Diffusion Morning Report 12/14/09

Ted Berg tberg at stanford.edu
Mon Dec 14 06:27:08 PST 2009


Good Morning All,
    Looking good this morning. TEOS tube being replaced.Thermco Nitride 
and LTO being tested by process.Ebeam still has computer issues. Thermco 
poly1 has a broken boat. 4160 has some viruses apparently.  No other 
issues at this time.

 

  	  	  	  	  	 
  	Date: 	12/14/09 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	up 	  	  	  	 
Tylan 2 	up 	  	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	up 	  	  	  	 
Tylan 5-BBr3 	up 	  	  	  	 
Tylan 6-POCl3 	up 	  	  	  	 
Tylan 7-TEOS2 	down 	tube change 	0/30 	  	 
Tylan 8-SiGe 	up 	  	7.45/30 	  	 
Tylan 9-Poly 	up 	  	4.84/30 	  	 
Tylan 10-Nitride 	up 	  	20.3/30 	  	 
Tylan 11-LTO 	up 	  	15.11/30 	  	 
Tylan 12-FGA 	up 	  	  	  	 
Thermco 1 	up 	  	  	  	 
Thermco 2 	up 	  	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	yellow 	broken boat 	  	  	 
Thermco Poly2 	up 	  	  	  	 
Thermco Nitride1 	yellow 	uniformity issues ? 	  	  	 
Thermco bpsg 	future 	testing for qual 	  	  	 
TEL Spa 	up 	  	  	  	 
Burn Box 	up 	  	   	  	 
Ebeam 	yellow 	computer issues 	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	up 	  	  	  	 
SiH4 for furnaces 	  	A on line 520 psi 	 changeover working well  	  	 


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