Diffusion Morning Report 03/24/08

Ted Berg tberg at stanford.edu
Mon Mar 24 06:47:05 PDT 2008


Good morning All,
    Looking OK this morning. Thermco 2 has a bad gas board-on order. SEM 
4160 has sample stuck in it. LTO has possible particles. No other issues 
at this time.

  	  	  	  	  	 
  	Date: 	3/24/08 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	up 	  	  	  	 
Tylan 2 	up 	  	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	up 	  	  	  	 
Tylan 5-BBr3 	up 	  	  	  	 
Tylan 6-POCl3 	up 	  	  	  	 
Tylan 7-TEOS2 	up 	  	3.46/30 	  	 
Tylan 8-SiGe 	up 	  	11.15/30 	  	 
Tylan 9-Poly 	up 	  	5,71/30 	  	 
Tylan 10-Nitride 	up 	  	6.21/30 	  	 
Tylan 11-LTO 	yellow 	particles 	6.21/30 	  	 
Tylan 12-FGA 	up 	  	  	  	 
Thermco 1 	up 	  	  	  	 
Thermco 2 	down 	bad gas interface board-on order 	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	up 	  	  	  	 
Thermco Poly2 	up 	  	  	  	 
Thermco Nitride1 	up 	  	  	  	 
Thermco Nitride2 	future 	  	  	  	 
TEL Spa 	up 	  	  	  	 
Burn Box 	Up 	  	   	  	 
Ebeam 	up 	  	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	up 	  	  	  	 
SiH4 for furnaces 	up 	B on line 320 psi 	 changeover working well  	  	 


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