Diffusion Morning Report

Ray Seymour rseymour at stanford.edu
Wed Mar 19 07:25:15 PDT 2008


Morning All,
Ted is out today. Thermco2 has loader issues. BPSG still has particles, 
fewer but there. Tylan2 has non uniformity across the wafer. There are 
no other issues at this time.
	  	  	  	  	 
  	Date: 	3/19/08 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	* * 	* * 	* * 	 
Tylan 1 	Up
	*
* 	* * 	* * 	 
Tylan 2 	Yellow
	*Non Uniformity*
	* * 	* * 	 
Tylan 3 	up 	* * 	* * 	* * 	 
Tylan 4 	up 	* * 	* * 	* * 	 
Tylan 5-BBr3 	up 	* * 	* * 	* * 	 
Tylan 6-POCl3 	up 	* * 	* * 	* * 	 
Tylan 7-TEOS2 	up 	* * 	*2.71/30* 	* * 	 
Tylan 8-SiGe 	up 	* * 	*11.15/30* 	* * 	 
Tylan 9-Poly 	up 	* * 	*5.71/30* 	* * 	 
Tylan 10-Nitride 	up 	* * 	*6.21/30* 	* * 	 
Tylan 11-LTO 	Yellow
	* Particles
* 	*1.73/30* 	* * 	 
Tylan 12-FGA 	up 	* * 	* * 	* * 	 
Thermco 1 	up 	* * 	* * 	* * 	 
Thermco 2 	Down
	* Loader not opening
* 	* * 	* * 	 
Thermco 3 	future 	* * 	* * 	* * 	 
Thermco4 	future 	* * 	* * 	* * 	 
Thermco Poly1 	up 	* * 	* * 	* * 	 
Thermco Poly2 	up 	* * 	* * 	* * 	 
Thermco Nitride1 	up 	* * 	* * 	* * 	 
Thermco Nitride2 	future 	* * 	* * 	* * 	 
TEL Spa 	up 	* * 	* * 	* * 	 
Burn Box 	Up 	* 
* 	*  * 	* * 	 
Ebeam 	up 	* * 	* * 	* * 	 
ZYGO 	up 	* * 	* * 	* * 	 
FGA2 	up 	* * 	* * 	* * 	 
SiH4 for furnaces 	up 	*B on line 320 psi* 	* changeover working 
well * 	* * 	 

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