Diffusion Morning Report 09/08/08

Ted Berg tberg at stanford.edu
Mon Sep 8 06:47:02 PDT 2008


Good Morning All,
    Looking ok this morning. Several  issues possibly related to air 
failure TEOS and THermco Poly? Checking them out. Tylan LTO looking 
better and better, still testing and running. Nitride has intermittant 
MFS alarms. Thermco Poly 2 poor uniformity? Ebeam has intermittant lens 
droop. No other issues at this time.

  	  	  	  	  	 
  	Date: 	9/8/08 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	up 	  	  	  	 
Tylan 2 	up 	  	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	up 	  	  	  	 
Tylan 5-BBr3 	up 	  	  	  	 
Tylan 6-POCl3 	up 	  	  	  	 
Tylan 7-TEOS2 	up 	  	16.55/30 	  	 
Tylan 8-SiGe 	up 	  	25.93/30 	  	 
Tylan 9-Poly 	yellow 	non uniformity 	0/30 	  	 
Tylan 10-Nitride 	yellow 	mfs alarms 	2.14/30 	  	 
Tylan 11-LTO 	yellow 	testing -running  	28.47/30 	  	 
Tylan 12-FGA 	up 	  	  	  	 
Thermco 1 	up 	  	  	  	 
Thermco 2 	up 	  	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	down  	High set point 	  	  	 
Thermco Poly2 	yellow 	temp issues ? 	  	  	 
Thermco Nitride1 	up 	  	  	  	 
Thermco Nitride2 	future 	  	  	  	 
TEL Spa 	up 	  	  	  	 
Burn Box 	up 	
	   	  	 
Ebeam 	yellow 	intermittant lens droop 	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	up 	  	  	  	 
SiH4 for furnaces 	  	b on line700 psi
	 changeover working well  	  	 


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