Diffusion Morning Report 03/20/08

[Ted Berg]

Good Morning All,
    Looking OK this morning. Tylan 2 has possible uniformity issues. 
Tylan LTO has particles. Thermco 2 has loader issues . Ebeam has pumping 
issues. No other problems at this time.

  	  	  	  	  	 
  	Date: 	3/20/08 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	up 	  	  	  	 
Tylan 2 	yellow 	uniformity 	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	up 	  	  	  	 
Tylan 5-BBr3 	up 	  	  	  	 
Tylan 6-POCl3 	up 	  	  	  	 
Tylan 7-TEOS2 	up 	  	3.18/30 	  	 
Tylan 8-SiGe 	up 	  	11.15/30 	  	 
Tylan 9-Poly 	up 	  	5,71/30 	  	 
Tylan 10-Nitride 	up 	  	6.21/30 	  	 
Tylan 11-LTO 	yellow 	particles 	5.61/30 	  	 
Tylan 12-FGA 	up 	  	  	  	 
Thermco 1 	up 	  	  	  	 
Thermco 2 	down 	loader issues 	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	up 	  	  	  	 
Thermco Poly2 	up 	  	  	  	 
Thermco Nitride1 	up 	  	  	  	 
Thermco Nitride2 	future 	  	  	  	 
TEL Spa 	up 	  	  	  	 
Burn Box 	Up 	  	   	  	 
Ebeam 	down 	Pump issues 	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	up 	  	  	  	 
SiH4 for furnaces 	up 	B on line 320 psi 	 changeover working well  	  	 


-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/diffusion/attachments/20080320/1b657262/attachment.html>