Diffusion Morning Report 12/04/09

Ted Berg tberg at stanford.edu
Fri Dec 4 08:40:35 PST 2009

Good Morning All,
    Looking OK this morning. Burn box cleaned this morning. LTO has 
broken cantilever sheaths. Thermco Nitride testing Uniformity. TEL Spa 
in yellow for observation. Ebeam still has computer issues. Thermco LTO 
testing with new boat. No other issues at this time.

  	Date: 	12/4/09 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	 up 	  	  	  	 
Tylan 2 	up 	  	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	up 	  	  	  	 
Tylan 5-BBr3 	up 	  	  	  	 
Tylan 6-POCl3 	up 	  	  	  	 
Tylan 7-TEOS2 	yellow 	modified pump recipe 	4.3/30 	  	 
Tylan 8-SiGe 	up 	  	7.05/30 	  	 
Tylan 9-Poly 	up 	  	4.0/30 	  	 
Tylan 10-Nitride 	up 	  	18.51/30 	  	 
Tylan 11-LTO 	down 	Broken cantilever sheath 	7.66/30 	  	 
Tylan 12-FGA 	up 	  	  	  	 
Thermco 1 	up 	  	  	  	 
Thermco 2 	up 	  	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	up 	  	  	  	 
Thermco Poly2 	up 	  	  	  	 
Thermco Nitride1 	yellow 	uniformity issues ? 	  	  	 
Thermco bpsg 	future 	testing for qual 	  	  	 
TEL Spa 	yellow 	MW overheat issues 	  	  	 
Burn Box 	up 	Cleaned this morning 	   	  	 
Ebeam 	yellow 	computer issues 	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	up 	  	  	  	 
SiH4 for furnaces 	  	A on line 575 psi 	 changeover working well  	  	 

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