From tberg at stanford.edu Mon Feb 2 06:30:40 2009 From: tberg at stanford.edu (Ted Berg) Date: Mon, 02 Feb 2009 06:30:40 -0800 Subject: Diffusion Morning Report 02/02/09 Message-ID: <49870390.8010609@stanford.edu> Good Morning All, Looking good this morning. Ebeam is back up finally thanks to FS. Tylan Nitride is down for pull and clean. Tyaln FGA is doing temp cal. Tylan 1 is hanging in there after Power supply adjust. No other issues at this time. Date: 2/2/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 down I/O error observing Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 18.16/30 Tylan 8-SiGe yellow 0/30 Tylan 9-Poly up 23.45/30 Tylan 10-Nitride down pull and clean 0/30 Tylan 11-LTO up 17.08/30 Tylan 12-FGA yellow Doesn't reach 550-temp cal Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam up ready to use ZYGO up FGA2 up SiH4 for furnaces B on line 160 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Feb 3 06:32:20 2009 From: tberg at stanford.edu (Ted Berg) Date: Tue, 03 Feb 2009 06:32:20 -0800 Subject: Diffusion Morning Report 02/03/09 Message-ID: <49885574.70903@stanford.edu> Good Morning All, Looking good this morning. Tylan Nitride is back together after pull and clean. Tylan FGA is doing temp cal. Tylan 1 under observation has run several times and has not lost recipes since PS adjust. No other issues at this time Date: 2/3/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 yellow I/O error observing Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 18.16/30 Tylan 8-SiGe yellow 0/30 Tylan 9-Poly up 23.45/30 Tylan 10-Nitride down pull and clean 0/30 Tylan 11-LTO up 18.69/30 Tylan 12-FGA yellow temp cal Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam up ready to use ZYGO up FGA2 up SiH4 for furnaces B on line 160 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Feb 4 06:22:06 2009 From: tberg at stanford.edu (Ted Berg) Date: Wed, 04 Feb 2009 06:22:06 -0800 Subject: Diffusion Morning Report 02/04/09 Message-ID: <4989A48E.3070909@stanford.edu> Good Morning All, Looking good this morning. Tylan nitride is back up after pull and clean. Tylan 1 is still behaving after PS adjust. Temp cal completed on FGA will try 550 recipe again. Broken TC sheath cahnged on Tylan 2. No other problems at this time. Date: 2/4/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 yellow I/O error observing Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 18.16/30 Tylan 8-SiGe yellow 0/30 Tylan 9-Poly up 23.45/30 Tylan 10-Nitride up pull and clean completed .15/30 Tylan 11-LTO up 19.39/30 Tylan 12-FGA yellow temp cal completed Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam up ready to use ZYGO up FGA2 up SiH4 for furnaces B on line 150 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Feb 5 06:28:27 2009 From: tberg at stanford.edu (Ted Berg) Date: Thu, 05 Feb 2009 06:28:27 -0800 Subject: Diffusion Morning Report 02/05/07 Message-ID: <498AF78B.4030302@stanford.edu> Good Morning All, Looking OK this morning. Ebeam is down again no Ext current. TEOS 2 ampule is empty. Tylan1 is hanging in there. SiGe has possible temp control issues Nitride had MFS alarms last step and door close issues. No other issues at this time. Date: 2/5/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 yellow I/O error observing Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 down teos empty 18.16/30 Tylan 8-SiGe yellow 0/30 Tylan 9-Poly up 23.45/30 Tylan 10-Nitride up .15/30 Tylan 11-LTO up 20.63/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam down no ext current ZYGO up FGA2 up SiH4 for furnaces B on line 150 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Feb 6 06:15:46 2009 From: tberg at stanford.edu (Ted Berg) Date: Fri, 06 Feb 2009 06:15:46 -0800 Subject: Diffusion Morning Report 02/06/09 Message-ID: <498C4612.2070300@stanford.edu> Good morning All, Looking good this morning. Ebeam-tip replaced baking and recovering Vac. Burn box cleaned this morning. No other issues at this time. Date: 2/6/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up I/O error not occuring Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up teos canister replaced 18.16/30 Tylan 8-SiGe yellow 1.12/30 Tylan 9-Poly up 23.45/30 Tylan 10-Nitride up .15/30 Tylan 11-LTO up 21.233/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam down tip changed ZYGO up FGA2 up SiH4 for furnaces B on line 140 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Feb 9 06:27:01 2009 From: tberg at stanford.edu (Ted Berg) Date: Mon, 09 Feb 2009 06:27:01 -0800 Subject: Diffusion Morning Report 02/098/09 Message-ID: <49903D35.5050101@stanford.edu> Good Morning All, Looking good this morning. Thermco Poly 1 has boat issues and Thermco Poly 2 is missing some tables. Ebeam tip replaced bringing up beam. SiGe temp cal in progress. No other issues at this time. Date: 2/9/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 18.16/30 Tylan 8-SiGe yellow temp cal 1.12/30 Tylan 9-Poly up 23.6/30 Tylan 10-Nitride up .15/30 Tylan 11-LTO up 25.23/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 yellow boat stall Thermco Poly2 yellow tables missing Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam down tip changed ZYGO up FGA2 up SiH4 for furnaces B on line 140 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Feb 10 06:13:58 2009 From: tberg at stanford.edu (Ted Berg) Date: Tue, 10 Feb 2009 06:13:58 -0800 Subject: Diffusion Morning Report 02/10/09 Message-ID: <49918BA6.3020008@stanford.edu> Good Morning All, Looking good this morning. SiGe in temp cal. Ebeam looking for beam. Tylan Nitride pumping issues. No other problems at this time. Date: 2/10/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 18.16/30 Tylan 8-SiGe yellow temp cal 1.12/30 Tylan 9-Poly up 23.6/30 Tylan 10-Nitride down pumping issues .15/30 Tylan 11-LTO up 25.23/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam down tip changed looking for beam ZYGO up FGA2 up SiH4 for furnaces B on line 140 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Feb 11 06:10:02 2009 From: tberg at stanford.edu (Ted Berg) Date: Wed, 11 Feb 2009 06:10:02 -0800 Subject: Diffusion Morning Report 02/11/09 Message-ID: <4992DC3A.6090709@stanford.edu> Good Moirning All, Looking good this morning. Ebaem still looking for beam. Sige in second temp cal. No other issues at this time. Date: 2/11/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 27.9/30 Tylan 8-SiGe yellow temp cal 1.12/30 Tylan 9-Poly up 23.6/30 Tylan 10-Nitride up .15/30 Tylan 11-LTO up 25.23/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam down tip changed looking for beam ZYGO up FGA2 up SiH4 for furnaces B on line 140 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Feb 12 06:12:13 2009 From: tberg at stanford.edu (Ted Berg) Date: Thu, 12 Feb 2009 06:12:13 -0800 Subject: iffusion Morning Report 02/12/09 Message-ID: <49942E3D.8060104@stanford.edu> Good Morning All, Looking good this morning. SiGe is in temp cal for the second time, Ebeam working on beam. No other issues at this time. Date: 2/12/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 up 27.9/30 Tylan 8-SiGe yellow temp cal 1.12/30 Tylan 9-Poly up 23.6/30 Tylan 10-Nitride up .15/30 Tylan 11-LTO up 21.23/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam down tip changed looking for beam ZYGO up FGA2 up SiH4 for furnaces B on line 140 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at snf.stanford.edu Fri Feb 13 07:39:11 2009 From: tberg at snf.stanford.edu (Ted Berg) Date: Fri, 13 Feb 2009 07:39:11 -0800 Subject: Diffusion Morning Report 02/13/09 Message-ID: <4995941F.6030907@snf.stanford.edu> Good Morning All, Looking good this morning. SiGe temp cal in progress. Ebeam looking for beam. No other issues at this time. > > Date: 2/13/09 THICKNESS-Change at > Tube Name/Number Status > Tylan 1 up > Tylan 2 up > Tylan 3 up > Tylan 4 up > Tylan 5-BBr3 up > Tylan 6-POCl3 up > Tylan 7-TEOS2 up 27.9/30 > Tylan 8-SiGe yellow temp cal 1.12/30 > Tylan 9-Poly up 23.75/30 > Tylan 10-Nitride up .22/30 > Tylan 11-LTO up 21.73/30 > Tylan 12-FGA up > Thermco 1 up > Thermco 2 up > Thermco 3 future > Thermco4 future > Thermco Poly1 up > Thermco Poly2 up > Thermco Nitride1 up > Thermco Nitride2 future > TEL Spa up > Burn Box up cleaned this morning > Ebeam down tip changed looking for beam > ZYGO up > FGA2 up > SiH4 for furnaces B on line 130 psi changeover working well > -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Feb 17 06:23:55 2009 From: tberg at stanford.edu (Ted Berg) Date: Tue, 17 Feb 2009 06:23:55 -0800 Subject: Diffusion Morning Report 02/17/09 Message-ID: <499AC87B.9000405@stanford.edu> Good Morning All, Looking OK this morning. TEOS 2 high pressure. SiGe temp cal. Poly added 10 microns since Friday down for tube clean tomorrow. Nitride not pumping.. Ebeam looking for beam. Enough for now. Date: 2/17/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 down high pressure 27.9/30 Tylan 8-SiGe yellow temp cal 1.12/30 Tylan 9-Poly up down tomorrow for tube clean 33.02/30 Tylan 10-Nitride yellow not pumping .22/30 Tylan 11-LTO up 25.63/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam down tip changed looking for beam ZYGO up FGA2 up SiH4 for furnaces B on line 130 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Feb 18 06:42:54 2009 From: tberg at stanford.edu (Ted Berg) Date: Wed, 18 Feb 2009 06:42:54 -0800 Subject: Diffusion Morning Report 02/18/09 Message-ID: <499C1E6E.70808@stanford.edu> Good Morning All, Looking OK. Busy this morning. Poly and TEOS 2 down for pull and clean. SiGe is in temp cal Ebeam still tweeking beam. No other issues at this time. Date: 2/18/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 down pull and clean 0/30 Tylan 8-SiGe yellow temp cal 1.12/30 Tylan 9-Poly down pull and clean 0/30 Tylan 10-Nitride up .27/30 Tylan 11-LTO up 25.63/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam down tip changed looking for beam ZYGO up FGA2 up SiH4 for furnaces B on line 60 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Feb 19 06:05:52 2009 From: tberg at stanford.edu (Ted Berg) Date: Thu, 19 Feb 2009 06:05:52 -0800 Subject: Diffusion Morning Report 02/19/09 Message-ID: <499D6740.3080809@stanford.edu> Good Morning All, Looking good this morning. POly is back up after pull and clean. TEOS is going back together after pull and clean. SiGe temp cal. Ebeam -peaking beam. No other issues at this time. Date: 2/19/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 down pull and clean 0/30 Tylan 8-SiGe yellow temp cal 1.12/30 Tylan 9-Poly up .13/30 Tylan 10-Nitride up .64/30 Tylan 11-LTO up 25.63/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam down tip changed looking for beam ZYGO up FGA2 up SiH4 for furnaces B on line 60 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Feb 20 06:23:15 2009 From: tberg at stanford.edu (Ted Berg) Date: Fri, 20 Feb 2009 06:23:15 -0800 Subject: Diffusion Morning Report 02/20/09 Message-ID: <499EBCD3.2040503@stanford.edu> Good Morning All, Looking good this morning Still checking out SiGe. TEOS 2 pump is dead and out for repair. Ebam still struggling. No other issues at this time. Date: 2/20/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 down clean Completed Pump dead 0/30 Tylan 8-SiGe yellow Hardware check temp cal 1.12/30 Tylan 9-Poly up .13/30 Tylan 10-Nitride up 1.59/30 Tylan 11-LTO up 25.63/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam down tip changed looking for beam ZYGO up FGA2 up SiH4 for furnaces B on line 47 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Mon Feb 23 06:42:44 2009 From: tberg at stanford.edu (Ted Berg) Date: Mon, 23 Feb 2009 06:42:44 -0800 Subject: Diffusion Morning Report 02/23/09 Message-ID: <49A2B5E4.6030403@stanford.edu> Good Morning All, Looking Ok this morning. Several issues: ebeam still looking for max beam, Thermco Poly 2 lost tables, TEOS 2 pump out for rebuild, Tylan Nitride had pumping issues, Sige had MFS alarms. I think thats it for now. Date: 2/23/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 down clean Completed Pump dead 0/30 Tylan 8-SiGe yellow mfs alarms 1.12/30 Tylan 9-Poly up .13/30 Tylan 10-Nitride yellow pumping issues 2.34/30 Tylan 11-LTO up 25.63/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 down lost tables Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam down tip changed looking for beam ZYGO up FGA2 up SiH4 for furnaces B on line 47 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Tue Feb 24 06:13:33 2009 From: tberg at stanford.edu (Ted Berg) Date: Tue, 24 Feb 2009 06:13:33 -0800 Subject: Diffusion Morning Report 02/24/09 Message-ID: <49A4008D.9040805@stanford.edu> Good Morning All, Looking fair this morning lots of stuff down. Tylan Nitride has leak issues and we are changing NH3 so Thermco nitride is also down. TEOS2 pump is out for repair. LTO failed leak test. Thermco bank 2 lost tables-ordered Mother board. Good News James found beam on ebeam and we are now tweeking it in.. No other issues at this time. Date: 2/24/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 down clean Completed Pump dead 0/30 Tylan 8-SiGe yellow mfs alarms 1.12/30 Tylan 9-Poly up .13/30 Tylan 10-Nitride yellow pumping issues,NH3 change 2.34/30 Tylan 11-LTO down leak fail 25.67/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 down lost tables Thermco Nitride1 down NH3 change Thermco Nitride2 future TEL Spa up Burn Box up Ebeam yellow found beam tweeking ZYGO up FGA2 up SiH4 for furnaces A on line 700 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Wed Feb 25 07:18:26 2009 From: tberg at stanford.edu (Ted Berg) Date: Wed, 25 Feb 2009 07:18:26 -0800 Subject: Diffusion Morning Report 02/25/09 Message-ID: <49A56142.5010503@stanford.edu> Good Morning All, Looking OK this morning. TEOS2 pump out for repair. Nitride leak checking Thermco bank2 replacing HD. SiGe mfs alarms at end of cycle.Tylan 1 O2 zero issue No other problems at this time. Date: 2/25/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 yellow O2 leak issue Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 down clean Completed Pump dead 0/30 Tylan 8-SiGe yellow mfs alarms 2/25/1930 Tylan 9-Poly up .13/30 Tylan 10-Nitride yellow pumping issues 2.34/30 Tylan 11-LTO up 25.67/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 yellow replacing HD Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 700 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Thu Feb 26 06:27:01 2009 From: tberg at stanford.edu (Ted Berg) Date: Thu, 26 Feb 2009 06:27:01 -0800 Subject: Diffusion Morning Report 02/26/09 Message-ID: <49A6A6B5.9000608@stanford.edu> Good Morning All, Looking good this morning. Nitride is having pump problems again. TEOS2 pump is back and we will be installing it today. GeH4 is almost empty.It dropped 10 pounds since yesterday. Thermco Poly 1 had boat stall issues. No other problems at this time. Date: 2/26/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 down Pump back installing 0/30 Tylan 8-SiGe yellow mfs alarms 3.8/30 Tylan 9-Poly up .29/30 Tylan 10-Nitride down pumping issues 2.34/30 Tylan 11-LTO up 25.67/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Boat stall Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 700 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: From tberg at stanford.edu Fri Feb 27 06:17:00 2009 From: tberg at stanford.edu (Ted Berg) Date: Fri, 27 Feb 2009 06:17:00 -0800 Subject: Diffusion Morning Report 02/27/09 Message-ID: <49A7F5DC.2080800@stanford.edu> Good Morning All, Looking good this morning. TEOS pump is back and installing. GEh4 cylinder is changed and underleak check. Nitride needs a test No other issues at this time. Date: 2/27/09 THICKNESS-Change at Tube Name/Number Status Tylan 1 up Tylan 2 up Tylan 3 up Tylan 4 up Tylan 5-BBr3 up Tylan 6-POCl3 up Tylan 7-TEOS2 down Pump back installing 0/30 Tylan 8-SiGe yellow mfs alarms 3.8/30 Tylan 9-Poly up .29/30 Tylan 10-Nitride down pumping issues 2.34/30 Tylan 11-LTO up 28.16/30 Tylan 12-FGA up Thermco 1 up Thermco 2 up Thermco 3 future Thermco4 future Thermco Poly1 up Thermco Poly2 up Thermco Nitride1 up Thermco Nitride2 future TEL Spa up Burn Box up Ebeam up ZYGO up FGA2 up SiH4 for furnaces A on line 700 psi changeover working well -------------- next part -------------- An HTML attachment was scrubbed... URL: