Diffusion Morning Report

Ray Seymour rseymour at stanford.edu
Fri Sep 19 08:48:06 PDT 2008


Good Morning all,
Looking good this morning.  LTO Had a broken loader sheath, and I found 
one of the injectors in the following position /, except pointing to 8 
pm not 2 pm. Tylan nitride has intermittant MFS alarms. Thermco Poly1 
has a pumping issue. No other issues at this time.

  	  	  	  	  	 
  	Date: 	9/19/08 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	up 	  	  	  	 
Tylan 2 	up 	  	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	up 	* * 	* * 	* * 	 
Tylan 5-BBr3 	up 	* * 	* * 	* * 	 
Tylan 6-POCl3 	up 	* * 	* * 	* * 	 
Tylan 7-TEOS2 	up 	* * 	*18.09/30* 	* * 	 
Tylan 8-SiGe 	up 	* * 	*25.93/30* 	* * 	 
Tylan 9-Poly 	down 	
	*1.1/30* 	* * 	 
Tylan 10-Nitride 	yellow 	*mfs alarms* 	*2.39/30* 	* * 	 
Tylan 11-LTO 	yellow 	*replaced broken loader sheath*
	*4.17/30* 	* * 	 
Tylan 12-FGA 	up 	* * 	* * 	* * 	 
Thermco 1 	up 	* * 	* * 	* * 	 
Thermco 2 	up 	* * 	* * 	* * 	 
Thermco 3 	future 	* * 	* * 	* * 	 
Thermco4 	future 	* * 	* * 	* * 	 
Thermco Poly1 	dn
	* Not pumping
* 	* * 	* * 	 
Thermco Poly2 	yellow 	*non uniformity* 	* * 	* * 	 
Thermco Nitride1 	up 	* * 	* * 	* * 	 
Thermco Nitride2 	future 	* * 	* * 	* * 	 
TEL Spa 	up 	* * 	* * 	* * 	 
Burn Box 	up 	*Cleaned this morning
* 	*  * 	* * 	 
Ebeam 	up 	* * 	* * 	* * 	 
ZYGO 	up 	* * 	* * 	* * 	 
FGA2 	up 	* * 	* * 	* * 	 
SiH4 for furnaces 	  	*B on line 700 psi* 	* changeover working 
well * 	* * 	 

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/diffusion/attachments/20080919/eccd9a0b/attachment.html>


More information about the diffusion mailing list