Diffusion Morning Report 09/03/08

Ted Berg tberg at stanford.edu
Wed Sep 3 06:57:10 PDT 2008


Good Morning All,
    Looking good this morning. LTO testing and tweeking. Tylan Nitride 
MFS alarms. Ebeam -intermittant lens droop Thermco poly 2 possible temp 
issues. No other issues at this time.

  	  	  	  	  	 
  	Date: 	9/3/08 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	up 	  	  	  	 
Tylan 2 	up 	  	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	up 	  	  	  	 
Tylan 5-BBr3 	up 	  	  	  	 
Tylan 6-POCl3 	up 	  	  	  	 
Tylan 7-TEOS2 	up 	  	16.55/30 	  	 
Tylan 8-SiGe 	up 	  	25.93/30 	  	 
Tylan 9-Poly 	up 	  	24.16/30 	  	 
Tylan 10-Nitride 	yellow 	mfs alarms 	2.14/30 	  	 
Tylan 11-LTO 	yellow 	testing -running  	22.7/30 	  	 
Tylan 12-FGA 	up 	  	  	  	 
Thermco 1 	up 	  	  	  	 
Thermco 2 	up 	  	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	up 	  	  	  	 
Thermco Poly2 	yellow 	temp issues ? 	  	  	 
Thermco Nitride1 	up 	  	  	  	 
Thermco Nitride2 	future 	  	  	  	 
TEL Spa 	up 	  	  	  	 
Burn Box 	up 	
	   	  	 
Ebeam 	yellow 	intermittant lens droop 	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	up 	  	  	  	 
SiH4 for furnaces 	  	a on line 120 psi 	 changeover working well  	  	 


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