Diffusion Morning Report 09/09/08

[Ted Berg]

Good Morning All,
    Looking  good this morning. Tylan LTO testing and running-looking 
good. TEOS down for ampule change. Nitride has intermittant MFS alarms. 
Thermco Poly 2 has non uniform Dep. Ebeam has intermittant lens droop.  
No othjer issues at this time.

  	  	  	  	  	 
  	Date: 	9/9/08 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	up 	  	  	  	 
Tylan 2 	up 	  	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	up 	  	  	  	 
Tylan 5-BBr3 	up 	  	  	  	 
Tylan 6-POCl3 	up 	  	  	  	 
Tylan 7-TEOS2 	down  	ampule change 	16.55/30 	  	 
Tylan 8-SiGe 	up 	  	25.93/30 	  	 
Tylan 9-Poly 	up 	  	0/30 	  	 
Tylan 10-Nitride 	yellow 	mfs alarms 	2.14/30 	  	 
Tylan 11-LTO 	yellow 	testing -running  	29.27/30 	  	 
Tylan 12-FGA 	up 	  	  	  	 
Thermco 1 	up 	  	  	  	 
Thermco 2 	up 	  	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	up 	  	  	  	 
Thermco Poly2 	yellow 	non uniformity 	  	  	 
Thermco Nitride1 	up 	  	  	  	 
Thermco Nitride2 	future 	  	  	  	 
TEL Spa 	up 	  	  	  	 
Burn Box 	up 	
	   	  	 
Ebeam 	yellow 	intermittant lens droop 	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	up 	  	  	  	 
SiH4 for furnaces 	  	B on line 720 psi 	 changeover working well  	  	 


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