Diffusion Morning Report 09/29/08

Ted Berg tberg at stanford.edu
Mon Sep 29 07:02:16 PDT 2008


Good Morning All,
    Looking OK this morning. The monitor for Thermco bank 1 is dead so 
the bank is down. Ebeam still looking for the beam. Nitride has MFS 
alarms. Probably going to take the monitor from THermco bank 2 for bank 
1 since bank 2 is a one man show. No other issues at this time.

  	  	  	  	  	 
  	Date: 	9/29/08 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	up 	  	  	  	 
Tylan 2 	up 	  	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	up 	  	  	  	 
Tylan 5-BBr3 	up 	
	  	  	 
Tylan 6-POCl3 	up 	  	  	  	 
Tylan 7-TEOS2 	up 	  	18.16/30 	  	 
Tylan 8-SiGe 	up 	  	25.93/30 	  	 
Tylan 9-Poly 	up 	  	1.63/30 	  	 
Tylan 10-Nitride 	yellow 	mfs alarms 	2.39/30 	  	 
Tylan 11-LTO 	up 	test good 	4.13/30 	  	 
Tylan 12-FGA 	up 	  	  	  	 
Thermco 1 	down 	monitor bad 	  	  	 
Thermco 2 	down 	monitor bad 	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	down 	monitor bad 	  	  	 
Thermco Poly2 	yellow 	non uniformity 	  	  	 
Thermco Nitride1 	down 	monitor bad 	  	  	 
Thermco Nitride2 	future 	  	  	  	 
TEL Spa 	up 	  	  	  	 
Burn Box 	up 	
	   	  	 
Ebeam 	down 	looking for beam 	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	up 	  	  	  	 
SiH4 for furnaces 	  	B on line 650 psi 	 changeover working well  	  	 


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