Diffusion Morning Report 09/15/08

Ted Berg tberg at stanford.edu
Mon Sep 15 06:29:48 PDT 2008


Good Morning all,
    Looking good this morning.  LTO still running and testing going down 
for pull and clean tomorrow. Tylan Poly has a possible leak. Tylan 
nitride has intermittant MFS alarms. SEM hitachi has possible issues. 
Ebeam has intermittant lens droop issues. No other issues at this time.

  	  	  	  	  	 
  	Date: 	9/15/08 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	up 	  	  	  	 
Tylan 2 	up 	  	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	up 	  	  	  	 
Tylan 5-BBr3 	up 	  	  	  	 
Tylan 6-POCl3 	up 	  	  	  	 
Tylan 7-TEOS2 	up 	  	18.09/30 	  	 
Tylan 8-SiGe 	up 	  	25.93/30 	  	 
Tylan 9-Poly 	down 	leak? 	.94/30 	  	 
Tylan 10-Nitride 	yellow 	mfs alarms 	2.14/30 	  	 
Tylan 11-LTO 	yellow 	testing -running  	31.75/30 	  	 
Tylan 12-FGA 	up 	  	  	  	 
Thermco 1 	up 	  	  	  	 
Thermco 2 	up 	  	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	up 	  	  	  	 
Thermco Poly2 	yellow 	non uniformity 	  	  	 
Thermco Nitride1 	up 	  	  	  	 
Thermco Nitride2 	future 	  	  	  	 
TEL Spa 	up 	  	  	  	 
Burn Box 	up 	
	   	  	 
Ebeam 	up 	  	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	up 	  	  	  	 
SiH4 for furnaces 	  	B on line 700 psi 	 changeover working well  	  	 


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