine cylinder early. No other issues ar this time. Date: 2/11/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 Down leak after power fail 6.01/30 Tylan 8-SiGe Down no Geh4 pressure control 6.11/30 Tylan 9-Poly up 2.5/30 Tylan 10-Nitride up 3.67/30 Tylan 11-LTO up 10.27/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 yellow no Geh4 Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box Up Ebeam up ZYGO up FGA2 up SiH4 for furnaces up B on line 480 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Feb 12 06:26:34 2008 From: tberg at stanford.edu (Ted Berg) Date: Tue, 12 Feb 2008 06:26:34 -0800 Subject: Diffusion Morning Report 02/12/08 Message-ID: <47B1AC9A.1070702@stanford.edu> Good morning All, Looking good this morning. GeH4 back on line for now. Great effort by many to get this done quickly. Ebeam baked overnight will try and bring up gun this morning. TEOS2 back together and coated needs test. No other issues at this time. Date: 2/12/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow needs test after P & C 0/30 Tylan 8-SiGe up 6.7/30 Tylan 9-Poly up 2.5/30 Tylan 10-Nitride up 3.67/30 Tylan 11-LTO up 11.29/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box Up Ebeam down vacuum issues ZYGO up FGA2 up SiH4 for furnaces up B on line 480 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Feb 13 06:43:13 2008 From: tberg at stanford.edu (Ted Berg) Date: Wed, 13 Feb 2008 06:43:13 -0800 Subject: Diffusion Morning Report 02/13/08 Message-ID: <47B30201.8000808@stanford.edu> Good Morning All, Looking good this morning. Ebeam is back up. TEOS needs a test after pull and clean. No other issues at this time. Date: 2/13/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow needs test after P & C 0/30 Tylan 8-SiGe up 7.1/30 Tylan 9-Poly up 2.5/30 Tylan 10-Nitride up 3.67/30 Tylan 11-LTO up 11.29/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box Up Ebeam up ZYGO up FGA2 up SiH4 for furnaces up B on line 480 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Feb 14 06:24:13 2008 From: tberg at stanford.edu (Ted Berg) Date: Thu, 14 Feb 2008 06:24:13 -0800 Subject: Diffusion Morning Report 02/14/08 Message-ID: <47B44F0D.9040205@stanford.edu> Good Morning All and Happy Valentines Day, Looking good this morning. Tylan 1 had a comm I/o error but is back now. will watch it. No other issues at this time. Date: 2/14/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 yellow I/o error Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up User tested .44/30 Tylan 8-SiGe up 7.1/30 Tylan 9-Poly up 2.5/30 Tylan 10-Nitride up 4.28/30 Tylan 11-LTO up 12.67/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box Up Ebeam up ZYGO up FGA2 up SiH4 for furnaces up B on line 480 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Fri Feb 15 08:29:52 2008 From: rseymour at stanford.edu (Ray Seymour) Date: Fri, 15 Feb 2008 08:29:52 -0800 Subject: Diffusion Morning Report Message-ID: <47B5BE00.5010709@stanford.edu> Morning all, Ted is out today. Things are looking very good this morning. There are no new issues. The LPCVD Burnbox cleaned this morning. Date: 2/15/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 yellow *observing operation * * * * * Tylan 2 up * * * * * * Tylan 3 up * * * * * * Tylan 4 up * * * * * * Tylan 5-BBr3 up * * * * * * Tylan 6-POCl3 up * * * * * * Tylan 7-TEOS2 up * * *.44/30* * * Tylan 8-SiGe up * * *7.1/30* * * Tylan 9-Poly up * * *2.5/30* * * Tylan 10-Nitride up * * *4.38/30* * * Tylan 11-LTO up * * *13.5/30* * * Tylan 12-FGA up * * * * * * Thermco 1 up * * * * * * Thermco 2 up * * * * * * Thermco 3 future * * * * * * Thermco4 future * * * * * * Thermco Poly1 up * * * * * * Thermco Poly2 up * * * * * * Thermco Nitride1 up * * * * * * Thermco Nitride2 future * * * * * * TEL Spa up * * * * * * Burn Box Up * * * * * * Ebeam up * * * * * * ZYGO up * * * * * * FGA2 up * * * * * * SiH4 for furnaces up *B on line 460 psi* * changeover working well * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Tue Feb 19 08:04:29 2008 From: rseymour at stanford.edu (Ray Seymour) Date: Tue, 19 Feb 2008 08:04:29 -0800 Subject: Diffusion Morning Report Message-ID: <47BAFE0D.4090606@stanford.edu> Morning All, Ted is out today. There was one issue over the weekend, Tylannitride had MFS alarm at recipe end, an ongoing issue. All else is good this morning. Teos2 has .74 microns on it so I guess the test came out good. Date: 2/19/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up * * * * * * Tylan 6-POCl3 up * * * * * * Tylan 7-TEOS2 up * * *.74/30* * * Tylan 8-SiGe up * * *7.77/30* * * Tylan 9-Poly up * * *2.5/30* * * Tylan 10-Nitride up * * *4.71/30* * * Tylan 11-LTO up * * *16.26/30* * * Tylan 12-FGA up * * * * * * Thermco 1 up * * * * * * Thermco 2 up * * * * * * Thermco 3 future * * * * * * Thermco4 future * * * * * * Thermco Poly1 up * * * * * * Thermco Poly2 up * * * * * * Thermco Nitride1 up * * * * * * Thermco Nitride2 future * * * * * * TEL Spa up * * * * * * Burn Box Up * * * * * * Ebeam up * * * * * * ZYGO up * * * * * * FGA2 up * * * * * * SiH4 for furnaces up *B on line 460 psi* * changeover working well * * * Report -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Feb 20 06:37:32 2008 From: tberg at stanford.edu (Ted Berg) Date: Wed, 20 Feb 2008 06:37:32 -0800 Subject: Diffusion Morning Report 02/20/08 Message-ID: <47BC3B2C.5020604@stanford.edu> Good Morning All, Looking good this morning. Tylan 1 has intermittant comm problems. Tylan LTO has boat issues. No other problems at this time. Date: 2/20/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 yellow Intermittant comm failures Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up .74/30 Tylan 8-SiGe up 8.89/30 Tylan 9-Poly up 2.5/30 Tylan 10-Nitride up 4.71/30 Tylan 11-LTO yellow boat issues 16.28/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box Up Ebeam up ZYGO up FGA2 up SiH4 for furnaces up B on line 460 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Feb 21 06:22:06 2008 From: tberg at stanford.edu (Ted Berg) Date: Thu, 21 Feb 2008 06:22:06 -0800 Subject: Diffusion Morning Report 02/21/08 Message-ID: <47BD890E.3020507@stanford.edu> Good Morning All, Looking good this morning.Replaced Slave CPU in Tylan1 observing.Tylan BPSG had boat issues but they're running it like mad.. No other issues at this time. Date: 2/21/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 yellow Intermittant comm failures Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up .74/30 Tylan 8-SiGe up 9.04/30 Tylan 9-Poly up 3.2/30 Tylan 10-Nitride up 4.71/30 Tylan 11-LTO yellow boat issues 19.6/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box Up Ebeam up ZYGO up FGA2 up SiH4 for furnaces up B on line 460 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Thu Feb 21 08:58:36 2008 From: nanotech at nsti.org (Nano Science and Technology Institute) Date: Thu, 21 Feb 2008 11:58:36 -0500 (EST) Subject: NSTI Nanotech Proceedings - Special Offer Message-ID: <1101982811789.1101839224771.50807.3.221045B5@scheduler> Forward email http://ui.constantcontact.com/sa/fwtf.jsp?m=1101839224771&ea=diffusion%40snf.stanford.edu&a=1101982811789 This email was sent to diffusion at snf.stanford.edu, by nanotech at nsti.org Update Profile/Email Address http://visitor.constantcontact.com/d.jsp?p=oo&v=001iSHr32lsdppgp9k5BjsI07kPdXWD1eEpqPpCUVfX1cXFs-AOLndGfiJaXZtCPn-W9-K1QhQjURQC49aEBkPdTQ%3D%3D Instant removal with SafeUnsubscribe(TM) http://visitor.constantcontact.com/d.jsp?p=un&v=001iSHr32lsdppgp9k5BjsI07kPdXWD1eEpqPpCUVfX1cXFs-AOLndGfiJaXZtCPn-W9-K1QhQjURQC49aEBkPdTQ%3D%3D Privacy Policy: http://ui.constantcontact.com/roving/CCPrivacyPolicy.jsp Email Marketing by Constant Contact(R) www.constantcontact.com NSTI | One Kendall Square, PMB 308 | Cambridge | MA | 02139 -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Feb 22 06:17:47 2008 From: tberg at stanford.edu (Ted Berg) Date: Fri, 22 Feb 2008 06:17:47 -0800 Subject: Diffusion Morning Report 02/22/08 Message-ID: <47BED98B.2030700@stanford.edu> Good Morning All, Looking good this morning. Tylan 1 seems to be fine after board change. Tylan BPSG has been running all week. No other issues at this time. Burn box cleaned this morning. Date: 2/22/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 yellow Intermittant comm failures Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up .74/30 Tylan 8-SiGe up 9.17/30 Tylan 9-Poly up 3.2/30 Tylan 10-Nitride up 4.71/30 Tylan 11-LTO yellow boat issues 19.75/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box Up Ebeam up ZYGO up FGA2 up SiH4 for furnaces up B on line 460 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Feb 25 06:29:22 2008 From: tberg at stanford.edu (Ted Berg) Date: Mon, 25 Feb 2008 06:29:22 -0800 Subject: Diffusion Morning Report 02/25/08 Message-ID: <47C2D0C2.20405@stanford.edu> Good Morning All, Looking good this morning. AMAT was in on Friday to address P500 and Epi 2 issues. Tylan 1 still observing and TYlan LTO had a broken boat-replaced.. No other issues at this time. Date: 2/25/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 yellow Intermittant comm failures Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up .74/30 Tylan 8-SiGe up 9.64/30 Tylan 9-Poly up 3.2/30 Tylan 10-Nitride up 4.71/30 Tylan 11-LTO yellow boat issues 20.41/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box Up Ebeam up ZYGO up FGA2 up SiH4 for furnaces up B on line 430 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Feb 26 06:25:58 2008 From: tberg at stanford.edu (Ted Berg) Date: Tue, 26 Feb 2008 06:25:58 -0800 Subject: Diffusion Morning Report 02/26/08 Message-ID: <47C42176.4020803@stanford.edu> Good morning All, Looking good this morning . The only thing still down is ebeam after power glitch. Second N2 vaporizer is now installed and will be put on line today hopefully. Date: 2/26/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up .74/30 Tylan 8-SiGe up 9.64/30 Tylan 9-Poly up 3.2/30 Tylan 10-Nitride up 4.71/30 Tylan 11-LTO up 24.49/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box Up Ebeam down Cassette stuck on stage ZYGO up FGA2 up SiH4 for furnaces up B on line 420 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Feb 27 06:27:54 2008 From: tberg at stanford.edu (Ted Berg) Date: Wed, 27 Feb 2008 06:27:54 -0800 Subject: Diffusion Morning Report 02/27/08 Message-ID: <47C5736A.8020401@stanford.edu> Good Morning All, Looking good this morning. SiGe doing temp cal for higher temps. Ebeam needs checkout on Handling. No other issues at this time. Date: 2/27/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up .74/30 Tylan 8-SiGe up temp cal 9.64/30 Tylan 9-Poly up 3.57/30 Tylan 10-Nitride up 4.71/30 Tylan 11-LTO up 24.69/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box Up Ebeam down needs handling check ZYGO up FGA2 up SiH4 for furnaces up B on line 420 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From summit at techconnect.org Wed Feb 27 11:45:59 2008 From: summit at techconnect.org (TechConnect 2008) Date: Wed, 27 Feb 2008 14:45:59 -0500 (EST) Subject: Submit your IP & Ventures, TechConnect 2008 Boston Message-ID: <1101996540350.1101839224771.50807.9.32140046@scheduler> TechConnect 2008 June 3-5, Boston, Massachusetts CALL FOR IP AND VENTURE SUBMISSIONS Deadline - MARCH 14th, 2008 http://www.techconnect.org/Summit2008/ Connecting Innovators, Investors & Corporations Welcome to the 2008 TechConnect Summit, representing the world?s largest peer-vetted deal flow for technology Partnering, Investing and Licensing. Submit now for review of your IP or venture. We look forward to seeing you in Boston! 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URL: From tberg at stanford.edu Thu Feb 28 06:34:55 2008 From: tberg at stanford.edu (Ted Berg) Date: Thu, 28 Feb 2008 06:34:55 -0800 Subject: Diffusion Morning Report 02/28/08 Message-ID: <47C6C68F.5090303@stanford.edu> Good Morning All, Looking good this morning. SiGe temp cal in progress. LTO going down for pull and clean on Tuesday next week.. no other issues this morning... Date: 2/28/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 1.44/30 Tylan 8-SiGe up temp cal 9.64/30 Tylan 9-Poly up 3.57/30 Tylan 10-Nitride up 4.71/30 Tylan 11-LTO up 24.89/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box Up Ebeam up ZYGO up FGA2 up SiH4 for furnaces up B on line 420 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Thu Feb 28 14:34:25 2008 From: nanotech at nsti.org (Nano World News) Date: Thu, 28 Feb 2008 17:34:25 -0500 (EST) Subject: Nano World News February 2008 Message-ID: <1101996577563.1101839224771.50807.3.21162528@scheduler> Forward email http://ui.constantcontact.com/sa/fwtf.jsp?m=1101839224771&ea=diffusion%40snf.stanford.edu&a=1101996577563 This email was sent to diffusion at snf.stanford.edu, by nanotech at nsti.org Update Profile/Email Address http://visitor.constantcontact.com/d.jsp?p=oo&v=001iSHr32lsdppgp9k5BjsI07kPdXWD1eEpqPpCUVfX1cX5HzGxkh6Xoa1X5cUwmEpLuSSf6-89K3YhXn57_SFyuQ%3D%3D Instant removal with SafeUnsubscribe(TM) http://visitor.constantcontact.com/d.jsp?p=un&v=001iSHr32lsdppgp9k5BjsI07kPdXWD1eEpqPpCUVfX1cX5HzGxkh6Xoa1X5cUwmEpLuSSf6-89K3YhXn57_SFyuQ%3D%3D Privacy Policy: http://ui.constantcontact.com/roving/CCPrivacyPolicy.jsp Email Marketing by Constant Contact(R) www.constantcontact.com NSTI | One Kendall Square, PMB 308 | Cambridge | MA | 02139 -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Fri Feb 29 07:59:01 2008 From: rseymour at stanford.edu (Ray Seymour) Date: Fri, 29 Feb 2008 07:59:01 -0800 Subject: Diffusion Morning Report Message-ID: <47C82BC5.3080703@stanford.edu> Good Morning All, Ted is out today. SiGe temp cal in progress. LTO going down for pull and clean on Tuesday next week.. no other issues this morning... Date: 2/29/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up * * * * * * Tylan 4 up * * * * * * Tylan 5-BBr3 up * * * * * * Tylan 6-POCl3 up * * * * * * Tylan 7-TEOS2 up * * *1.44/30* * * Tylan 8-SiGe up *temp cal* *10.63/30* * * Tylan 9-Poly up * * *3.82/30* * * Tylan 10-Nitride up * * *4.71/30* * * Tylan 11-LTO up * * *26.06/30* * * Tylan 12-FGA up * * * * * * Thermco 1 up * * * * * * Thermco 2 up * * * * * * Thermco 3 future * * * * * * Thermco4 future * * * * * * Thermco Poly1 up * * * * * * Thermco Poly2 up * * * * * * Thermco Nitride1 up * * * * * * Thermco Nitride2 future * * * * * * TEL Spa up * * * * * * Burn Box Up * * * * * * Ebeam up * * * * * * ZYGO up * * * * * * FGA2 up * * * * * * SiH4 for furnaces up *B on line 420 psi* * changeover working well * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: