Diffusion Morning Report 03/21/08

Ted Berg tberg at stanford.edu
Fri Mar 21 06:16:39 PDT 2008


Good Morning All,
    Looking OK this morning. Tylan BPSG still has particles. Tylan 2 has 
uniformity issues. Thermco 2 has a loader problem.  No other issues at 
this time.

>   	  	  	  	  	 
>   	Date: 	3/21/08 	THICKNESS-Change at 	  	 
> Tube Name/Number 	Status 	  	  	  	 
> Tylan 1 	up 	  	  	  	 
> Tylan 2 	yellow 	uniformity 	  	  	 
> Tylan 3 	up 	  	  	  	 
> Tylan 4 	up 	  	  	  	 
> Tylan 5-BBr3 	up 	  	  	  	 
> Tylan 6-POCl3 	up 	  	  	  	 
> Tylan 7-TEOS2 	up 	  	3.18/30 	  	 
> Tylan 8-SiGe 	up 	  	11.15/30 	  	 
> Tylan 9-Poly 	up 	  	5,71/30 	  	 
> Tylan 10-Nitride 	up 	  	6.21/30 	  	 
> Tylan 11-LTO 	yellow 	particles 	6.11/30 	  	 
> Tylan 12-FGA 	up 	  	  	  	 
> Thermco 1 	up 	  	  	  	 
> Thermco 2 	down 	loader issues 	  	  	 
> Thermco 3 	future 	  	  	  	 
> Thermco4 	future 	  	  	  	 
> Thermco Poly1 	up 	  	  	  	 
> Thermco Poly2 	up 	  	  	  	 
> Thermco Nitride1 	up 	  	  	  	 
> Thermco Nitride2 	future 	  	  	  	 
> TEL Spa 	up 	  	  	  	 
> Burn Box 	Up 	  	   	  	 
> Ebeam 	up 	  	  	  	 
> ZYGO 	up 	  	  	  	 
> FGA2 	up 	  	  	  	 
> SiH4 for furnaces 	up 	B on line 320 psi 	 changeover working well  	  	 
>

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