Diffusion Morning Report

[Ray Seymour]

Good Morning all,
Looking good this morning.  LTO still running and testing. Tylan nitride 
has intermittant MFS alarms. No other issues at this time.

  	  	  	  	  	 
  	Date: 	9/18/08 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	up 	  	  	  	 
Tylan 2 	up 	  	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	up 	* * 	* * 	* * 	 
Tylan 5-BBr3 	up 	* * 	* * 	* * 	 
Tylan 6-POCl3 	up 	* * 	* * 	* * 	 
Tylan 7-TEOS2 	up 	* * 	*18.09/30* 	* * 	 
Tylan 8-SiGe 	up 	* * 	*25.93/30* 	* * 	 
Tylan 9-Poly 	down 	*leak?* 	*1.1/30* 	* * 	 
Tylan 10-Nitride 	yellow 	*mfs alarms* 	*2.39/30* 	* * 	 
Tylan 11-LTO 	yellow 	*testing -running * 	*4.17/30* 	* * 	 
Tylan 12-FGA 	up 	* * 	* * 	* * 	 
Thermco 1 	up 	* * 	* * 	* * 	 
Thermco 2 	up 	* * 	* * 	* * 	 
Thermco 3 	future 	* * 	* * 	* * 	 
Thermco4 	future 	* * 	* * 	* * 	 
Thermco Poly1 	up 	* * 	* * 	* * 	 
Thermco Poly2 	yellow 	*non uniformity* 	* * 	* * 	 
Thermco Nitride1 	up 	* * 	* * 	* * 	 
Thermco Nitride2 	future 	* * 	* * 	* * 	 
TEL Spa 	up 	* * 	* * 	* * 	 
Burn Box 	up 	*
* 	*  * 	* * 	 
Ebeam 	up 	* * 	* * 	* * 	 
ZYGO 	up 	* * 	* * 	* * 	 
FGA2 	up 	* * 	* * 	* * 	 
SiH4 for furnaces 	  	*B on line 700 psi* 	* changeover working 
well * 	* * 	 

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