From tberg at stanford.edu Wed Dec 2 07:39:17 2009 From: tberg at stanford.edu (Ted Berg) Date: Wed, 02 Dec 2009 07:39:17 -0800 Subject: Diffusion Morning Report 12/02/09 Message-ID: <4B168A25.5010505@stanford.edu> Good Morning All, Looking Ok this morning. Tylan nitride has possible door close issues. LTO needs test after pump replacement. Thermco Nitride has uniformity issues. TEL Spa down for MW overtemp.Ebeam has computer issues. Therrmco Lto testing for qual. No other issues at this time, Date: 12/2/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow modified pump recipe 4.3/30 Tylan 8-SiGe up 7.05/30 Tylan 9-Poly up 3.27/30 Tylan 10-Nitride yellow door close issue 14.36/30 Tylan 11-LTO yellow needs test after pump change 6.26/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 yellow uniformity issues ? Thermco bpsg future testing for qual TEL Spa down MW overheat issues Burn Box up Ebeam yellow computer issues ZYGO up FGA2 up SiH4 for furnaces A on line 590 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Dec 3 06:48:16 2009 From: tberg at stanford.edu (Ted Berg) Date: Thu, 03 Dec 2009 06:48:16 -0800 Subject: Diffusion Morning Report 12/03/09 Message-ID: <4B17CFB0.4040803@stanford.edu> Good Morning All, Looking OK this morning. TEL back to yellow for testing/troubleshooting. Ebeam still has computer issues. Tylan nitride has possible door close issues. Tylan BPSG has been run since pump change but no official test. Thermco Nitride has uniformity issues. Thermco LTO testing for qual. Date: 12/3/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow modified pump recipe 4.3/30 Tylan 8-SiGe up 7.05/30 Tylan 9-Poly up 4.0/30 Tylan 10-Nitride yellow door close issue 14.36/30 Tylan 11-LTO yellow needs test after pump change 7.63/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 yellow uniformity issues ? Thermco bpsg future testing for qual TEL Spa yellow MW overheat issues Burn Box up Ebeam yellow computer issues ZYGO up FGA2 up SiH4 for furnaces A on line 575 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Dec 4 08:40:35 2009 From: tberg at stanford.edu (Ted Berg) Date: Fri, 04 Dec 2009 08:40:35 -0800 Subject: Diffusion Morning Report 12/04/09 Message-ID: <4B193B83.5060800@stanford.edu> Good Morning All, Looking OK this morning. Burn box cleaned this morning. LTO has broken cantilever sheaths. Thermco Nitride testing Uniformity. TEL Spa in yellow for observation. Ebeam still has computer issues. Thermco LTO testing with new boat. No other issues at this time. Date: 12/4/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow modified pump recipe 4.3/30 Tylan 8-SiGe up 7.05/30 Tylan 9-Poly up 4.0/30 Tylan 10-Nitride up 18.51/30 Tylan 11-LTO down Broken cantilever sheath 7.66/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 yellow uniformity issues ? Thermco bpsg future testing for qual TEL Spa yellow MW overheat issues Burn Box up Cleaned this morning Ebeam yellow computer issues ZYGO up FGA2 up SiH4 for furnaces A on line 575 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Dec 7 06:37:40 2009 From: tberg at stanford.edu (Ted Berg) Date: Mon, 07 Dec 2009 06:37:40 -0800 Subject: Diffusion Morning Report 12/07/09 Message-ID: <4B1D1334.3040604@stanford.edu> Good Morning All, Looking OK this morning. TEOS has pumping issues. Tylan LTO making noises when boat is running. Thermco Nitride uniformity issues.Ebeam still has computer issues.THermco LTO testing for qual. No other issues at this time. Date: 12/7/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow pumping issues 7.6/30 Tylan 8-SiGe up 7.05/30 Tylan 9-Poly up 4.0/30 Tylan 10-Nitride up 18.51/30 Tylan 11-LTO yellow door squeeking 8.55/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 yellow uniformity issues ? Thermco bpsg future testing for qual TEL Spa yellow MW overheat issues Burn Box up Ebeam yellow computer issues ZYGO up FGA2 up SiH4 for furnaces A on line 550 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Dec 8 06:34:26 2009 From: tberg at stanford.edu (Ted Berg) Date: Tue, 08 Dec 2009 06:34:26 -0800 Subject: Diffusion Morning Report 12/08/09 Message-ID: <4B1E63F2.6020400@stanford.edu> Good Morning All, Looking good this morning. TEOS had some pumping issues. Thermco Nitride has uniformity issues. Thermco LTO is testing for qual. Ebeam still has computer issues. No othe problems at this time. Date: 12/8/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 yellow pumping issues 7.6/30 Tylan 8-SiGe up 7.05/30 Tylan 9-Poly up 4.57/30 Tylan 10-Nitride up 18.51/30 Tylan 11-LTO up 10.91/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 yellow uniformity issues ? Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam yellow computer issues ZYGO up FGA2 up SiH4 for furnaces A on line 550 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Dec 9 06:30:57 2009 From: tberg at stanford.edu (Ted Berg) Date: Wed, 09 Dec 2009 06:30:57 -0800 Subject: Diffusion Morning Report 12/09/09 Message-ID: <4B1FB4A1.1090005@stanford.edu> Good Morning All, Looking good this morning. The end cap on FGA2 is stuck again. TEOS is not pumping down. Process is wortking on THermco Nitride and Thermco LTO. Ebeam still has computer issues . No other issues at this time. Date: 12/9/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 down pumping issues 7.6/30 Tylan 8-SiGe up 7.05/30 Tylan 9-Poly up 4.57/30 Tylan 10-Nitride up 18.51/30 Tylan 11-LTO up 12.31/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 yellow uniformity issues ? Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam yellow computer issues ZYGO up FGA2 yellow cap is stuck SiH4 for furnaces A on line 520 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Dec 10 06:18:42 2009 From: tberg at stanford.edu (Ted Berg) Date: Thu, 10 Dec 2009 06:18:42 -0800 Subject: Diffusion Morning Report 12/10/09 Message-ID: <4B210342.3030003@stanford.edu> Good Morning All. Looking good this morning.TEOS has a broken tube will need to be replaced. Thermco Nitride and LTO Being tweeked by process. Ebeam still has computer issues. No other problems at this time. Date: 12/10/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 down pumping issues 7.6/30 Tylan 8-SiGe up 7.05/30 Tylan 9-Poly up 4.52/30 Tylan 10-Nitride up 18.9/30 Tylan 11-LTO up 12.31/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 yellow uniformity issues ? Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam yellow computer issues ZYGO up FGA2 up SiH4 for furnaces A on line 520 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Dec 11 06:50:38 2009 From: tberg at stanford.edu (Ted Berg) Date: Fri, 11 Dec 2009 06:50:38 -0800 Subject: Diffusion Morning Report 12/11/09 Message-ID: <4B225C3E.6060501@stanford.edu> Good Morning All, Looking good this morning. TEOS still has tube issues. Process still working on Thermco Nitride and LTO. Ebeam still has computer issues. No other issues at this time. Date: 12/10/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 down pumping issues 7.6/30 Tylan 8-SiGe up 7.45/30 Tylan 9-Poly up 4.52/30 Tylan 10-Nitride up 18.9/30 Tylan 11-LTO up 13.9/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 yellow uniformity issues ? Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam yellow computer issues ZYGO up FGA2 up SiH4 for furnaces A on line 520 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Dec 14 06:27:08 2009 From: tberg at stanford.edu (Ted Berg) Date: Mon, 14 Dec 2009 06:27:08 -0800 Subject: Diffusion Morning Report 12/14/09 Message-ID: <4B264B3C.3090803@stanford.edu> Good Morning All, Looking good this morning. TEOS tube being replaced.Thermco Nitride and LTO being tested by process.Ebeam still has computer issues. Thermco poly1 has a broken boat. 4160 has some viruses apparently. No other issues at this time. Date: 12/14/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 down tube change 0/30 Tylan 8-SiGe up 7.45/30 Tylan 9-Poly up 4.84/30 Tylan 10-Nitride up 20.3/30 Tylan 11-LTO up 15.11/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 yellow broken boat Thermco Poly2 up Thermco Nitride1 yellow uniformity issues ? Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam yellow computer issues ZYGO up FGA2 up SiH4 for furnaces A on line 520 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Dec 15 07:21:14 2009 From: tberg at stanford.edu (Ted Berg) Date: Tue, 15 Dec 2009 07:21:14 -0800 Subject: Diffusion Morning Report 12/15/09 Message-ID: <4B27A96A.1060407@stanford.edu> Good Morning All, Looking good this morning.TEOS tube change. Thermco Nitride and LTO -process testing. Ebeam still has computer issues. Thermco 1 had torch issues-checked lamps OK.. No other issues at this time. Date: 12/15/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 down tube change 0/30 Tylan 8-SiGe up 7.45/30 Tylan 9-Poly up 4.84/30 Tylan 10-Nitride up 20.3/30 Tylan 11-LTO up 15.11/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 yellow uniformity issues ? Thermco bpsg future testing for qual TEL Spa up Burn Box up Ebeam yellow computer issues ZYGO up FGA2 up SiH4 for furnaces A on line 520 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: