Diffusion Morning Report 09/16/08

Ted Berg tberg at stanford.edu
Tue Sep 16 06:19:34 PDT 2008


Good Morning All,
    Looking good this morning. LTO is down for scheduled pull and clean. 
Nitride has intermittant MFS alarms. Thermco Poly 2 non uniformity. 
James reports no issues with ebeam. No other problems at this time.

  	  	  	  	  	 
  	Date: 	9/16/08 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	up 	  	  	  	 
Tylan 2 	up 	  	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	up 	  	  	  	 
Tylan 5-BBr3 	up 	  	  	  	 
Tylan 6-POCl3 	up 	  	  	  	 
Tylan 7-TEOS2 	up 	  	18.09/30 	  	 
Tylan 8-SiGe 	up 	  	25.93/30 	  	 
Tylan 9-Poly 	up 	  	.94/30 	  	 
Tylan 10-Nitride 	yellow 	mfs alarms 	2.34/30 	  	 
Tylan 11-LTO 	down 	pull and clean 	0/30 	  	 
Tylan 12-FGA 	up 	  	  	  	 
Thermco 1 	up 	  	  	  	 
Thermco 2 	up 	  	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	up 	  	  	  	 
Thermco Poly2 	yellow 	non uniformity 	  	  	 
Thermco Nitride1 	up 	  	  	  	 
Thermco Nitride2 	future 	  	  	  	 
TEL Spa 	up 	  	  	  	 
Burn Box 	up 	
	   	  	 
Ebeam 	up 	  	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	up 	  	  	  	 
SiH4 for furnaces 	  	B on line 670 psi 	 changeover working well  	  	 


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