From tberg at stanford.edu Tue Sep 2 06:41:07 2008 From: tberg at stanford.edu (Ted Berg) Date: Tue, 02 Sep 2008 06:41:07 -0700 Subject: Diffusion Morning Report 09/02/08 Message-ID: <48BD4273.2020808@stanford.edu> Good Morning All, Looking good this morning.. LTO testing and tweeking. Tylan 1 possible temp stab issues. Thermco poly2 temp issues? Tylan Nitride MFS alarms. Ebeam intermittant lens droop issues. No other issues at this time. Date: 9/2/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 yellow temp stab issue? Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 15.91/30 Tylan 8-SiGe up 25.93/30 Tylan 9-Poly up 24.16/30 Tylan 10-Nitride yellow mfs alarms 2.14/30 Tylan 11-LTO yellow testing -running 22.5/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 yellow temp issues ? Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam yellow intermittant lens droop ZYGO up FGA2 up SiH4 for furnaces a on line 120 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Sep 3 06:57:10 2008 From: tberg at stanford.edu (Ted Berg) Date: Wed, 03 Sep 2008 06:57:10 -0700 Subject: Diffusion Morning Report 09/03/08 Message-ID: <48BE97B6.7010108@stanford.edu> Good Morning All, Looking good this morning. LTO testing and tweeking. Tylan Nitride MFS alarms. Ebeam -intermittant lens droop Thermco poly 2 possible temp issues. No other issues at this time. Date: 9/3/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 16.55/30 Tylan 8-SiGe up 25.93/30 Tylan 9-Poly up 24.16/30 Tylan 10-Nitride yellow mfs alarms 2.14/30 Tylan 11-LTO yellow testing -running 22.7/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 yellow temp issues ? Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam yellow intermittant lens droop ZYGO up FGA2 up SiH4 for furnaces a on line 120 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Sep 4 06:25:36 2008 From: tberg at stanford.edu (Ted Berg) Date: Thu, 04 Sep 2008 06:25:36 -0700 Subject: Diffusion Morning Report 09/04/08 Message-ID: <48BFE1D0.9040705@stanford.edu> Good Morning all, Looking good this morning. Tylan LTO testing and running Temp looks better after Tystar visit. Tylan 2 has Quartz issues. Tylan nitride has intermittant MFS alarms. Thermco poly 1 has door issues. Ebeam has intermittant lens droop issues. Thermco Poly 2 has possible temp issues. No other problems at this time..... Date: 9/4/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 yellow burn chamber sticking Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 16.55/30 Tylan 8-SiGe up 25.93/30 Tylan 9-Poly up 24.16/30 Tylan 10-Nitride yellow mfs alarms 2.14/30 Tylan 11-LTO yellow testing -running 22.7/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 yellow Door close issue Thermco Poly2 yellow temp issues ? Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam yellow intermittant lens droop ZYGO up FGA2 up SiH4 for furnaces a on line 120 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Sep 8 06:47:02 2008 From: tberg at stanford.edu (Ted Berg) Date: Mon, 08 Sep 2008 06:47:02 -0700 Subject: Diffusion Morning Report 09/08/08 Message-ID: <48C52CD6.50105@stanford.edu> Good Morning All, Looking ok this morning. Several issues possibly related to air failure TEOS and THermco Poly? Checking them out. Tylan LTO looking better and better, still testing and running. Nitride has intermittant MFS alarms. Thermco Poly 2 poor uniformity? Ebeam has intermittant lens droop. No other issues at this time. Date: 9/8/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 16.55/30 Tylan 8-SiGe up 25.93/30 Tylan 9-Poly yellow non uniformity 0/30 Tylan 10-Nitride yellow mfs alarms 2.14/30 Tylan 11-LTO yellow testing -running 28.47/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 down High set point Thermco Poly2 yellow temp issues ? Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam yellow intermittant lens droop ZYGO up FGA2 up SiH4 for furnaces b on line700 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Sep 9 06:16:07 2008 From: tberg at stanford.edu (Ted Berg) Date: Tue, 09 Sep 2008 06:16:07 -0700 Subject: Diffusion Morning Report 09/09/08 Message-ID: <48C67717.1030709@stanford.edu> Good Morning All, Looking good this morning. Tylan LTO testing and running-looking good. TEOS down for ampule change. Nitride has intermittant MFS alarms. Thermco Poly 2 has non uniform Dep. Ebeam has intermittant lens droop. No othjer issues at this time. Date: 9/9/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 down ampule change 16.55/30 Tylan 8-SiGe up 25.93/30 Tylan 9-Poly up 0/30 Tylan 10-Nitride yellow mfs alarms 2.14/30 Tylan 11-LTO yellow testing -running 29.27/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 yellow non uniformity Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam yellow intermittant lens droop ZYGO up FGA2 up SiH4 for furnaces B on line 720 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Sep 10 06:25:37 2008 From: tberg at stanford.edu (Ted Berg) Date: Wed, 10 Sep 2008 06:25:37 -0700 Subject: Diffusion Morning Report 09/10/08 Message-ID: <48C7CAD1.5030504@stanford.edu> Good Morning All, Looking good this morning. LTO looking good testing continues. Ebeam intermittant lens droop.Tylan Nitride intermittant MFS alarms. Thermco Poly 2 non uniformity. No other issues at this time. Date: 9/10/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 18.09/30 Tylan 8-SiGe up 25.93/30 Tylan 9-Poly up 0/30 Tylan 10-Nitride yellow mfs alarms 2.14/30 Tylan 11-LTO yellow testing -running 29.9/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 yellow non uniformity Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam yellow intermittant lens droop ZYGO up FGA2 up SiH4 for furnaces B on line 700 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Sep 11 06:11:02 2008 From: tberg at stanford.edu (Ted Berg) Date: Thu, 11 Sep 2008 06:11:02 -0700 Subject: Diffusion Morning Report 09/11/08 Message-ID: <48C918E6.4010701@stanford.edu> Good Morning All, Looking good this morning . Several toos going down because of CB change:Ebeam , Hitachi SEM , and 4160 SEM. Hopefully they will be back up this afternoon. LTO testing and running-going down for pull and clean on Tuesday. Tylan nitride has intermittant mfs alarms. No other issues at this time. Date: 9/11/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 18.09/30 Tylan 8-SiGe up 25.93/30 Tylan 9-Poly up logs not filled out!! 0/30 Tylan 10-Nitride yellow mfs alarms 2.14/30 Tylan 11-LTO yellow testing -running 30.12/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 yellow non uniformity Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam down breaker change ZYGO up FGA2 up SiH4 for furnaces B on line 700 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Sep 12 06:13:33 2008 From: tberg at stanford.edu (Ted Berg) Date: Fri, 12 Sep 2008 06:13:33 -0700 Subject: Diffusion Morning Report 09/12/08 Message-ID: <48CA6AFD.6020004@stanford.edu> Good Morning All, Looking good this morning. Tylan LTO testing and running. Tylan Nitride has intermittant MFS alarms Thermco Poly has non uniform dep. Most tools came up OK after breaker change yesterday, No other issues at this time. Date: 9/12/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 18.09/30 Tylan 8-SiGe up 25.93/30 Tylan 9-Poly up .74/30 Tylan 10-Nitride yellow mfs alarms 2.14/30 Tylan 11-LTO yellow testing -running 30.12/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 yellow non uniformity Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces B on line 700 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Sep 15 06:29:48 2008 From: tberg at stanford.edu (Ted Berg) Date: Mon, 15 Sep 2008 06:29:48 -0700 Subject: Diffusion Morning Report 09/15/08 Message-ID: <48CE634C.7090306@stanford.edu> Good Morning all, Looking good this morning. LTO still running and testing going down for pull and clean tomorrow. Tylan Poly has a possible leak. Tylan nitride has intermittant MFS alarms. SEM hitachi has possible issues. Ebeam has intermittant lens droop issues. No other issues at this time. Date: 9/15/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 18.09/30 Tylan 8-SiGe up 25.93/30 Tylan 9-Poly down leak? .94/30 Tylan 10-Nitride yellow mfs alarms 2.14/30 Tylan 11-LTO yellow testing -running 31.75/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 yellow non uniformity Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces B on line 700 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Sep 16 06:19:34 2008 From: tberg at stanford.edu (Ted Berg) Date: Tue, 16 Sep 2008 06:19:34 -0700 Subject: Diffusion Morning Report 09/16/08 Message-ID: <48CFB266.6010708@stanford.edu> Good Morning All, Looking good this morning. LTO is down for scheduled pull and clean. Nitride has intermittant MFS alarms. Thermco Poly 2 non uniformity. James reports no issues with ebeam. No other problems at this time. Date: 9/16/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 18.09/30 Tylan 8-SiGe up 25.93/30 Tylan 9-Poly up .94/30 Tylan 10-Nitride yellow mfs alarms 2.34/30 Tylan 11-LTO down pull and clean 0/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 yellow non uniformity Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces B on line 670 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Thu Sep 18 06:54:55 2008 From: rseymour at stanford.edu (Ray Seymour) Date: Thu, 18 Sep 2008 06:54:55 -0700 Subject: Diffusion Morning Report Message-ID: <48D25DAF.5040708@stanford.edu> Good Morning all, Looking good this morning. LTO still running and testing. Tylan nitride has intermittant MFS alarms. No other issues at this time. Date: 9/18/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up * * * * * * Tylan 5-BBr3 up * * * * * * Tylan 6-POCl3 up * * * * * * Tylan 7-TEOS2 up * * *18.09/30* * * Tylan 8-SiGe up * * *25.93/30* * * Tylan 9-Poly down *leak?* *1.1/30* * * Tylan 10-Nitride yellow *mfs alarms* *2.39/30* * * Tylan 11-LTO yellow *testing -running * *4.17/30* * * Tylan 12-FGA up * * * * * * Thermco 1 up * * * * * * Thermco 2 up * * * * * * Thermco 3 future * * * * * * Thermco4 future * * * * * * Thermco Poly1 up * * * * * * Thermco Poly2 yellow *non uniformity* * * * * Thermco Nitride1 up * * * * * * Thermco Nitride2 future * * * * * * TEL Spa up * * * * * * Burn Box up * * * * * * Ebeam up * * * * * * ZYGO up * * * * * * FGA2 up * * * * * * SiH4 for furnaces *B on line 700 psi* * changeover working well * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Fri Sep 19 08:48:06 2008 From: rseymour at stanford.edu (Ray Seymour) Date: Fri, 19 Sep 2008 08:48:06 -0700 Subject: Diffusion Morning Report Message-ID: <48D3C9B6.3060002@stanford.edu> Good Morning all, Looking good this morning. LTO Had a broken loader sheath, and I found one of the injectors in the following position /, except pointing to 8 pm not 2 pm. Tylan nitride has intermittant MFS alarms. Thermco Poly1 has a pumping issue. No other issues at this time. Date: 9/19/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up * * * * * * Tylan 5-BBr3 up * * * * * * Tylan 6-POCl3 up * * * * * * Tylan 7-TEOS2 up * * *18.09/30* * * Tylan 8-SiGe up * * *25.93/30* * * Tylan 9-Poly down *1.1/30* * * Tylan 10-Nitride yellow *mfs alarms* *2.39/30* * * Tylan 11-LTO yellow *replaced broken loader sheath* *4.17/30* * * Tylan 12-FGA up * * * * * * Thermco 1 up * * * * * * Thermco 2 up * * * * * * Thermco 3 future * * * * * * Thermco4 future * * * * * * Thermco Poly1 dn * Not pumping * * * * * Thermco Poly2 yellow *non uniformity* * * * * Thermco Nitride1 up * * * * * * Thermco Nitride2 future * * * * * * TEL Spa up * * * * * * Burn Box up *Cleaned this morning * * * * * Ebeam up * * * * * * ZYGO up * * * * * * FGA2 up * * * * * * SiH4 for furnaces *B on line 700 psi* * changeover working well * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Sep 23 06:43:08 2008 From: tberg at stanford.edu (Ted Berg) Date: Tue, 23 Sep 2008 06:43:08 -0700 Subject: Diffusion Morning Report 09/23/08 Message-ID: <48D8F26C.5060006@stanford.edu> Good Morning All, Looking OK this morning. LTO still running like crazy and testing. Nitride has intermittant MFS alarms. Thermco poly2 has non uniform dep? Looks like tip is gone on ebeam. No other issues at this time. Date: 9/23/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 18.09/30 Tylan 8-SiGe up 25.93/30 Tylan 9-Poly up 1.4/30 Tylan 10-Nitride yellow mfs alarms 2.39/30 Tylan 11-LTO yellow testing and running 12.73/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 yellow non uniformity Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam down no beam ZYGO up FGA2 up SiH4 for furnaces B on line 670 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Sep 24 06:07:55 2008 From: tberg at stanford.edu (Ted Berg) Date: Wed, 24 Sep 2008 06:07:55 -0700 Subject: Diffusion morning Report 09/24/08 Message-ID: <48DA3BAB.2040706@stanford.edu> Good Morning All, Looking OK this morning. LTO is down for pull and clean from contamination of some sort. Nitride has mfs alarms intermittantly. Ebeam has no beam current. Thermco Poly 2 has non uniform dep. No other issues at this time. Date: 9/24/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 18.09/30 Tylan 8-SiGe up 25.93/30 Tylan 9-Poly up 1.4/30 Tylan 10-Nitride yellow mfs alarms 2.39/30 Tylan 11-LTO down contamination 0/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 yellow non uniformity Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam down no beam ZYGO up FGA2 up SiH4 for furnaces B on line 650 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Sep 25 06:16:46 2008 From: tberg at stanford.edu (Ted Berg) Date: Thu, 25 Sep 2008 06:16:46 -0700 Subject: Diffusion Morning Report 09/25/08 Message-ID: <48DB8F3E.7070806@stanford.edu> Good Morning All, Looking OK this morning . LTO tube change in progress. Ray is out today and tomorrow. Mike is helping out-Thanks. TEOS2v had leak alarms. Nitride had MFS alarms. Thermco poly2 has non uniform dep. Ebeam replaced tip. No other problems at this time. Date: 9/25/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow TEOS leak alarm 18.16/30 Tylan 8-SiGe up 25.93/30 Tylan 9-Poly up 1.4/30 Tylan 10-Nitride yellow mfs alarms 2.39/30 Tylan 11-LTO down contamination-tube change 0/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 yellow non uniformity Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam down Replaced tip ZYGO up FGA2 up SiH4 for furnaces B on line 650 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Sep 26 06:24:50 2008 From: tberg at stanford.edu (Ted Berg) Date: Fri, 26 Sep 2008 06:24:50 -0700 Subject: Diffusion Morning Report 09/26/08 Message-ID: <48DCE2A2.40808@stanford.edu> Good Morning All, Looking good this morning. LTO is back up thanks again Mike. Tylan 5 has loader issues. Tylan Nitride had intermittant MFS alarms. Thermco Poly 2 has non uniform dep. Ebeam- tip replaced looking for beam. Date: 9/26/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 down loader issues Tylan 6-POCl3 up Tylan 7-TEOS2 up 18.16/30 Tylan 8-SiGe up 25.93/30 Tylan 9-Poly up 1.63/30 Tylan 10-Nitride yellow mfs alarms 2.39/30 Tylan 11-LTO up test good .34/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 yellow non uniformity Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam down looking for beam ZYGO up FGA2 up SiH4 for furnaces B on line 650 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Sep 29 07:02:16 2008 From: tberg at stanford.edu (Ted Berg) Date: Mon, 29 Sep 2008 07:02:16 -0700 Subject: Diffusion Morning Report 09/29/08 Message-ID: <48E0DFE8.4030802@stanford.edu> Good Morning All, Looking OK this morning. The monitor for Thermco bank 1 is dead so the bank is down. Ebeam still looking for the beam. Nitride has MFS alarms. Probably going to take the monitor from THermco bank 2 for bank 1 since bank 2 is a one man show. No other issues at this time. Date: 9/29/08 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 18.16/30 Tylan 8-SiGe up 25.93/30 Tylan 9-Poly up 1.63/30 Tylan 10-Nitride yellow mfs alarms 2.39/30 Tylan 11-LTO up test good 4.13/30 Tylan 12-FGA up Thermco 1 down monitor bad Thermco 2 down monitor bad Thermco 3 future Thermco4 future Thermco Poly1 down monitor bad Thermco Poly2 yellow non uniformity Thermco Nitride1 down monitor bad Thermco Nitride2 future TEL Spa up Burn Box up Ebeam down looking for beam ZYGO up FGA2 up SiH4 for furnaces B on line 650 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Sep 30 06:22:05 2008 From: tberg at stanford.edu (Ted Berg) Date: Tue, 30 Sep 2008 06:22:05 -0700 Subject: Diffusion Morning Report 09/30/08 Message-ID: <48E227FD.5060900@stanford.edu> Good Morning All , Looking good this morning. BBr3 had sticking wafers. Nitride had MFS alarmsThermco Poly2 has no monitor. Ebeam still tuning beam. No other issues at this time. > > Date: 9/30/08 THICKNESS-Change at > Tube Name/Number Status > Tylan 1 up > Tylan 2 up > Tylan 3 up > Tylan 4 up > Tylan 5-BBr3 up sticky boat > Tylan 6-POCl3 up > Tylan 7-TEOS2 up 18.16/30 > Tylan 8-SiGe up 25.93/30 > Tylan 9-Poly up 1.63/30 > Tylan 10-Nitride yellow mfs alarms 2.39/30 > Tylan 11-LTO up test good 6.13/30 > Tylan 12-FGA up > Thermco 1 up > Thermco 2 up > Thermco 3 future > Thermco4 future > Thermco Poly1 up > Thermco Poly2 down monitor bad > Thermco Nitride1 up > Thermco Nitride2 future > TEL Spa up > Burn Box up > > Ebeam down looking for beam > ZYGO up > FGA2 up > SiH4 for furnaces B on line 640 psi changeover working well > -------------- next part -------------- An HTML attachment was scrubbed... URL: