Diffusion Morning Report 12/03/09

Ted Berg tberg at stanford.edu
Thu Dec 3 06:48:16 PST 2009

Good Morning All,
    Looking OK this morning. TEL back to yellow for 
testing/troubleshooting. Ebeam still has computer issues. Tylan nitride 
has possible door close issues. Tylan BPSG has been run since pump 
change but no official test. Thermco Nitride has uniformity issues. 
Thermco LTO testing for qual.

  	Date: 	12/3/09 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	 up 	  	  	  	 
Tylan 2 	up 	  	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	up 	  	  	  	 
Tylan 5-BBr3 	up 	  	  	  	 
Tylan 6-POCl3 	up 	  	  	  	 
Tylan 7-TEOS2 	yellow 	modified pump recipe 	4.3/30 	  	 
Tylan 8-SiGe 	up 	  	7.05/30 	  	 
Tylan 9-Poly 	up 	  	4.0/30 	  	 
Tylan 10-Nitride 	yellow 	door close issue 	14.36/30 	  	 
Tylan 11-LTO 	yellow 	needs test after pump change 	7.63/30 	  	 
Tylan 12-FGA 	up 	  	  	  	 
Thermco 1 	up 	  	  	  	 
Thermco 2 	up 	  	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	up 	  	  	  	 
Thermco Poly2 	up 	  	  	  	 
Thermco Nitride1 	yellow 	uniformity issues ? 	  	  	 
Thermco bpsg 	future 	testing for qual 	  	  	 
TEL Spa 	yellow 	MW overheat issues 	  	  	 
Burn Box 	up 	
Ebeam 	yellow 	computer issues 	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	up 	  	  	  	 
SiH4 for furnaces 	  	A on line 575 psi 	 changeover working well  	  	 

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