Diffusion Morning Report

Ray Seymour rseymour at stanford.edu
Fri Mar 14 08:02:14 PDT 2008


Morning All,
Ted is out today. The BPSG is yellow for pin holes. Thermco 2 loader is 
not operating. The LPCVD burnbox was cleaned this morning. All else is 
looking good this morning.

	  	  	  	  	 
  	Date: 	3/14/08 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	* * 	* * 	* * 	 
Tylan 1 	down 	*
* 	* * 	* * 	 
Tylan 2 	yellow 	
	* * 	* * 	 
Tylan 3 	up 	* * 	* * 	* * 	 
Tylan 4 	up 	* * 	* * 	* * 	 
Tylan 5-BBr3 	up 	* * 	* * 	* * 	 
Tylan 6-POCl3 	up 	* * 	* * 	* * 	 
Tylan 7-TEOS2 	up 	* * 	*2.71/30* 	* * 	 
Tylan 8-SiGe 	up 	* * 	*10.89/30* 	* * 	 
Tylan 9-Poly 	up 	* * 	*4.38/30* 	* * 	 
Tylan 10-Nitride 	up 	* * 	*6.21/30* 	* * 	 
Tylan 11-LTO 	up 	* * 	*2.85/30* 	* * 	 
Tylan 12-FGA 	up 	* * 	* * 	* * 	 
Thermco 1 	up 	* * 	* * 	* * 	 
Thermco 2 	Down
	* Loader not opening
* 	* * 	* * 	 
Thermco 3 	future 	* * 	* * 	* * 	 
Thermco4 	future 	* * 	* * 	* * 	 
Thermco Poly1 	up 	* * 	* * 	* * 	 
Thermco Poly2 	up 	* * 	* * 	* * 	 
Thermco Nitride1 	up 	* * 	* * 	* * 	 
Thermco Nitride2 	future 	* * 	* * 	* * 	 
TEL Spa 	up 	* * 	* * 	* * 	 
Burn Box 	Up 	* Cleaned today
* 	*  * 	* * 	 
Ebeam 	up 	* * 	* * 	* * 	 
ZYGO 	up 	* * 	* * 	* * 	 
FGA2 	up 	* * 	* * 	* * 	 
SiH4 for furnaces 	up 	*B on line 320 psi* 	* changeover working 
well * 	* * 	 


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