Diffusion Morning Report 09/04/08

Ted Berg tberg at stanford.edu
Thu Sep 4 06:25:36 PDT 2008


Good Morning all,
    Looking good this morning. Tylan LTO testing and running Temp looks 
better after Tystar visit. Tylan 2 has Quartz issues. Tylan nitride has 
intermittant MFS alarms. Thermco poly 1 has door issues. Ebeam has 
intermittant lens droop issues. Thermco Poly 2 has possible temp issues. 
No other problems at this time.....

  	  	  	  	  	 
  	Date: 	9/4/08 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	up 	  	  	  	 
Tylan 2 	yellow 	burn chamber sticking 	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	up 	  	  	  	 
Tylan 5-BBr3 	up 	  	  	  	 
Tylan 6-POCl3 	up 	  	  	  	 
Tylan 7-TEOS2 	up 	  	16.55/30 	  	 
Tylan 8-SiGe 	up 	  	25.93/30 	  	 
Tylan 9-Poly 	up 	  	24.16/30 	  	 
Tylan 10-Nitride 	yellow 	mfs alarms 	2.14/30 	  	 
Tylan 11-LTO 	yellow 	testing -running  	22.7/30 	  	 
Tylan 12-FGA 	up 	  	  	  	 
Thermco 1 	up 	  	  	  	 
Thermco 2 	up 	  	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	yellow 	Door close issue 	  	  	 
Thermco Poly2 	yellow 	temp issues ? 	  	  	 
Thermco Nitride1 	up 	  	  	  	 
Thermco Nitride2 	future 	  	  	  	 
TEL Spa 	up 	  	  	  	 
Burn Box 	up 	
	   	  	 
Ebeam 	yellow 	intermittant lens droop 	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	up 	  	  	  	 
SiH4 for furnaces 	  	a on line 120 psi 	 changeover working well  	  	 


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