From tberg at stanford.edu Wed Apr 1 09:14:04 2009 From: tberg at stanford.edu (Ted Berg) Date: Wed, 01 Apr 2009 09:14:04 -0700 Subject: Diffusion Morning Report 04/01/09 Message-ID: <49D392CC.105@stanford.edu> Good Morning All, No issues this morning. Date: 4/1/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 2.33/30 Tylan 8-SiGe up 8.9/30 Tylan 9-Poly up 8.45/30 Tylan 10-Nitride up 10.51/30 Tylan 11-LTO up 13.64/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 606 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Apr 2 07:34:13 2009 From: tberg at stanford.edu (Ted Berg) Date: Thu, 02 Apr 2009 07:34:13 -0700 Subject: Diffusion Morning Report 04/02/09 Message-ID: <49D4CCE5.4040103@stanford.edu> Good Morning All, Looking good this morning. No major issues at this time. Date: 4/2/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 2.33/30 Tylan 8-SiGe up 8.9/30 Tylan 9-Poly up 8.45/30 Tylan 10-Nitride up 10.74/30 Tylan 11-LTO up 13.64/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 606 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Fri Apr 3 08:01:28 2009 From: rseymour at stanford.edu (Ray Seymour) Date: Fri, 03 Apr 2009 08:01:28 -0700 Subject: Diffusion Morning Report Message-ID: <49D624C8.9030402@stanford.edu> Good Morning All, Looking good this morning. No major issues at this time. Date: 4/3/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up * * * * * * Tylan 2 up * * * * * * Tylan 3 up * * * * * * Tylan 4 up * * * * * * Tylan 5-BBr3 up * * * * * * Tylan 6-POCl3 up * * * * * * Tylan 7-TEOS2 up * * *2.33/30* * * Tylan 8-SiGe up * * *8.9/30* * * Tylan 9-Poly up * * *8.56/30* * * Tylan 10-Nitride up * * *10.74/30* * * Tylan 11-LTO up * * *13.64/30* * * Tylan 12-FGA up * * * * * * Thermco 1 up * * * * * * Thermco 2 up * * * * * * Thermco 3 future * * * * * * Thermco4 future * * * * * * Thermco Poly1 up * * * * * * Thermco Poly2 up * * * * * * Thermco Nitride1 up * * * * * * Thermco Nitride2 future * * * * * * TEL Spa up * * * * * * Burn Box up * Cleaned this morning * * * * * Ebeam up * * * * * * ZYGO up * * * * * * FGA2 up * * * * * * SiH4 for furnaces *A on line 603 psi* * changeover working well * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Apr 6 07:05:51 2009 From: tberg at stanford.edu (Ted Berg) Date: Mon, 06 Apr 2009 07:05:51 -0700 Subject: Diffusion Morning Report 04/06/09 Message-ID: <49DA0C3F.2050807@stanford.edu> Good Morning All, Looking good this morning . The only issue was Tylan 1 no auto-reset slave CPU and monitoring. Tylan 3 had poor uniformity will look into it. No other issues at this time. Date: 4/6/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 yellow mfs alarm-reset slave cpu Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 2.33/30 Tylan 8-SiGe up 10.38/30 Tylan 9-Poly up 14.56/30 Tylan 10-Nitride up 11.09/30 Tylan 11-LTO up 13.64/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 606 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Apr 7 06:24:55 2009 From: tberg at stanford.edu (Ted Berg) Date: Tue, 07 Apr 2009 06:24:55 -0700 Subject: Diffusion Morning Report 04/07/09 Message-ID: <49DB5427.5060903@stanford.edu> Good Morning All, Looking good this morning observing Tylan 1 , Tylan 3 Needs test after work. Ebeam Beam current has dropped will investigate. No other issues at this time. Date: 4/7/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 yellow mfs alarm-reset slave cpu Tylan 2 up Tylan 3 yellow Needs test Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 2.33/30 Tylan 8-SiGe up 10.38/30 Tylan 9-Poly up 16.71/30 Tylan 10-Nitride up 11.29/30 Tylan 11-LTO up 14.5/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Beam I dropped Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 606 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Apr 8 06:15:28 2009 From: tberg at stanford.edu (Ted Berg) Date: Wed, 08 Apr 2009 06:15:28 -0700 Subject: Diffusion Morning Report 04/08/09 Message-ID: <49DCA370.9070505@stanford.edu> Good Morning All, Looking good this morning. LTO has a broken sheath. Tylan 3 has less than optimal uniformity. Ebeam coming back up after regen.Tylan 1 still observing. No other issues at this time. Date: 4/8/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 yellow mfs alarm-reset slave cpu Tylan 2 up Tylan 3 yellow Needs test Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 2.48/30 Tylan 8-SiGe up 10.38/30 Tylan 9-Poly up 16.71/30 Tylan 10-Nitride up 11.29/30 Tylan 11-LTO down broken sheath 14.5/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up cryo regen completed getting beam Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 606 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Thu Apr 9 07:23:09 2009 From: rseymour at stanford.edu (Ray Seymour) Date: Thu, 09 Apr 2009 07:23:09 -0700 Subject: Diffusion Morning report Message-ID: <49DE04CD.6000905@stanford.edu> Good Morning All, BPSG loader may be dragging in the tube.Tylan 1 still observing. No other issues at this time. Date: 4/9/09 THICKNESS-Change at Tube Name/Number Status * * * * * * Tylan 1 yellow *mfs alarm-reset slave cpu* * * * * Tylan 2 up * * * * * * Tylan 3 yellow * * * * * * Tylan 4 up * * * * * * Tylan 5-BBr3 up * * * * * * Tylan 6-POCl3 up * * * * * * Tylan 7-TEOS2 up * * *2.48/30* * * Tylan 8-SiGe up * * *10.38/30* * * Tylan 9-Poly up * * *16.71/30* * * Tylan 10-Nitride up * * *11.34/30* * * Tylan 11-LTO down *loader dragging * *14.5/30* * * Tylan 12-FGA up * * * * * * Thermco 1 up * * * * * * Thermco 2 up * * * * * * Thermco 3 future * * * * * * Thermco4 future * * * * * * Thermco Poly1 up * * * * * * Thermco Poly2 up * * * * * * Thermco Nitride1 up * * * * * * Thermco Nitride2 future * * * * * * TEL Spa up * * * * * * Burn Box up * * * * * * Ebeam up * **cryo regen completed getting beam* * * * * ZYGO up * * * * * * FGA2 up * * * * * * SiH4 for furnaces *A on line 594 psi* * changeover working well * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Apr 10 06:04:31 2009 From: tberg at stanford.edu (Ted Berg) Date: Fri, 10 Apr 2009 06:04:31 -0700 Subject: Diffusion Morning Report 04/10/09 Message-ID: <49DF43DF.8060405@stanford.edu> Good Morning All, Looking good this morning. Beginning temp cal on Tylan 1 . Burn box cleaned this morning. No other issues at this time. Date: 4/10/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 yellow mfs alarm-reset slave cpu Temp Cal Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 2.48/30 Tylan 8-SiGe up 10.38/30 Tylan 9-Poly up 16.86/30 Tylan 10-Nitride up 11.34/30 Tylan 11-LTO yellow broken sheath replaced 16.56/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 606 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Apr 13 07:20:01 2009 From: tberg at stanford.edu (Ted Berg) Date: Mon, 13 Apr 2009 07:20:01 -0700 Subject: Diffusion Morning Report 04/13/09 Message-ID: <49E34A11.5090305@stanford.edu> Good Morning All, Looking good this morning. Doing Temp cal on Tylan 1 No other problems at this time. Date: 4/13/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 yellow temp cal Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 2.48/30 Tylan 8-SiGe up 11.63/30 Tylan 9-Poly up 17.3/30 Tylan 10-Nitride up 13.05/30 Tylan 11-LTO up 18.56/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 585psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Apr 14 06:19:25 2009 From: tberg at stanford.edu (Ted Berg) Date: Tue, 14 Apr 2009 06:19:25 -0700 Subject: Diffusion Morning Report 04/14/09 Message-ID: <49E48D5D.5060008@stanford.edu> Good Morning All, Looking good this morning. Completed Temp cal on Tylan 1 No other issues at this time. Date: 4/14/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 yellow temp cal completed Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 2.48/30 Tylan 8-SiGe up 11.63/30 Tylan 9-Poly up 17.3/30 Tylan 10-Nitride up 13.05/30 Tylan 11-LTO up 20.1/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 585psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Apr 15 06:31:51 2009 From: tberg at stanford.edu (Ted Berg) Date: Wed, 15 Apr 2009 06:31:51 -0700 Subject: Diffusion Morning Report 04/15/09 Message-ID: <49E5E1C7.2070404@stanford.edu> Good Morning All, Happy tax day, Hope everyone is filed. Looking good in diffusion Thermco Nitride has boat issues maybe because of the power glitch. looking into it. Ebeam has loader issues maybe also from power glitches. no other problems that i know of. Date: 4/15/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 yellow temp cal completed Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 2.48/30 Tylan 8-SiGe up 12.07/30 Tylan 9-Poly up 17.72/30 Tylan 10-Nitride up 13.06/30 Tylan 11-LTO up 20.5/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 yellow boat issue? Thermco Nitride2 future TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 575psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Apr 16 06:19:38 2009 From: tberg at stanford.edu (Ted Berg) Date: Thu, 16 Apr 2009 06:19:38 -0700 Subject: Diffusion Morning Report 04/16/09 Message-ID: <49E7306A.1010008@stanford.edu> Good Morning All, Looking good this morning. TYlan LTO has broken cantilever sheath. Ebeam has jammed cassette. No other issues at this time. Date: 4/16/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 yellow temp cal completed Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 2.48/30 Tylan 8-SiGe up 12.07/30 Tylan 9-Poly up 17.72/30 Tylan 10-Nitride up 13.06/30 Tylan 11-LTO down broken cantilever sheaths 20.85/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam down cassette jammed ZYGO up FGA2 up SiH4 for furnaces A on line 566 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Apr 17 06:23:04 2009 From: tberg at stanford.edu (Ted Berg) Date: Fri, 17 Apr 2009 06:23:04 -0700 Subject: Diffusion Morning Report 04/17/09 Message-ID: <49E882B8.1040102@stanford.edu> Good Morning All, Looking good this morning. LTO looks good after quartz change, Burn box clean this morning. No other major issues at this time, Date: 4/17/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up test good Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 2.48/30 Tylan 8-SiGe up 12.07/30 Tylan 9-Poly up 17.87/30 Tylan 10-Nitride up 13.28/30 Tylan 11-LTO up results look good 20.85/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam down cassette jammed ZYGO up FGA2 up SiH4 for furnaces A on line 566 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Apr 20 06:51:17 2009 From: tberg at stanford.edu (Ted Berg) Date: Mon, 20 Apr 2009 06:51:17 -0700 Subject: Diffusion Morning Report 04/20/09 Message-ID: <49EC7DD5.6030900@stanford.edu> Good Morning All, Looking good this morning. LTO has MFS alarms and is not pumping. TEOS2 has mfs alarms. No other issues at this time. Date: 4/20/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow mfs alarms 2.5/30 Tylan 8-SiGe up 12.51/30 Tylan 9-Poly up 18.57/30 Tylan 10-Nitride up 13.4/30 Tylan 11-LTO yellow not pumping 22.8/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 566 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Apr 21 06:28:49 2009 From: tberg at stanford.edu (Ted Berg) Date: Tue, 21 Apr 2009 06:28:49 -0700 Subject: Diffusion Morning Report 04/21/09 Message-ID: <49EDCA11.6070404@stanford.edu> Good Morning All, Looking good this morning. Thermco poly1 is having trouble with boat cal. Tylan LTO has MFS issues yesterday. SEM4160 has issues. No other problems at this time. Date: 4/21/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 2.5/30 Tylan 8-SiGe up 12.51/30 Tylan 9-Poly up 18.57/30 Tylan 10-Nitride up 13.4/30 Tylan 11-LTO yellow mfs alarms 23.4/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 yellow Boat cal Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 566 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Apr 22 06:17:25 2009 From: tberg at stanford.edu (Ted Berg) Date: Wed, 22 Apr 2009 06:17:25 -0700 Subject: Diffusion Morning Report 04/22/09 Message-ID: <49EF18E5.4050509@stanford.edu> Good Morning All, Looking good this morning. Tylan 1 has loader issues and BPSG has pumping issues again. No other issue at this time. Date: 4/22/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 down loader issue Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 2.5/30 Tylan 8-SiGe up 12.51/30 Tylan 9-Poly up 18.72/30 Tylan 10-Nitride up 13.4/30 Tylan 11-LTO down won't pump 23.82/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 566 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Apr 23 06:25:12 2009 From: tberg at stanford.edu (Ted Berg) Date: Thu, 23 Apr 2009 06:25:12 -0700 Subject: Diffusion Morning Report 04/23/09 Message-ID: <49F06C38.20500@stanford.edu> Good Morning All, Looking good this morning. LTO has pumping issues again.Looking into it. No other issues at this time. Date: 4/23/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 3.2/30 Tylan 8-SiGe up 12.95/30 Tylan 9-Poly up 19.24/30 Tylan 10-Nitride up 13.52/30 Tylan 11-LTO down won't pump 23.92/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 566 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From rseymour at stanford.edu Fri Apr 24 07:40:48 2009 From: rseymour at stanford.edu (Ray Seymour) Date: Fri, 24 Apr 2009 07:40:48 -0700 Subject: Diffusion Morning Report Message-ID: <49F1CF70.5070703@stanford.edu> Good Morning All, Ted is out today. There are no issues in Diffusion this morning. Have a great weekend. Date: 4/25/09 THICKNESS-Change at Tube Name/Number Status * * * * * * Tylan 1 up * * * * Tylan 2 up * * * * * * Tylan 3 up * * * * * * Tylan 4 up * * * * * * Tylan 5-BBr3 up * * * * * * Tylan 6-POCl3 up * * * * * * Tylan 7-TEOS2 up * * *2.5/30* * * Tylan 8-SiGe up * * *12.51/30* * * Tylan 9-Poly up * * *18.72/30* * * Tylan 10-Nitride up * * *13.4/30* * * Tylan 11-LTO up * * *23.82/30* * * Tylan 12-FGA up * * * * * * Thermco 1 up * * * * * * Thermco 2 up * * * * * * Thermco 3 future * * * * * * Thermco4 future * * * * * * Thermco Poly1 up * * * * * * Thermco Poly2 up * * * * * * Thermco Nitride1 up * * * * * * Thermco Nitride2 future * * * * * * TEL Spa up * * * * * * Burn Box up * cleaned this morning * * * * * Ebeam up * * * * * * ZYGO up * * * * * * FGA2 up * * * * * * SiH4 for furnaces *A on line 569 psi* * changeover working well * * * -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Apr 27 06:35:33 2009 From: tberg at stanford.edu (Ted Berg) Date: Mon, 27 Apr 2009 06:35:33 -0700 Subject: Diffusion Morning Report 04/27/09 Message-ID: <49F5B4A5.1080107@stanford.edu> Good Morning All, Looking good this morning. Thermco 2 has possible uniformity issues. Ebeam has loader issues. No other problems at this time. Date: 4/27/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 3.2/30 Tylan 8-SiGe up 12.95/30 Tylan 9-Poly up 20.59/30 Tylan 10-Nitride up 13.82/30 Tylan 11-LTO up 28/30 Tylan 12-FGA up Thermco 1 up Thermco 2 yellow Possible uniformity issues Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future TEL Spa up Burn Box up Ebeam yellow console not responding ZYGO up FGA2 up SiH4 for furnaces A on line 556 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Apr 28 06:22:27 2009 From: tberg at stanford.edu (Ted Berg) Date: Tue, 28 Apr 2009 06:22:27 -0700 Subject: Diffusion Morning Report 04/28/09 Message-ID: <49F70313.7050006@stanford.edu> Good Morning All, Looking OK this morning. LTO has broken sheaths again. Ebeam has no beam current. Thermco 2 has possible uniformity issues. The fun never ends. Date: 4/28/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 3.2/30 Tylan 8-SiGe up 12.95/30 Tylan 9-Poly up 20.59/30 Tylan 10-Nitride up 13.82/30 Tylan 11-LTO down broken sheath 28.1/30 Tylan 12-FGA up Thermco 1 up Thermco 2 yellow Possible uniformity issues Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future TEL Spa up Burn Box up Ebeam down no beam current ZYGO up FGA2 up SiH4 for furnaces A on line 556 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Apr 29 06:29:42 2009 From: tberg at stanford.edu (Ted Berg) Date: Wed, 29 Apr 2009 06:29:42 -0700 Subject: Diffusion Morning Report 04/29/09 Message-ID: <49F85646.7070803@stanford.edu> Good Morning All, Looking good this morning. Ray has completed recal of Tylan 1 testing. Thermco 2 has possible uniformity issues. No other issues at this time. Date: 4/29/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 3.2/30 Tylan 8-SiGe up 12.95/30 Tylan 9-Poly up 20.59/30 Tylan 10-Nitride up 13.82/30 Tylan 11-LTO up 28.1/30 Tylan 12-FGA up Thermco 1 up Thermco 2 yellow Possible uniformity issues Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 548 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Apr 30 06:44:10 2009 From: tberg at stanford.edu (Ted Berg) Date: Thu, 30 Apr 2009 06:44:10 -0700 Subject: Diffusion Morning Report 04/30/09 Message-ID: <49F9AB2A.2010905@stanford.edu> Good Morning All, Looking good this morning. Lto seems to be scraping again. Tylan 2 has a TC issue. SEM 4160 not opening. Ebeam cant run DEF Cf cl, Tylan BPSG will be going down on Monday for pull and clean. No other issues at this time. Date: 4/30/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 yellow tc error Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 3.2/30 Tylan 8-SiGe up 12.95/30 Tylan 9-Poly up 20.59/30 Tylan 10-Nitride up 13.82/30 Tylan 11-LTO yellow scraping noise 29.95/30 Tylan 12-FGA up Thermco 1 up Thermco 2 yellow Possible uniformity issues Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco bpsg future TEL Spa up Burn Box up Ebeam yellow can't complete def cf cl ZYGO up FGA2 up SiH4 for furnaces A on line 548 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: