Diffusion Morning Report 09/30/08

Ted Berg tberg at stanford.edu
Tue Sep 30 06:22:05 PDT 2008


Good Morning All ,
    Looking good this morning. BBr3 had sticking wafers. Nitride had MFS 
alarmsThermco Poly2 has no monitor. Ebeam still tuning beam. No other 
issues at this time.

>   	  	  	  	  	 
>   	Date: 	9/30/08 	THICKNESS-Change at 	  	 
> Tube Name/Number 	Status 	  	  	  	 
> Tylan 1 	up 	  	  	  	 
> Tylan 2 	up 	  	  	  	 
> Tylan 3 	up 	  	  	  	 
> Tylan 4 	up 	  	  	  	 
> Tylan 5-BBr3 	up 	sticky boat 	  	  	 
> Tylan 6-POCl3 	up 	  	  	  	 
> Tylan 7-TEOS2 	up 	  	18.16/30 	  	 
> Tylan 8-SiGe 	up 	  	25.93/30 	  	 
> Tylan 9-Poly 	up 	  	1.63/30 	  	 
> Tylan 10-Nitride 	yellow 	mfs alarms 	2.39/30 	  	 
> Tylan 11-LTO 	up 	test good 	6.13/30 	  	 
> Tylan 12-FGA 	up 	  	  	  	 
> Thermco 1 	up 	  	  	  	 
> Thermco 2 	up 	  	  	  	 
> Thermco 3 	future 	  	  	  	 
> Thermco4 	future 	  	  	  	 
> Thermco Poly1 	up 	  	  	  	 
> Thermco Poly2 	down 	monitor bad 	  	  	 
> Thermco Nitride1 	up 	  	  	  	 
> Thermco Nitride2 	future 	  	  	  	 
> TEL Spa 	up 	  	  	  	 
> Burn Box 	up 	
> 	   	  	 
> Ebeam 	down 	looking for beam 	  	  	 
> ZYGO 	up 	  	  	  	 
> FGA2 	up 	  	  	  	 
> SiH4 for furnaces 	  	B on line 640 psi 	 changeover working well  	  	 
>

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