Diffusion Morning Report 12/10/09

Ted Berg tberg at stanford.edu
Thu Dec 10 06:18:42 PST 2009


Good Morning All.
    Looking good this morning.TEOS has a broken tube will need to be 
replaced. Thermco Nitride and LTO Being tweeked by process. Ebeam still 
has computer issues. No other problems at this time.

  	  	  	  	  	 
  	Date: 	12/10/09 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	up 	  	  	  	 
Tylan 2 	up 	  	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	up 	  	  	  	 
Tylan 5-BBr3 	up 	  	  	  	 
Tylan 6-POCl3 	up 	  	  	  	 
Tylan 7-TEOS2 	down 	pumping issues 	7.6/30 	  	 
Tylan 8-SiGe 	up 	  	7.05/30 	  	 
Tylan 9-Poly 	up 	  	4.52/30 	  	 
Tylan 10-Nitride 	up 	  	18.9/30 	  	 
Tylan 11-LTO 	up 	  	12.31/30 	  	 
Tylan 12-FGA 	up 	  	  	  	 
Thermco 1 	up 	  	  	  	 
Thermco 2 	up 	  	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	up 	  	  	  	 
Thermco Poly2 	up 	  	  	  	 
Thermco Nitride1 	yellow 	uniformity issues ? 	  	  	 
Thermco bpsg 	future 	testing for qual 	  	  	 
TEL Spa 	up 	  	  	  	 
Burn Box 	up 	  	   	  	 
Ebeam 	yellow 	computer issues 	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	up 	  	  	  	 
SiH4 for furnaces 	  	A on line 520 psi 	 changeover working well  	  	 


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