Diffusion Morning Report 12/07/09

Ted Berg tberg at stanford.edu
Mon Dec 7 06:37:40 PST 2009


Good Morning All,
    Looking OK this morning. TEOS has pumping issues. Tylan LTO making 
noises when boat is running. Thermco Nitride uniformity issues.Ebeam 
still has computer issues.THermco LTO testing for qual. No other issues 
at this time.

  	  	  	  	  	 
  	Date: 	12/7/09 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	up 	  	  	  	 
Tylan 2 	up 	  	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	up 	  	  	  	 
Tylan 5-BBr3 	up 	  	  	  	 
Tylan 6-POCl3 	up 	  	  	  	 
Tylan 7-TEOS2 	yellow 	pumping issues 	7.6/30 	  	 
Tylan 8-SiGe 	up 	  	7.05/30 	  	 
Tylan 9-Poly 	up 	  	4.0/30 	  	 
Tylan 10-Nitride 	up 	  	18.51/30 	  	 
Tylan 11-LTO 	yellow 	door squeeking 	8.55/30 	  	 
Tylan 12-FGA 	up 	  	  	  	 
Thermco 1 	up 	  	  	  	 
Thermco 2 	up 	  	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	up 	  	  	  	 
Thermco Poly2 	up 	  	  	  	 
Thermco Nitride1 	yellow 	uniformity issues ? 	  	  	 
Thermco bpsg 	future 	testing for qual 	  	  	 
TEL Spa 	yellow 	MW overheat issues 	  	  	 
Burn Box 	up 	  	   	  	 
Ebeam 	yellow 	computer issues 	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	up 	  	  	  	 
SiH4 for furnaces 	  	A on line 550 psi 	 changeover working well  	  	 


-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/diffusion/attachments/20091207/c36c51c6/attachment.html>


More information about the diffusion mailing list