From rseymour at stanford.edu Mon Jun 2 08:06:50 2008 From: rseymour at stanford.edu (Ray Seymour) Date: Mon, 02 Jun 2008 08:06:50 -0700 Subject: Diffusion Morning Report Message-ID: <48440C8A.4060309@stanford.edu> Good Morning All, Ted is out today. TEOS2 has possible dep rate issues as does Thermcopoly1. Thermco1 errors during Trans LC clean recipe. Tylan4 had multiple CRC errors during recipe load. Date: 6/2/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up * * * * * * * * Tylan 3 up * * * * * * * * Tylan 4 yellow *CRC errors * * * * * * * Tylan 5-BBr3 up * * * * * * * * Tylan 6-POCl3 up * * * * * * * * Tylan 7-TEOS2 yellow *Thickness issues * *9.21/30* * * * * Tylan 8-SiGe up * * *13.3/30* * * * * Tylan 9-Poly up * * *23.57/30* * * * * Tylan 10-Nitride up * * *22.6/30* * * * * Tylan 11-LTO yellow *possible particles* *18.63/30* * * * * Tylan 12-FGA up * * * * * * * * Thermco 1 up * * * * * * * * Thermco 2 up * * * * * * * * Thermco 3 future * * * * * * * * Thermco4 future * * * * * * * * Thermco Poly1 down *Thickness issues * * * * * * * Thermco Poly2 up * * * * * * * * Thermco Nitride1 up * * * * * * * * Thermco Nitride2 future * * * * * * * * TEL Spa up * * * * * * * * Burn Box up * * * * * * * * Ebeam up * * * * * * * * ZYGO up * * * * * * * * FGA2 up * * * * * * * * SiH4 for furnaces *a on line 570 psi* * changeover working well * * * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Jun 3 07:07:59 2008 From: tberg at stanford.edu (Ted Berg) Date: Tue, 03 Jun 2008 07:07:59 -0700 Subject: Diffusion Morning Report 06/03/08 Message-ID: <4845503F.2080008@stanford.edu> Good Morning All, Looking good this morning. Several tubes under observation. TEOS 2 possible pressure issues. Tylan LTO possible particle issues. Thermco poly thickness issues. No other problems at this time. Date: 6/3/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow possible pressure issues 9.21/30 Tylan 8-SiGe up 14.24/30 Tylan 9-Poly up 23.57/30 Tylan 10-Nitride up 22.7/30 Tylan 11-LTO yellow possible particles 18.12/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 yellow thickness issues? Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces a on line 570 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Jun 4 06:39:48 2008 From: tberg at stanford.edu (Ted Berg) Date: Wed, 04 Jun 2008 06:39:48 -0700 Subject: Diffusion Morning Report 06/04/08 Message-ID: <48469B24.7090505@stanford.edu> Good Morning All, Looking good this morning. Tylan Lto and TEOS2 under observation. Thermco Poly has possible thckness issues. Ebeam has fluctuating beam current. No other issues at this time. Date: 6/4/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow possible pressure issues 9.21/30 Tylan 8-SiGe up 14.24/30 Tylan 9-Poly up 23.57/30 Tylan 10-Nitride up 22.7/30 Tylan 11-LTO yellow possible particles 18.42/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 yellow thickness issues? Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam yellow beam current fluctuation ZYGO up FGA2 up SiH4 for furnaces a on line 570 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Jun 5 06:15:09 2008 From: tberg at stanford.edu (Ted Berg) Date: Thu, 05 Jun 2008 06:15:09 -0700 Subject: Diffusion Morning Report 06/05/08 Message-ID: <4847E6DD.2050107@stanford.edu> Good Morning All, Looking good this morning. TEOS2 and LTO under observation. Thermco poly 1 has possible hickness issues, Ebeam current fluctuations. No other isssues at this time. Date: 6/5/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow possible pressure issues 9.21/30 Tylan 8-SiGe up 15.31/30 Tylan 9-Poly up 23.57/30 Tylan 10-Nitride up 22.7/30 Tylan 11-LTO yellow possible particles 19.26/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 yellow thickness issues? Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam yellow beam current fluctuation ZYGO up FGA2 up SiH4 for furnaces a on line 560 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Jun 6 07:29:11 2008 From: tberg at stanford.edu (Ted Berg) Date: Fri, 06 Jun 2008 07:29:11 -0700 Subject: Diffusion Morning Report 06/06/08 Message-ID: <484949B7.2070604@stanford.edu> Good Morning All, Looking good this morning. Burn box cleaned this morning. Tylan LTO and TEOS2 under observation. Thermco Poly possible thickness issues. Ebeam beam current fluctuations. No other issues at this time. Date: 6/6/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow possible pressure issues 9.35/30 Tylan 8-SiGe up 15.31/30 Tylan 9-Poly up 24.07/30 Tylan 10-Nitride up 22.7/30 Tylan 11-LTO yellow possible particles 20.36/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 yellow thickness issues? Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam yellow beam current fluctuation ZYGO up FGA2 up SiH4 for furnaces a on line 560 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Jun 9 06:54:20 2008 From: tberg at stanford.edu (Ted Berg) Date: Mon, 09 Jun 2008 06:54:20 -0700 Subject: Diffusion Morning Report 06/09/08 Message-ID: <484D360C.8090303@stanford.edu> Good Morning All, Looking OK this morning..Ray is out this morning. Reset slave CPU and reloaded recipe on Tylan 1 observing. Tylan 2 very long oxidation thickness low. LTO under observation. THermco poly dep rate higher than before. Ebeam current fluctuations- will bake on Tuesday. No other issues at this time. Date: 6/9/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 down i/o errors Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 9.35/30 Tylan 8-SiGe up 15.31/30 Tylan 9-Poly up 24.34/30 Tylan 10-Nitride up 22.7/30 Tylan 11-LTO yellow possible particles 22/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 yellow thickness issues? Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam yellow beam current fluctuation ZYGO up FGA2 up SiH4 for furnaces a on line 540 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Jun 10 06:27:34 2008 From: tberg at stanford.edu (Ted Berg) Date: Tue, 10 Jun 2008 06:27:34 -0700 Subject: Diffusion Morning Report 06/10/08 Message-ID: <484E8146.8070603@stanford.edu> Good Morning All, Looking OK this morning. LTO under observation. Thermco POly1 thiskness issues. Thermco Nitride DCS flow issues. Ebeam beam current fluctuations. Spray etch tool installed and permit signed off. FS here next week for training. No other issues at this time. Date: 6/10/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 9.96/30 Tylan 8-SiGe up 15.31/30 Tylan 9-Poly up 24.54/30 Tylan 10-Nitride up 22.7/30 Tylan 11-LTO yellow possible particles 22.32/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 yellow thickness issues? Thermco Poly2 up Thermco Nitride1 yellow DCS flow issues Thermco Nitride2 future TEL Spa up Burn Box up Ebeam yellow beam current fluctuation ZYGO up FGA2 up SiH4 for furnaces a on line 540 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Jun 11 06:37:44 2008 From: tberg at stanford.edu (Ted Berg) Date: Wed, 11 Jun 2008 06:37:44 -0700 Subject: Diffusion Morning REport 06/11/08 Message-ID: <484FD528.2020109@stanford.edu> Good MorningAll, Looking OK this morning. Tylan LTO is under observation for particles, Thermco Poly has possible thickness issues. Thermco nitride has DCS flow issues. Ebeam beam current fluctuations. No other issues at this time. Date: 6/11/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 9.96/30 Tylan 8-SiGe up 15.31/30 Tylan 9-Poly up 24.54/30 Tylan 10-Nitride up 22.7/30 Tylan 11-LTO yellow possible particles 22.32/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 yellow thickness issues? Thermco Poly2 up Thermco Nitride1 yellow DCS flow issues Thermco Nitride2 future TEL Spa up Burn Box up Ebeam yellow beam current fluctuation ZYGO up FGA2 up SiH4 for furnaces a on line 540 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Jun 12 06:36:26 2008 From: tberg at stanford.edu (Ted Berg) Date: Thu, 12 Jun 2008 06:36:26 -0700 Subject: Diffusion Morning Report 06/12/08 Message-ID: <4851265A.1000109@stanford.edu> Good Morning All, Looking OK this morning. Tylan 1 is down. Checking out I/o errors. LTO under observation for particles jungle being built. Thermco Poly1 thickness issues. Ebeam in column bake. Thermco Nitride had DCS issues still enabled by Maurice. No other issues at this time. Date: 6/12/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 down intermittant i/o errors Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 9.96/30 Tylan 8-SiGe up 15.31/30 Tylan 9-Poly up 24.54/30 Tylan 10-Nitride up 22.7/30 Tylan 11-LTO yellow possible particles 22.47/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 yellow thickness issues? Thermco Poly2 up Thermco Nitride1 yellow DCS flow issues Thermco Nitride2 future TEL Spa up Burn Box up Ebeam down baking column ZYGO up FGA2 up SiH4 for furnaces a on line 540 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Thu Jun 12 14:08:50 2008 From: nanotech at nsti.org (Nano Science and Technology Institute) Date: Thu, 12 Jun 2008 17:08:50 -0400 (EDT) Subject: Nanotech 2008 Proceedings Now Available - Catch up on a Year of Nano Innovation Message-ID: <1102133434509.1101839224771.50807.3.1116202E@scheduler> Forward email http://ui.constantcontact.com/sa/fwtf.jsp?m=1101839224771&ea=diffusion%40snf.stanford.edu&a=1102133434509 This email was sent to diffusion at snf.stanford.edu, by nanotech at nsti.org Update Profile/Email Address http://visitor.constantcontact.com/d.jsp?p=oo&v=001iSHr32lsdppgp9k5BjsI07kPdXWD1eEpTn5C7B1Wja3rwB5i1RghVjiwH0Sz7_TnNAFqLiA-vV865TcjPlX49w%3D%3D Instant removal with SafeUnsubscribe(TM) http://visitor.constantcontact.com/d.jsp?p=un&v=001iSHr32lsdppgp9k5BjsI07kPdXWD1eEpTn5C7B1Wja3rwB5i1RghVjiwH0Sz7_TnNAFqLiA-vV865TcjPlX49w%3D%3D Privacy Policy: http://ui.constantcontact.com/roving/CCPrivacyPolicy.jsp Email Marketing by Constant Contact(R) www.constantcontact.com NSTI | One Kendall Square, PMB 308 | Cambridge | MA | 02139 -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Jun 13 06:19:38 2008 From: tberg at stanford.edu (Ted Berg) Date: Fri, 13 Jun 2008 06:19:38 -0700 Subject: Diffusion Morning Report 06/13/08 Message-ID: <485273EA.4090100@stanford.edu> Good Morning All, Looking good this morning. TYlan 1 Boards replaced -no errors since yesterday.LTO observing- particle issue Jungle being manufactured. Thermco Poly dep rate issues, B2H6 flow issue? Thermco Nitride-DCS issue. Ebeam baking. No other issues at this time. Date: 6/13/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 yellow intermittant i/o errors Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 9.96/30 Tylan 8-SiGe up 15.31/30 Tylan 9-Poly up 24.54/30 Tylan 10-Nitride up 23.4/30 Tylan 11-LTO yellow possible particles 22.47/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 yellow thickness issues/B2H6 flow Thermco Poly2 up Thermco Nitride1 yellow DCS flow issues Thermco Nitride2 future TEL Spa up Burn Box up Ebeam down baking column ZYGO up FGA2 up SiH4 for furnaces a on line 540 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Jun 16 06:29:12 2008 From: tberg at stanford.edu (Ted Berg) Date: Mon, 16 Jun 2008 06:29:12 -0700 Subject: Diffusion Morning Report 06/16/08 Message-ID: <48566AA8.4050405@stanford.edu> Good Morning All, Looking OK this morning. Ray is out today. Finished bake on Ebeam wil try and bring up beam this morning. Tylan Nitride pump not running. Monitoring Tylan LTO possible particle issue. Tylan 1 seems to be Ok will monitor it one more day Thermco Poly 2 B2H6 Mfc out for repair. Thermco Nitride possible DCS flow issues. No other issues at this time. Date: 6/16/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 yellow intermittant i/o errors Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 9.96/30 Tylan 8-SiGe up 15.31/30 Tylan 9-Poly up 24.54/30 Tylan 10-Nitride down pump issue 23.4/30 Tylan 11-LTO yellow possible particles 22.47/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 yellow b2h6 mfc out for repair Thermco Nitride1 yellow DCS flow issues Thermco Nitride2 future TEL Spa up Burn Box up Ebeam down baking column ZYGO up FGA2 up SiH4 for furnaces a on line 540 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Jun 17 06:19:09 2008 From: tberg at stanford.edu (Ted Berg) Date: Tue, 17 Jun 2008 06:19:09 -0700 Subject: Diffusion Morning Report 06/17/08 Message-ID: <4857B9CD.1050804@stanford.edu> Good Morning All , Looking OK this morning. LTO still yellow for possible particles. Thermco Poly 1 leak fail. Thermco Poly2 B2H6 mfcout for repair. Thermco Nitride possible DCS flow issues. Ebeam back up after column bake. No other issues at this time. Date: 6/17/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 9.96/30 Tylan 8-SiGe up 15.31/30 Tylan 9-Poly up 25.9/30 Tylan 10-Nitride up 23.4/30 Tylan 11-LTO yellow possible particles 23.55/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 down Leak fail Thermco Poly2 yellow b2h6 mfc out for repair Thermco Nitride1 yellow DCS flow issues Thermco Nitride2 future TEL Spa up Burn Box up Ebeam yellow column baked beam back up ZYGO up FGA2 up SiH4 for furnaces a on line 480 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From nanotech at nsti.org Tue Jun 17 09:12:57 2008 From: nanotech at nsti.org (Nano Science and Technology Institute) Date: Tue, 17 Jun 2008 12:12:57 -0400 (EDT) Subject: Nanotech 2008 Proceedings Now Available - Catch up on a Year of Nano Innovation Message-ID: <1102133434890.1101839224771.50807.3.1111152E@scheduler> Forward email http://ui.constantcontact.com/sa/fwtf.jsp?m=1101839224771&ea=diffusion%40snf.stanford.edu&a=1102133434890 This email was sent to diffusion at snf.stanford.edu, by nanotech at nsti.org Update Profile/Email Address http://visitor.constantcontact.com/d.jsp?p=oo&v=001iSHr32lsdppgp9k5BjsI07kPdXWD1eEpTn5C7B1Wja2IcNmerzJN26XB_xXvyMVj1Su0SYB8JCi2-lZs5peJYg%3D%3D Instant removal with SafeUnsubscribe(TM) http://visitor.constantcontact.com/d.jsp?p=un&v=001iSHr32lsdppgp9k5BjsI07kPdXWD1eEpTn5C7B1Wja2IcNmerzJN26XB_xXvyMVj1Su0SYB8JCi2-lZs5peJYg%3D%3D Privacy Policy: http://ui.constantcontact.com/roving/CCPrivacyPolicy.jsp Email Marketing by Constant Contact(R) www.constantcontact.com NSTI | One Kendall Square, PMB 308 | Cambridge | MA | 02139 -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Jun 18 06:12:59 2008 From: tberg at stanford.edu (Ted Berg) Date: Wed, 18 Jun 2008 06:12:59 -0700 Subject: Diffusion Morning Report 06/18/08 Message-ID: <485909DB.2050306@stanford.edu> Good Morning All, Looking OK this morning. Ray is working on Thermco poly-small leak. Tylan Lto under observation for particles. B2H6 mfc for THermco Poly2 is out for repair. Thermco Nitride possible DCS flow issues. Ebeam is back up. No Other issues at this time. Date: 6/18/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 9.96/30 Tylan 8-SiGe up 15.31/30 Tylan 9-Poly up 25.9/30 Tylan 10-Nitride up 24.1/30 Tylan 11-LTO yellow possible particles 23.83/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 down Leak fail Thermco Poly2 yellow b2h6 mfc out for repair Thermco Nitride1 yellow DCS flow issues Thermco Nitride2 future TEL Spa up Burn Box up Ebeam yellow column baked beam back up ZYGO up FGA2 up SiH4 for furnaces a on line 480 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Jun 19 06:19:14 2008 From: tberg at stanford.edu (Ted Berg) Date: Thu, 19 Jun 2008 06:19:14 -0700 Subject: Diffusion Morning Report 06/19/08 Message-ID: <485A5CD2.40800@stanford.edu> Good Morning All, Looking OK this morning. Ray still fighting Thermco poly1 leak. Thermco Poly 2 B2H6 MFC out for repair. Monitoring Tylan Lto particles-new jungle being built should be here by end of next week hopefully, Thermco Nitride possible DCS flow issues. Tylan 1 lost recipe last night. no other problems at this time. Date: 6/19/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 yellow Lost recipe Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 9.96/30 Tylan 8-SiGe up 15.75/30 Tylan 9-Poly up 25.9/30 Tylan 10-Nitride up 24.1/30 Tylan 11-LTO yellow possible particles 24.97/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 down Leak fail Thermco Poly2 yellow b2h6 mfc out for repair Thermco Nitride1 yellow DCS flow issues Thermco Nitride2 future TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces a on line 480 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Fri Jun 20 08:08:29 2008 From: rseymour at stanford.edu (Ray Seymour) Date: Fri, 20 Jun 2008 08:08:29 -0700 Subject: Diffusion Morning report Message-ID: <485BC7ED.4030600@stanford.edu> Good Morning All, Looking OK this morning. ThermcoPoly 2 B2H6 MFC out for repair. Monitoring Tylan LTO particles-new jungle being built should be here by middle of next month. Thermco Nitride possible DCS flow issues. Tylan 1 lost recipe last night. Thermcopoly is yellow, it was ran last evening but no results posted. Date: 6/19/08 THICKNESS-Change at Tube Name/Number Status * * * * * * Tylan 1 yellow *Lost recipe * * * * * Tylan 2 up * * * * * * Tylan 3 up * * * * * * Tylan 4 up * * * * * * Tylan 5-BBr3 up * * * * * * Tylan 6-POCl3 up * * * * * * Tylan 7-TEOS2 up * * *9.96/30* * * Tylan 8-SiGe up * * *15.75/30* * * Tylan 9-Poly up * * *25.9/30* * * Tylan 10-Nitride up * * *25.07/30* * * Tylan 11-LTO yellow *possible particles* *25.12/30* * * Tylan 12-FGA up * * * * * * Thermco 1 up * * * * * * Thermco 2 up * * * * * * Thermco 3 future * * * * * * Thermco4 future * * * * * * Thermco Poly1 Yellow *No resulkts reported after use * * * * * Thermco Poly2 yellow *b2h6 mfc out for repair* * * * * Thermco Nitride1 yellow *DCS flow issues* * * * * Thermco Nitride2 future * * * * * * TEL Spa up * * * * * * Burn Box up * * * * * * Ebeam up * * * * * * ZYGO up * * * * * * FGA2 up * * * * * * SiH4 for furnaces *a on line 480 psi* * changeover working well * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From pistonamghrvleiqlpf at underwoodair.com Sat Jun 21 12:27:17 2008 From: pistonamghrvleiqlpf at underwoodair.com (Akers G Homer) Date: Sat, 21 Jun 2008 18:27:17 -0100 Subject: List of pathologists etc.. Message-ID: <275325f9pez0$u6041ck0$0102u1j0@Delldim5150 Certified Medical Doctors in the US 788,367 in total <> 17,677 emails Many popular specialties like Emergency Medicine, Plastic Surgery, OBGYN, Oncology, Pediatrics and more Can easily be sorted by 16 different fields Cost just slashed - $390 ~~~~~ We will give you the lists below at no extra charge if you order this week ~~~~~ Pharmaceutical Companies in the USA 47,000 names and emails of the major positions American Hospital Database 23,000 Admins in more than 7,000 hospitals {a $399 value] Directory of American Dentists Practically every dentist in the USA is listed here American Chiropractors Database 100,000 Chiropractors in the USA (worth $250 alone) send us an email: georgina.whikehart at live.com valid thru June 27 and email with 919 in the subject will ensure no further communication from us From tberg at stanford.edu Mon Jun 23 06:31:08 2008 From: tberg at stanford.edu (Ted Berg) Date: Mon, 23 Jun 2008 06:31:08 -0700 Subject: Diffusion Morning Report 06/23/08 Message-ID: <485FA59C.70502@stanford.edu> Good Morning All, Looking good this morning.Monitoring LTO particles. Tylan 1 observation. Thermco poly1 Waitng results after repair. Ebeam errors. No other problems. Date: 6/23/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 yellow observation Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 9.96/30 Tylan 8-SiGe up 15.75/30 Tylan 9-Poly up 26.57/30 Tylan 10-Nitride up 26.2/30 Tylan 11-LTO yellow possible particles 26.29/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 yellow after repair Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam yellow errors ZYGO up FGA2 up SiH4 for furnaces a on line 480 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Jun 24 06:16:13 2008 From: tberg at stanford.edu (Ted Berg) Date: Tue, 24 Jun 2008 06:16:13 -0700 Subject: Diffusion Morning Report 06/24/08 Message-ID: <4860F39D.2050609@stanford.edu> Good morning All, Looking good thi morning. Tylan 1 and LTO under observation. Thermco Poly 1 waiting results after repair . Ebeam had I/o errors Thermco Poly 2 flow readout was off by 1 sccm. No other issues at this time. > i > Date: 6/24/08 THICKNESS-Change at > Tube Name/Number Status > Tylan 1 yellow observation > Tylan 2 up > Tylan 3 up > Tylan 4 up > Tylan 5-BBr3 up > Tylan 6-POCl3 up > Tylan 7-TEOS2 up 9.96/30 > Tylan 8-SiGe up 15.75/30 > Tylan 9-Poly up 26.57/30 > Tylan 10-Nitride up 26.2/30 > Tylan 11-LTO yellow possible particles 26.31/30 > Tylan 12-FGA up > Thermco 1 up > Thermco 2 up > Thermco 3 future > Thermco4 future > Thermco Poly1 yellow after repair > Thermco Poly2 up > Thermco Nitride1 up > Thermco Nitride2 future > TEL Spa up > Burn Box up > Ebeam yellow errors > ZYGO up > FGA2 up > SiH4 for furnaces a on line 450 psi changeover working well > -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Jun 25 06:16:18 2008 From: tberg at stanford.edu (Ted Berg) Date: Wed, 25 Jun 2008 06:16:18 -0700 Subject: Diffusion Morning Report 06/25/08 Message-ID: <48624522.7080601@stanford.edu> Good Morning All, Looking good this morning. Tylan 1 and LTO under observation. Thermco Poly1 waiting results after repair. FGA 2 they boke the pull rod AGAIN!!!No other issues at this time. Date: 6/25/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 yellow observation Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 10.96/30 Tylan 8-SiGe up 16.09/30 Tylan 9-Poly up 26.4/30 Tylan 10-Nitride up 26.62/30 Tylan 11-LTO yellow possible particles 26.58/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 yellow after repair Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces a on line 450 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Jun 26 06:10:44 2008 From: tberg at stanford.edu (Ted Berg) Date: Thu, 26 Jun 2008 06:10:44 -0700 Subject: Diffusion Morning Report 06/26/08 Message-ID: <48639554.1050405@stanford.edu> Good Morning All, Looking good this morning. Tylan 1 andLTO still under observation. Thermco Poly1 waiting results lots of runs. No other issues at this time. Date: 6/26/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 yellow observation Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 10.96/30 Tylan 8-SiGe up 16.09/30 Tylan 9-Poly up 26.35/30 Tylan 10-Nitride up 26.62/30 Tylan 11-LTO yellow possible particles 26.58/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 yellow after repair Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces a on line 450 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Jun 27 06:08:20 2008 From: tberg at stanford.edu (Ted Berg) Date: Fri, 27 Jun 2008 06:08:20 -0700 Subject: Diffusion Morning Report 06/27/08 Message-ID: <4864E644.6040004@stanford.edu> Good Morning All, Looking good this morning . Burn box cleaned this morniug. Tylan 1 and LTO under observation. It looks like new LTO jungle will arrive the middle of next month and install will follow shortly thereafter..Thermco Poly 1 waiting results-many runs.No other bissues at this time. Date: 6/27/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 yellow observation Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 10.96/30 Tylan 8-SiGe up 16.09/30 Tylan 9-Poly up 26.35/30 Tylan 10-Nitride up 26.62/30 Tylan 11-LTO yellow possible particles 26.97/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 yellow after repair Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces a on line 450 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Jun 30 06:35:38 2008 From: tberg at stanford.edu (Ted Berg) Date: Mon, 30 Jun 2008 06:35:38 -0700 Subject: Diffusion Morning Report 06/30/08 Message-ID: <4868E12A.8060607@stanford.edu> Good Morning All, Looking OK this morning. Ray is out today. TYlan 1 and LTO still under observation. TEOS2 is down for pumping issues. Thermco poly -leak fail. No other issues at this time. Date: 6/30/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 yellow observation Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 down pumping issues 11.96/30 Tylan 8-SiGe up 16.53/30 Tylan 9-Poly up 26.67/30 Tylan 10-Nitride yellow pressure low 28.62/30 Tylan 11-LTO yellow possible particles 27.29/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 yellow leak fail Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces a on line 450 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... 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