Diffusion Morning Report 02/04/09

Ted Berg tberg at stanford.edu
Wed Feb 4 06:22:06 PST 2009

Good Morning All,
    Looking good this morning. Tylan nitride is back up after pull and 
clean. Tylan 1 is still behaving after PS adjust. Temp cal completed on 
FGA will try 550 recipe again. Broken TC sheath cahnged on Tylan 2. No 
other problems at this time.

  	Date: 	2/4/09 	THICKNESS-Change at 	  	 
Tube Name/Number 	Status 	  	  	  	 
Tylan 1 	yellow 	I/O error observing 	  	  	 
Tylan 2 	up 	  	  	  	 
Tylan 3 	up 	  	  	  	 
Tylan 4 	up 	  	  	  	 
Tylan 5-BBr3 	up 	  	  	  	 
Tylan 6-POCl3 	up 	  	  	  	 
Tylan 7-TEOS2 	up 	  	18.16/30 	  	 
Tylan 8-SiGe 	yellow 	  	0/30 	  	 
Tylan 9-Poly 	up 	  	23.45/30 	  	 
Tylan 10-Nitride 	up 	pull and clean completed 	.15/30 	  	 
Tylan 11-LTO 	up 	  	19.39/30 	  	 
Tylan 12-FGA 	yellow 	temp cal completed 	  	  	 
Thermco 1 	up 	  	  	  	 
Thermco 2 	up 	  	  	  	 
Thermco 3 	future 	  	  	  	 
Thermco4 	future 	  	  	  	 
Thermco Poly1 	up 	  	  	  	 
Thermco Poly2 	up 	  	  	  	 
Thermco Nitride1 	up 	  	  	  	 
Thermco Nitride2 	future 	  	  	  	 
TEL Spa 	up 	  	  	  	 
Burn Box 	up 	  	   	  	 
Ebeam 	up 	ready to use 	  	  	 
ZYGO 	up 	  	  	  	 
FGA2 	up 	  	  	  	 
SiH4 for furnaces 	  	B on line 150 psi 	 changeover working well  	  	 

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